12/10/2012	8:58:04 AM	Main Vac valve closed
12/10/2012	8:58:17 AM	Main Vac valve opened
12/10/2012	8:58:44 AM	Recipe started at 8:58 AM
12/10/2012	8:58:44 AM	Helium valve closed
12/10/2012	8:58:44 AM	H2 valve closed
12/10/2012	8:58:44 AM	BCl3 valve closed
12/10/2012	8:58:44 AM	PH3 valve closed
12/10/2012	8:58:44 AM	SiCl4 pre valve closed
12/10/2012	8:58:44 AM	SiCl4 post valve closed
12/10/2012	8:58:44 AM	Main Vac valve closed
12/10/2012	8:58:44 AM	Bypass valve closed
12/10/2012	8:58:44 AM	Bubbler valve closed
12/10/2012	8:58:44 AM	Helium MFC set to  0.000000
12/10/2012	8:58:44 AM	H2 MFC set to  0.000000
12/10/2012	8:58:44 AM	BCl3 MFC set to  0.000000
12/10/2012	8:58:44 AM	PH3 MFC set to  0.000000
12/10/2012	8:58:44 AM	SiCl4 MFC set to  0.000000
12/10/2012	8:58:44 AM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:58:45 AM	Tube furnace set to 0
12/10/2012	8:58:48 AM	Helium valve closed
12/10/2012	8:58:48 AM	BCl3 valve closed
12/10/2012	8:58:48 AM	PH3 valve closed
12/10/2012	8:58:48 AM	SiCl4 pre valve closed
12/10/2012	8:58:48 AM	SiCl4 post valve closed
12/10/2012	8:58:48 AM	Main Vac valve closed
12/10/2012	8:58:48 AM	Bypass valve closed
12/10/2012	8:58:48 AM	Bubbler valve closed
12/10/2012	8:58:48 AM	H2 valve opened
12/10/2012	8:58:48 AM	Helium MFC set to  0.000000
12/10/2012	8:58:48 AM	H2 MFC set to  500.000000
12/10/2012	8:58:48 AM	BCl3 MFC set to  0.000000
12/10/2012	8:58:48 AM	PH3 MFC set to  0.000000
12/10/2012	8:58:48 AM	SiCl4 MFC set to  0.000000
12/10/2012	8:58:48 AM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:58:48 AM	Tube furnace set to 0
12/10/2012	9:00:05 AM	Helium valve closed
12/10/2012	9:00:05 AM	BCl3 valve closed
12/10/2012	9:00:05 AM	PH3 valve closed
12/10/2012	9:00:05 AM	SiCl4 pre valve closed
12/10/2012	9:00:05 AM	SiCl4 post valve closed
12/10/2012	9:00:05 AM	Main Vac valve closed
12/10/2012	9:00:05 AM	Bypass valve closed
12/10/2012	9:00:05 AM	H2 valve opened
12/10/2012	9:00:05 AM	Bubbler valve opened
12/10/2012	9:00:05 AM	Helium MFC set to  0.000000
12/10/2012	9:00:05 AM	H2 MFC set to  500.000000
12/10/2012	9:00:05 AM	BCl3 MFC set to  0.000000
12/10/2012	9:00:05 AM	PH3 MFC set to  0.000000
12/10/2012	9:00:05 AM	SiCl4 MFC set to  0.000000
12/10/2012	9:00:05 AM	Bypass solenoid MFC set to  0.000000
12/10/2012	9:00:05 AM	Tube furnace set to 0
12/10/2012	9:00:06 AM	Helium valve closed
12/10/2012	9:00:06 AM	BCl3 valve closed
12/10/2012	9:00:06 AM	PH3 valve closed
12/10/2012	9:00:06 AM	SiCl4 pre valve closed
12/10/2012	9:00:06 AM	SiCl4 post valve closed
12/10/2012	9:00:06 AM	Main Vac valve closed
12/10/2012	9:00:06 AM	Bypass valve closed
12/10/2012	9:00:06 AM	H2 valve opened
12/10/2012	9:00:06 AM	Bubbler valve opened
12/10/2012	9:00:06 AM	Helium MFC set to  0.000000
12/10/2012	9:00:06 AM	H2 MFC set to  500.000000
12/10/2012	9:00:06 AM	BCl3 MFC set to  0.000000
12/10/2012	9:00:06 AM	PH3 MFC set to  0.000000
12/10/2012	9:00:06 AM	SiCl4 MFC set to  0.000000
12/10/2012	9:00:06 AM	Bypass solenoid MFC set to  0.000000
12/10/2012	9:00:06 AM	Tube furnace set to 1000
12/10/2012	9:30:06 AM	Helium valve closed
12/10/2012	9:30:06 AM	BCl3 valve closed
12/10/2012	9:30:06 AM	Main Vac valve closed
12/10/2012	9:30:06 AM	Bypass valve closed
12/10/2012	9:30:06 AM	H2 valve opened
12/10/2012	9:30:06 AM	PH3 valve opened
12/10/2012	9:30:06 AM	SiCl4 pre valve opened
12/10/2012	9:30:06 AM	SiCl4 post valve opened
12/10/2012	9:30:06 AM	Bubbler valve opened
12/10/2012	9:30:06 AM	Helium MFC set to  0.000000
12/10/2012	9:30:06 AM	H2 MFC set to  500.000000
12/10/2012	9:30:06 AM	BCl3 MFC set to  0.000000
12/10/2012	9:30:06 AM	PH3 MFC set to  0.300000
12/10/2012	9:30:06 AM	SiCl4 MFC set to  25.000000
12/10/2012	9:30:06 AM	Bypass solenoid MFC set to  0.000000
12/10/2012	9:30:06 AM	Tube furnace set to 1000
12/10/2012	9:39:06 AM	Helium valve closed
12/10/2012	9:39:06 AM	BCl3 valve closed
12/10/2012	9:39:06 AM	PH3 valve closed
12/10/2012	9:39:06 AM	SiCl4 pre valve closed
12/10/2012	9:39:06 AM	SiCl4 post valve closed
12/10/2012	9:39:06 AM	Main Vac valve closed
12/10/2012	9:39:06 AM	Bypass valve closed
12/10/2012	9:39:06 AM	H2 valve opened
12/10/2012	9:39:06 AM	Bubbler valve opened
12/10/2012	9:39:06 AM	Helium MFC set to  0.000000
12/10/2012	9:39:06 AM	H2 MFC set to  500.000000
12/10/2012	9:39:06 AM	BCl3 MFC set to  0.000000
12/10/2012	9:39:06 AM	PH3 MFC set to  0.000000
12/10/2012	9:39:06 AM	SiCl4 MFC set to  0.000000
12/10/2012	9:39:06 AM	Bypass solenoid MFC set to  0.000000
12/10/2012	9:39:06 AM	Tube furnace set to 750
12/10/2012	9:44:06 AM	H2 valve closed
12/10/2012	9:44:06 AM	BCl3 valve closed
12/10/2012	9:44:06 AM	PH3 valve closed
12/10/2012	9:44:06 AM	SiCl4 pre valve closed
12/10/2012	9:44:06 AM	SiCl4 post valve closed
12/10/2012	9:44:06 AM	Main Vac valve closed
12/10/2012	9:44:06 AM	Bypass valve closed
12/10/2012	9:44:06 AM	Helium valve opened
12/10/2012	9:44:06 AM	Bubbler valve opened
12/10/2012	9:44:06 AM	Helium MFC set to  500.000000
12/10/2012	9:44:06 AM	H2 MFC set to  0.000000
12/10/2012	9:44:06 AM	BCl3 MFC set to  0.000000
12/10/2012	9:44:06 AM	PH3 MFC set to  0.000000
12/10/2012	9:44:06 AM	SiCl4 MFC set to  0.000000
12/10/2012	9:44:06 AM	Bypass solenoid MFC set to  0.000000
12/10/2012	9:44:07 AM	Tube furnace set to 0
12/10/2012	9:53:24 AM	Helium valve closed
12/10/2012	9:53:24 AM	H2 valve closed
12/10/2012	9:53:24 AM	BCl3 valve closed
12/10/2012	9:53:24 AM	PH3 valve closed
12/10/2012	9:53:24 AM	SiCl4 pre valve closed
12/10/2012	9:53:24 AM	SiCl4 post valve closed
12/10/2012	9:53:24 AM	Main Vac valve closed
12/10/2012	9:53:24 AM	Bypass valve closed
12/10/2012	9:53:24 AM	Bubbler valve closed
12/10/2012	9:53:24 AM	Helium MFC set to  0.000000
12/10/2012	9:53:24 AM	H2 MFC set to  0.000000
12/10/2012	9:53:24 AM	BCl3 MFC set to  0.000000
12/10/2012	9:53:24 AM	PH3 MFC set to  0.000000
12/10/2012	9:53:24 AM	SiCl4 MFC set to  0.000000
12/10/2012	9:53:24 AM	Bypass solenoid MFC set to  0.000000
12/10/2012	9:53:24 AM	Tube furnace set to 0
12/10/2012	9:53:25 AM	Run finished at 9:53 AM
12/10/2012	9:57:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2012	9:57:24 AM	Recipe started at 9:57 AM
12/10/2012	9:57:24 AM	Helium valve closed
12/10/2012	9:57:24 AM	H2 valve closed
12/10/2012	9:57:24 AM	BCl3 valve closed
12/10/2012	9:57:24 AM	PH3 valve closed
12/10/2012	9:57:24 AM	SiCl4 pre valve closed
12/10/2012	9:57:24 AM	SiCl4 post valve closed
12/10/2012	9:57:24 AM	Main Vac valve closed
12/10/2012	9:57:24 AM	Bubbler valve closed
12/10/2012	9:57:24 AM	Bypass valve opened
12/10/2012	9:57:24 AM	Helium MFC set to  0.000000
12/10/2012	9:57:24 AM	H2 MFC set to  0.000000
12/10/2012	9:57:24 AM	BCl3 MFC set to  0.000000
12/10/2012	9:57:24 AM	PH3 MFC set to  0.000000
12/10/2012	9:57:24 AM	SiCl4 MFC set to  0.000000
12/10/2012	9:57:24 AM	Bypass solenoid MFC set to  0.000000
12/10/2012	9:57:24 AM	Tube furnace set to 0
12/10/2012	9:58:31 AM	Helium valve closed
12/10/2012	9:58:31 AM	H2 valve closed
12/10/2012	9:58:31 AM	BCl3 valve closed
12/10/2012	9:58:31 AM	PH3 valve closed
12/10/2012	9:58:31 AM	SiCl4 pre valve closed
12/10/2012	9:58:31 AM	SiCl4 post valve closed
12/10/2012	9:58:31 AM	Main Vac valve closed
12/10/2012	9:58:31 AM	Bubbler valve closed
12/10/2012	9:58:31 AM	Bypass valve opened
12/10/2012	9:58:31 AM	Helium MFC set to  0.000000
12/10/2012	9:58:31 AM	H2 MFC set to  0.000000
12/10/2012	9:58:31 AM	BCl3 MFC set to  0.000000
12/10/2012	9:58:31 AM	PH3 MFC set to  0.000000
12/10/2012	9:58:31 AM	SiCl4 MFC set to  0.000000
12/10/2012	9:58:31 AM	Bypass solenoid MFC set to  0.000000
12/10/2012	9:58:31 AM	Tube furnace set to 0
12/10/2012	9:59:31 AM	Helium valve closed
12/10/2012	9:59:31 AM	H2 valve closed
12/10/2012	9:59:31 AM	BCl3 valve closed
12/10/2012	9:59:31 AM	PH3 valve closed
12/10/2012	9:59:31 AM	SiCl4 pre valve closed
12/10/2012	9:59:31 AM	SiCl4 post valve closed
12/10/2012	9:59:31 AM	Bypass valve closed
12/10/2012	9:59:31 AM	Bubbler valve closed
12/10/2012	9:59:31 AM	Main Vac valve opened
12/10/2012	9:59:31 AM	Helium MFC set to  0.000000
12/10/2012	9:59:31 AM	H2 MFC set to  0.000000
12/10/2012	9:59:31 AM	BCl3 MFC set to  0.000000
12/10/2012	9:59:31 AM	PH3 MFC set to  0.000000
12/10/2012	9:59:31 AM	SiCl4 MFC set to  0.000000
12/10/2012	9:59:31 AM	Bypass solenoid MFC set to  0.000000
12/10/2012	9:59:31 AM	Tube furnace set to 0
12/10/2012	9:59:32 AM	Run finished at 9:59 AM
12/10/2012	9:59:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2012	11:10:19 AM	Main Vac valve closed
12/10/2012	11:10:32 AM	Main Vac valve opened
12/10/2012	11:21:24 AM	Recipe started at 11:21 AM
12/10/2012	11:21:24 AM	Helium valve closed
12/10/2012	11:21:24 AM	H2 valve closed
12/10/2012	11:21:24 AM	BCl3 valve closed
12/10/2012	11:21:24 AM	PH3 valve closed
12/10/2012	11:21:24 AM	SiCl4 pre valve closed
12/10/2012	11:21:24 AM	SiCl4 post valve closed
12/10/2012	11:21:24 AM	Main Vac valve closed
12/10/2012	11:21:24 AM	Bypass valve closed
12/10/2012	11:21:24 AM	Bubbler valve closed
12/10/2012	11:21:24 AM	Helium MFC set to  0.000000
12/10/2012	11:21:24 AM	H2 MFC set to  0.000000
12/10/2012	11:21:24 AM	BCl3 MFC set to  0.000000
12/10/2012	11:21:24 AM	PH3 MFC set to  0.000000
12/10/2012	11:21:24 AM	SiCl4 MFC set to  0.000000
12/10/2012	11:21:24 AM	Bypass solenoid MFC set to  0.000000
12/10/2012	11:21:24 AM	Tube furnace set to 0
12/10/2012	11:21:27 AM	Helium valve closed
12/10/2012	11:21:27 AM	BCl3 valve closed
12/10/2012	11:21:27 AM	PH3 valve closed
12/10/2012	11:21:27 AM	SiCl4 pre valve closed
12/10/2012	11:21:27 AM	SiCl4 post valve closed
12/10/2012	11:21:27 AM	Main Vac valve closed
12/10/2012	11:21:27 AM	Bypass valve closed
12/10/2012	11:21:27 AM	Bubbler valve closed
12/10/2012	11:21:27 AM	H2 valve opened
12/10/2012	11:21:27 AM	Helium MFC set to  0.000000
12/10/2012	11:21:27 AM	H2 MFC set to  500.000000
12/10/2012	11:21:27 AM	BCl3 MFC set to  0.000000
12/10/2012	11:21:27 AM	PH3 MFC set to  0.000000
12/10/2012	11:21:27 AM	SiCl4 MFC set to  0.000000
12/10/2012	11:21:27 AM	Bypass solenoid MFC set to  0.000000
12/10/2012	11:21:27 AM	Tube furnace set to 0
12/10/2012	11:22:41 AM	Helium valve closed
12/10/2012	11:22:41 AM	BCl3 valve closed
12/10/2012	11:22:41 AM	PH3 valve closed
12/10/2012	11:22:41 AM	SiCl4 pre valve closed
12/10/2012	11:22:41 AM	SiCl4 post valve closed
12/10/2012	11:22:41 AM	Main Vac valve closed
12/10/2012	11:22:41 AM	Bypass valve closed
12/10/2012	11:22:41 AM	H2 valve opened
12/10/2012	11:22:41 AM	Bubbler valve opened
12/10/2012	11:22:41 AM	Helium MFC set to  0.000000
12/10/2012	11:22:41 AM	H2 MFC set to  500.000000
12/10/2012	11:22:41 AM	BCl3 MFC set to  0.000000
12/10/2012	11:22:41 AM	PH3 MFC set to  0.000000
12/10/2012	11:22:41 AM	SiCl4 MFC set to  0.000000
12/10/2012	11:22:41 AM	Bypass solenoid MFC set to  0.000000
12/10/2012	11:22:41 AM	Tube furnace set to 0
12/10/2012	11:22:42 AM	Helium valve closed
12/10/2012	11:22:42 AM	BCl3 valve closed
12/10/2012	11:22:42 AM	PH3 valve closed
12/10/2012	11:22:42 AM	SiCl4 pre valve closed
12/10/2012	11:22:42 AM	SiCl4 post valve closed
12/10/2012	11:22:42 AM	Main Vac valve closed
12/10/2012	11:22:42 AM	Bypass valve closed
12/10/2012	11:22:42 AM	H2 valve opened
12/10/2012	11:22:42 AM	Bubbler valve opened
12/10/2012	11:22:42 AM	Helium MFC set to  0.000000
12/10/2012	11:22:42 AM	H2 MFC set to  500.000000
12/10/2012	11:22:42 AM	BCl3 MFC set to  0.000000
12/10/2012	11:22:42 AM	PH3 MFC set to  0.000000
12/10/2012	11:22:42 AM	SiCl4 MFC set to  0.000000
12/10/2012	11:22:42 AM	Bypass solenoid MFC set to  0.000000
12/10/2012	11:22:42 AM	Tube furnace set to 1000
12/10/2012	11:52:42 AM	Helium valve closed
12/10/2012	11:52:42 AM	BCl3 valve closed
12/10/2012	11:52:42 AM	Main Vac valve closed
12/10/2012	11:52:42 AM	Bypass valve closed
12/10/2012	11:52:42 AM	H2 valve opened
12/10/2012	11:52:42 AM	PH3 valve opened
12/10/2012	11:52:42 AM	SiCl4 pre valve opened
12/10/2012	11:52:42 AM	SiCl4 post valve opened
12/10/2012	11:52:42 AM	Bubbler valve opened
12/10/2012	11:52:42 AM	Helium MFC set to  0.000000
12/10/2012	11:52:42 AM	H2 MFC set to  500.000000
12/10/2012	11:52:42 AM	BCl3 MFC set to  0.000000
12/10/2012	11:52:42 AM	PH3 MFC set to  0.300000
12/10/2012	11:52:42 AM	SiCl4 MFC set to  25.000000
12/10/2012	11:52:42 AM	Bypass solenoid MFC set to  0.000000
12/10/2012	11:52:42 AM	Tube furnace set to 1000
12/10/2012	12:02:42 PM	Helium valve closed
12/10/2012	12:02:42 PM	BCl3 valve closed
12/10/2012	12:02:42 PM	PH3 valve closed
12/10/2012	12:02:42 PM	SiCl4 pre valve closed
12/10/2012	12:02:42 PM	SiCl4 post valve closed
12/10/2012	12:02:42 PM	Main Vac valve closed
12/10/2012	12:02:42 PM	Bypass valve closed
12/10/2012	12:02:42 PM	H2 valve opened
12/10/2012	12:02:42 PM	Bubbler valve opened
12/10/2012	12:02:42 PM	Helium MFC set to  0.000000
12/10/2012	12:02:42 PM	H2 MFC set to  500.000000
12/10/2012	12:02:42 PM	BCl3 MFC set to  0.000000
12/10/2012	12:02:42 PM	PH3 MFC set to  0.000000
12/10/2012	12:02:42 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:02:42 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:02:42 PM	Tube furnace set to 750
12/10/2012	12:07:42 PM	H2 valve closed
12/10/2012	12:07:42 PM	BCl3 valve closed
12/10/2012	12:07:42 PM	PH3 valve closed
12/10/2012	12:07:42 PM	SiCl4 pre valve closed
12/10/2012	12:07:42 PM	SiCl4 post valve closed
12/10/2012	12:07:42 PM	Main Vac valve closed
12/10/2012	12:07:42 PM	Bypass valve closed
12/10/2012	12:07:42 PM	Helium valve opened
12/10/2012	12:07:42 PM	Bubbler valve opened
12/10/2012	12:07:42 PM	Helium MFC set to  500.000000
12/10/2012	12:07:42 PM	H2 MFC set to  0.000000
12/10/2012	12:07:42 PM	BCl3 MFC set to  0.000000
12/10/2012	12:07:42 PM	PH3 MFC set to  0.000000
12/10/2012	12:07:43 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:07:43 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:07:43 PM	Tube furnace set to 0
12/10/2012	12:21:45 PM	Helium valve closed
12/10/2012	12:21:45 PM	H2 valve closed
12/10/2012	12:21:45 PM	BCl3 valve closed
12/10/2012	12:21:45 PM	PH3 valve closed
12/10/2012	12:21:45 PM	SiCl4 pre valve closed
12/10/2012	12:21:45 PM	SiCl4 post valve closed
12/10/2012	12:21:45 PM	Main Vac valve closed
12/10/2012	12:21:45 PM	Bypass valve closed
12/10/2012	12:21:45 PM	Bubbler valve closed
12/10/2012	12:21:45 PM	Helium MFC set to  0.000000
12/10/2012	12:21:45 PM	H2 MFC set to  0.000000
12/10/2012	12:21:45 PM	BCl3 MFC set to  0.000000
12/10/2012	12:21:45 PM	PH3 MFC set to  0.000000
12/10/2012	12:21:45 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:21:45 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:21:45 PM	Tube furnace set to 0
12/10/2012	12:21:46 PM	Run finished at 12:21 PM
12/10/2012	12:24:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2012	12:24:37 PM	Recipe started at 12:24 PM
12/10/2012	12:24:37 PM	Helium valve closed
12/10/2012	12:24:37 PM	H2 valve closed
12/10/2012	12:24:37 PM	BCl3 valve closed
12/10/2012	12:24:37 PM	PH3 valve closed
12/10/2012	12:24:37 PM	SiCl4 pre valve closed
12/10/2012	12:24:37 PM	SiCl4 post valve closed
12/10/2012	12:24:37 PM	Main Vac valve closed
12/10/2012	12:24:37 PM	Bubbler valve closed
12/10/2012	12:24:37 PM	Bypass valve opened
12/10/2012	12:24:37 PM	Helium MFC set to  0.000000
12/10/2012	12:24:37 PM	H2 MFC set to  0.000000
12/10/2012	12:24:37 PM	BCl3 MFC set to  0.000000
12/10/2012	12:24:37 PM	PH3 MFC set to  0.000000
12/10/2012	12:24:37 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:24:37 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:24:37 PM	Tube furnace set to 0
12/10/2012	12:25:45 PM	Helium valve closed
12/10/2012	12:25:45 PM	H2 valve closed
12/10/2012	12:25:45 PM	BCl3 valve closed
12/10/2012	12:25:45 PM	PH3 valve closed
12/10/2012	12:25:45 PM	SiCl4 pre valve closed
12/10/2012	12:25:45 PM	SiCl4 post valve closed
12/10/2012	12:25:45 PM	Main Vac valve closed
12/10/2012	12:25:45 PM	Bubbler valve closed
12/10/2012	12:25:45 PM	Bypass valve opened
12/10/2012	12:25:45 PM	Helium MFC set to  0.000000
12/10/2012	12:25:45 PM	H2 MFC set to  0.000000
12/10/2012	12:25:45 PM	BCl3 MFC set to  0.000000
12/10/2012	12:25:45 PM	PH3 MFC set to  0.000000
12/10/2012	12:25:45 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:25:45 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:25:45 PM	Tube furnace set to 0
12/10/2012	12:26:04 PM	Helium valve closed
12/10/2012	12:26:04 PM	H2 valve closed
12/10/2012	12:26:04 PM	BCl3 valve closed
12/10/2012	12:26:04 PM	PH3 valve closed
12/10/2012	12:26:04 PM	SiCl4 pre valve closed
12/10/2012	12:26:04 PM	SiCl4 post valve closed
12/10/2012	12:26:04 PM	Bypass valve closed
12/10/2012	12:26:04 PM	Bubbler valve closed
12/10/2012	12:26:04 PM	Main Vac valve opened
12/10/2012	12:26:04 PM	Helium MFC set to  0.000000
12/10/2012	12:26:04 PM	H2 MFC set to  0.000000
12/10/2012	12:26:04 PM	BCl3 MFC set to  0.000000
12/10/2012	12:26:04 PM	PH3 MFC set to  0.000000
12/10/2012	12:26:04 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:26:04 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:26:04 PM	Tube furnace set to 0
12/10/2012	12:26:05 PM	Run finished at 12:26 PM
12/10/2012	12:26:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2012	12:26:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/10/2012	12:26:41 PM	Recipe started at 12:26 PM
12/10/2012	12:26:41 PM	Helium valve closed
12/10/2012	12:26:41 PM	H2 valve closed
12/10/2012	12:26:41 PM	BCl3 valve closed
12/10/2012	12:26:41 PM	PH3 valve closed
12/10/2012	12:26:41 PM	SiCl4 pre valve closed
12/10/2012	12:26:41 PM	SiCl4 post valve closed
12/10/2012	12:26:41 PM	Main Vac valve closed
12/10/2012	12:26:41 PM	Bubbler valve closed
12/10/2012	12:26:41 PM	Bypass valve opened
12/10/2012	12:26:41 PM	Helium MFC set to  0.000000
12/10/2012	12:26:41 PM	H2 MFC set to  0.000000
12/10/2012	12:26:41 PM	BCl3 MFC set to  0.000000
12/10/2012	12:26:41 PM	PH3 MFC set to  0.000000
12/10/2012	12:26:41 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:26:41 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:26:41 PM	Tube furnace set to 0
12/10/2012	12:26:41 PM	Helium valve closed
12/10/2012	12:26:41 PM	H2 valve closed
12/10/2012	12:26:41 PM	BCl3 valve closed
12/10/2012	12:26:41 PM	PH3 valve closed
12/10/2012	12:26:42 PM	SiCl4 pre valve closed
12/10/2012	12:26:42 PM	SiCl4 post valve closed
12/10/2012	12:26:42 PM	Main Vac valve closed
12/10/2012	12:26:42 PM	Bubbler valve closed
12/10/2012	12:26:42 PM	Bypass valve opened
12/10/2012	12:26:42 PM	Helium MFC set to  0.000000
12/10/2012	12:26:42 PM	H2 MFC set to  0.000000
12/10/2012	12:26:42 PM	BCl3 MFC set to  0.000000
12/10/2012	12:26:42 PM	PH3 MFC set to  0.000000
12/10/2012	12:26:42 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:26:42 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:26:42 PM	Tube furnace set to 0
12/10/2012	12:26:42 PM	Helium valve closed
12/10/2012	12:26:42 PM	H2 valve closed
12/10/2012	12:26:42 PM	BCl3 valve closed
12/10/2012	12:26:42 PM	PH3 valve closed
12/10/2012	12:26:42 PM	SiCl4 pre valve closed
12/10/2012	12:26:42 PM	SiCl4 post valve closed
12/10/2012	12:26:42 PM	Bypass valve closed
12/10/2012	12:26:42 PM	Bubbler valve closed
12/10/2012	12:26:42 PM	Main Vac valve opened
12/10/2012	12:26:42 PM	Helium MFC set to  0.000000
12/10/2012	12:26:42 PM	H2 MFC set to  0.000000
12/10/2012	12:26:42 PM	BCl3 MFC set to  0.000000
12/10/2012	12:26:42 PM	PH3 MFC set to  0.000000
12/10/2012	12:26:42 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:26:42 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:26:42 PM	Tube furnace set to 0
12/10/2012	12:27:12 PM	H2 valve closed
12/10/2012	12:27:12 PM	BCl3 valve closed
12/10/2012	12:27:12 PM	PH3 valve closed
12/10/2012	12:27:12 PM	SiCl4 pre valve closed
12/10/2012	12:27:12 PM	SiCl4 post valve closed
12/10/2012	12:27:12 PM	Bypass valve closed
12/10/2012	12:27:12 PM	Bubbler valve closed
12/10/2012	12:27:12 PM	Helium valve opened
12/10/2012	12:27:12 PM	Main Vac valve opened
12/10/2012	12:27:12 PM	Helium MFC set to  20.000000
12/10/2012	12:27:12 PM	H2 MFC set to  0.000000
12/10/2012	12:27:12 PM	BCl3 MFC set to  0.000000
12/10/2012	12:27:12 PM	PH3 MFC set to  0.000000
12/10/2012	12:27:12 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:27:12 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:27:13 PM	Tube furnace set to 0
12/10/2012	12:27:43 PM	Helium valve closed
12/10/2012	12:27:43 PM	H2 valve closed
12/10/2012	12:27:43 PM	BCl3 valve closed
12/10/2012	12:27:43 PM	PH3 valve closed
12/10/2012	12:27:43 PM	SiCl4 pre valve closed
12/10/2012	12:27:43 PM	SiCl4 post valve closed
12/10/2012	12:27:43 PM	Bypass valve closed
12/10/2012	12:27:43 PM	Bubbler valve closed
12/10/2012	12:27:43 PM	Main Vac valve opened
12/10/2012	12:27:43 PM	Helium MFC set to  0.000000
12/10/2012	12:27:43 PM	H2 MFC set to  0.000000
12/10/2012	12:27:43 PM	BCl3 MFC set to  0.000000
12/10/2012	12:27:43 PM	PH3 MFC set to  0.000000
12/10/2012	12:27:43 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:27:43 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:27:43 PM	Tube furnace set to 0
12/10/2012	12:28:13 PM	H2 valve closed
12/10/2012	12:28:13 PM	BCl3 valve closed
12/10/2012	12:28:13 PM	PH3 valve closed
12/10/2012	12:28:13 PM	SiCl4 pre valve closed
12/10/2012	12:28:13 PM	SiCl4 post valve closed
12/10/2012	12:28:13 PM	Bypass valve closed
12/10/2012	12:28:13 PM	Bubbler valve closed
12/10/2012	12:28:13 PM	Helium valve opened
12/10/2012	12:28:13 PM	Main Vac valve opened
12/10/2012	12:28:13 PM	Helium MFC set to  20.000000
12/10/2012	12:28:13 PM	H2 MFC set to  0.000000
12/10/2012	12:28:13 PM	BCl3 MFC set to  0.000000
12/10/2012	12:28:13 PM	PH3 MFC set to  0.000000
12/10/2012	12:28:13 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:28:13 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:28:13 PM	Tube furnace set to 0
12/10/2012	12:28:43 PM	Helium valve closed
12/10/2012	12:28:43 PM	H2 valve closed
12/10/2012	12:28:43 PM	BCl3 valve closed
12/10/2012	12:28:43 PM	PH3 valve closed
12/10/2012	12:28:43 PM	SiCl4 pre valve closed
12/10/2012	12:28:43 PM	SiCl4 post valve closed
12/10/2012	12:28:43 PM	Bypass valve closed
12/10/2012	12:28:43 PM	Bubbler valve closed
12/10/2012	12:28:43 PM	Main Vac valve opened
12/10/2012	12:28:43 PM	Helium MFC set to  0.000000
12/10/2012	12:28:43 PM	H2 MFC set to  0.000000
12/10/2012	12:28:43 PM	BCl3 MFC set to  0.000000
12/10/2012	12:28:43 PM	PH3 MFC set to  0.000000
12/10/2012	12:28:43 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:28:43 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:28:43 PM	Tube furnace set to 0
12/10/2012	12:29:13 PM	H2 valve closed
12/10/2012	12:29:13 PM	BCl3 valve closed
12/10/2012	12:29:13 PM	PH3 valve closed
12/10/2012	12:29:13 PM	SiCl4 pre valve closed
12/10/2012	12:29:13 PM	SiCl4 post valve closed
12/10/2012	12:29:14 PM	Bypass valve closed
12/10/2012	12:29:14 PM	Bubbler valve closed
12/10/2012	12:29:14 PM	Helium valve opened
12/10/2012	12:29:14 PM	Main Vac valve opened
12/10/2012	12:29:14 PM	Helium MFC set to  20.000000
12/10/2012	12:29:14 PM	H2 MFC set to  0.000000
12/10/2012	12:29:14 PM	BCl3 MFC set to  0.000000
12/10/2012	12:29:14 PM	PH3 MFC set to  0.000000
12/10/2012	12:29:14 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:29:14 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:29:14 PM	Tube furnace set to 0
12/10/2012	12:29:44 PM	Helium valve closed
12/10/2012	12:29:44 PM	H2 valve closed
12/10/2012	12:29:44 PM	BCl3 valve closed
12/10/2012	12:29:44 PM	PH3 valve closed
12/10/2012	12:29:44 PM	SiCl4 pre valve closed
12/10/2012	12:29:44 PM	SiCl4 post valve closed
12/10/2012	12:29:44 PM	Bypass valve closed
12/10/2012	12:29:44 PM	Bubbler valve closed
12/10/2012	12:29:44 PM	Main Vac valve opened
12/10/2012	12:29:44 PM	Helium MFC set to  0.000000
12/10/2012	12:29:44 PM	H2 MFC set to  0.000000
12/10/2012	12:29:44 PM	BCl3 MFC set to  0.000000
12/10/2012	12:29:44 PM	PH3 MFC set to  0.000000
12/10/2012	12:29:44 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:29:44 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:29:44 PM	Tube furnace set to 0
12/10/2012	12:30:14 PM	H2 valve closed
12/10/2012	12:30:14 PM	BCl3 valve closed
12/10/2012	12:30:14 PM	PH3 valve closed
12/10/2012	12:30:14 PM	SiCl4 pre valve closed
12/10/2012	12:30:14 PM	SiCl4 post valve closed
12/10/2012	12:30:14 PM	Bypass valve closed
12/10/2012	12:30:14 PM	Bubbler valve closed
12/10/2012	12:30:14 PM	Helium valve opened
12/10/2012	12:30:14 PM	Main Vac valve opened
12/10/2012	12:30:14 PM	Helium MFC set to  20.000000
12/10/2012	12:30:14 PM	H2 MFC set to  0.000000
12/10/2012	12:30:14 PM	BCl3 MFC set to  0.000000
12/10/2012	12:30:14 PM	PH3 MFC set to  0.000000
12/10/2012	12:30:14 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:30:14 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:30:14 PM	Tube furnace set to 0
12/10/2012	12:30:44 PM	Helium valve closed
12/10/2012	12:30:44 PM	H2 valve closed
12/10/2012	12:30:44 PM	BCl3 valve closed
12/10/2012	12:30:44 PM	PH3 valve closed
12/10/2012	12:30:44 PM	SiCl4 pre valve closed
12/10/2012	12:30:44 PM	SiCl4 post valve closed
12/10/2012	12:30:44 PM	Bypass valve closed
12/10/2012	12:30:44 PM	Bubbler valve closed
12/10/2012	12:30:44 PM	Main Vac valve opened
12/10/2012	12:30:44 PM	Helium MFC set to  0.000000
12/10/2012	12:30:44 PM	H2 MFC set to  0.000000
12/10/2012	12:30:44 PM	BCl3 MFC set to  0.000000
12/10/2012	12:30:44 PM	PH3 MFC set to  0.000000
12/10/2012	12:30:44 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:30:44 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:30:45 PM	Tube furnace set to 0
12/10/2012	12:31:15 PM	H2 valve closed
12/10/2012	12:31:15 PM	BCl3 valve closed
12/10/2012	12:31:15 PM	PH3 valve closed
12/10/2012	12:31:15 PM	SiCl4 pre valve closed
12/10/2012	12:31:15 PM	SiCl4 post valve closed
12/10/2012	12:31:15 PM	Bypass valve closed
12/10/2012	12:31:15 PM	Bubbler valve closed
12/10/2012	12:31:15 PM	Helium valve opened
12/10/2012	12:31:15 PM	Main Vac valve opened
12/10/2012	12:31:15 PM	Helium MFC set to  20.000000
12/10/2012	12:31:15 PM	H2 MFC set to  0.000000
12/10/2012	12:31:15 PM	BCl3 MFC set to  0.000000
12/10/2012	12:31:15 PM	PH3 MFC set to  0.000000
12/10/2012	12:31:15 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:31:15 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:31:15 PM	Tube furnace set to 0
12/10/2012	12:31:45 PM	Helium valve closed
12/10/2012	12:31:45 PM	H2 valve closed
12/10/2012	12:31:45 PM	BCl3 valve closed
12/10/2012	12:31:45 PM	PH3 valve closed
12/10/2012	12:31:45 PM	SiCl4 pre valve closed
12/10/2012	12:31:45 PM	SiCl4 post valve closed
12/10/2012	12:31:45 PM	Bypass valve closed
12/10/2012	12:31:45 PM	Bubbler valve closed
12/10/2012	12:31:45 PM	Main Vac valve opened
12/10/2012	12:31:45 PM	Helium MFC set to  0.000000
12/10/2012	12:31:45 PM	H2 MFC set to  0.000000
12/10/2012	12:31:45 PM	BCl3 MFC set to  0.000000
12/10/2012	12:31:45 PM	PH3 MFC set to  0.000000
12/10/2012	12:31:45 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:31:45 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:31:45 PM	Tube furnace set to 0
12/10/2012	12:32:15 PM	H2 valve closed
12/10/2012	12:32:15 PM	BCl3 valve closed
12/10/2012	12:32:15 PM	PH3 valve closed
12/10/2012	12:32:15 PM	SiCl4 pre valve closed
12/10/2012	12:32:15 PM	SiCl4 post valve closed
12/10/2012	12:32:15 PM	Bypass valve closed
12/10/2012	12:32:15 PM	Bubbler valve closed
12/10/2012	12:32:15 PM	Helium valve opened
12/10/2012	12:32:15 PM	Main Vac valve opened
12/10/2012	12:32:15 PM	Helium MFC set to  20.000000
12/10/2012	12:32:15 PM	H2 MFC set to  0.000000
12/10/2012	12:32:15 PM	BCl3 MFC set to  0.000000
12/10/2012	12:32:15 PM	PH3 MFC set to  0.000000
12/10/2012	12:32:15 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:32:15 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:32:16 PM	Tube furnace set to 0
12/10/2012	12:32:46 PM	Helium valve closed
12/10/2012	12:32:46 PM	H2 valve closed
12/10/2012	12:32:46 PM	BCl3 valve closed
12/10/2012	12:32:46 PM	PH3 valve closed
12/10/2012	12:32:46 PM	SiCl4 pre valve closed
12/10/2012	12:32:46 PM	SiCl4 post valve closed
12/10/2012	12:32:46 PM	Bypass valve closed
12/10/2012	12:32:46 PM	Bubbler valve closed
12/10/2012	12:32:46 PM	Main Vac valve opened
12/10/2012	12:32:46 PM	Helium MFC set to  0.000000
12/10/2012	12:32:46 PM	H2 MFC set to  0.000000
12/10/2012	12:32:46 PM	BCl3 MFC set to  0.000000
12/10/2012	12:32:46 PM	PH3 MFC set to  0.000000
12/10/2012	12:32:46 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:32:46 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:32:46 PM	Tube furnace set to 0
12/10/2012	12:33:16 PM	H2 valve closed
12/10/2012	12:33:16 PM	BCl3 valve closed
12/10/2012	12:33:16 PM	PH3 valve closed
12/10/2012	12:33:16 PM	SiCl4 pre valve closed
12/10/2012	12:33:16 PM	SiCl4 post valve closed
12/10/2012	12:33:16 PM	Bypass valve closed
12/10/2012	12:33:16 PM	Bubbler valve closed
12/10/2012	12:33:16 PM	Helium valve opened
12/10/2012	12:33:16 PM	Main Vac valve opened
12/10/2012	12:33:16 PM	Helium MFC set to  20.000000
12/10/2012	12:33:16 PM	H2 MFC set to  0.000000
12/10/2012	12:33:16 PM	BCl3 MFC set to  0.000000
12/10/2012	12:33:16 PM	PH3 MFC set to  0.000000
12/10/2012	12:33:16 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:33:16 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:33:16 PM	Tube furnace set to 0
12/10/2012	12:33:46 PM	Helium valve closed
12/10/2012	12:33:46 PM	H2 valve closed
12/10/2012	12:33:46 PM	BCl3 valve closed
12/10/2012	12:33:46 PM	PH3 valve closed
12/10/2012	12:33:46 PM	SiCl4 pre valve closed
12/10/2012	12:33:46 PM	SiCl4 post valve closed
12/10/2012	12:33:46 PM	Bypass valve closed
12/10/2012	12:33:46 PM	Bubbler valve closed
12/10/2012	12:33:46 PM	Main Vac valve opened
12/10/2012	12:33:46 PM	Helium MFC set to  0.000000
12/10/2012	12:33:46 PM	H2 MFC set to  0.000000
12/10/2012	12:33:46 PM	BCl3 MFC set to  0.000000
12/10/2012	12:33:46 PM	PH3 MFC set to  0.000000
12/10/2012	12:33:46 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:33:46 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:33:46 PM	Tube furnace set to 0
12/10/2012	12:34:16 PM	H2 valve closed
12/10/2012	12:34:16 PM	BCl3 valve closed
12/10/2012	12:34:16 PM	PH3 valve closed
12/10/2012	12:34:16 PM	SiCl4 pre valve closed
12/10/2012	12:34:16 PM	SiCl4 post valve closed
12/10/2012	12:34:17 PM	Bypass valve closed
12/10/2012	12:34:17 PM	Bubbler valve closed
12/10/2012	12:34:17 PM	Helium valve opened
12/10/2012	12:34:17 PM	Main Vac valve opened
12/10/2012	12:34:17 PM	Helium MFC set to  20.000000
12/10/2012	12:34:17 PM	H2 MFC set to  0.000000
12/10/2012	12:34:17 PM	BCl3 MFC set to  0.000000
12/10/2012	12:34:17 PM	PH3 MFC set to  0.000000
12/10/2012	12:34:17 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:34:17 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:34:17 PM	Tube furnace set to 0
12/10/2012	12:34:47 PM	Helium valve closed
12/10/2012	12:34:47 PM	H2 valve closed
12/10/2012	12:34:47 PM	BCl3 valve closed
12/10/2012	12:34:47 PM	PH3 valve closed
12/10/2012	12:34:47 PM	SiCl4 pre valve closed
12/10/2012	12:34:47 PM	SiCl4 post valve closed
12/10/2012	12:34:47 PM	Bypass valve closed
12/10/2012	12:34:47 PM	Bubbler valve closed
12/10/2012	12:34:47 PM	Main Vac valve opened
12/10/2012	12:34:47 PM	Helium MFC set to  0.000000
12/10/2012	12:34:47 PM	H2 MFC set to  0.000000
12/10/2012	12:34:47 PM	BCl3 MFC set to  0.000000
12/10/2012	12:34:47 PM	PH3 MFC set to  0.000000
12/10/2012	12:34:47 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:34:47 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:34:47 PM	Tube furnace set to 0
12/10/2012	12:35:17 PM	H2 valve closed
12/10/2012	12:35:17 PM	BCl3 valve closed
12/10/2012	12:35:17 PM	PH3 valve closed
12/10/2012	12:35:17 PM	SiCl4 pre valve closed
12/10/2012	12:35:17 PM	SiCl4 post valve closed
12/10/2012	12:35:17 PM	Bypass valve closed
12/10/2012	12:35:17 PM	Bubbler valve closed
12/10/2012	12:35:17 PM	Helium valve opened
12/10/2012	12:35:17 PM	Main Vac valve opened
12/10/2012	12:35:17 PM	Helium MFC set to  20.000000
12/10/2012	12:35:17 PM	H2 MFC set to  0.000000
12/10/2012	12:35:17 PM	BCl3 MFC set to  0.000000
12/10/2012	12:35:17 PM	PH3 MFC set to  0.000000
12/10/2012	12:35:17 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:35:17 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:35:17 PM	Tube furnace set to 0
12/10/2012	12:35:47 PM	Helium valve closed
12/10/2012	12:35:47 PM	H2 valve closed
12/10/2012	12:35:47 PM	BCl3 valve closed
12/10/2012	12:35:47 PM	PH3 valve closed
12/10/2012	12:35:47 PM	SiCl4 pre valve closed
12/10/2012	12:35:47 PM	SiCl4 post valve closed
12/10/2012	12:35:47 PM	Bypass valve closed
12/10/2012	12:35:47 PM	Bubbler valve closed
12/10/2012	12:35:47 PM	Main Vac valve opened
12/10/2012	12:35:47 PM	Helium MFC set to  0.000000
12/10/2012	12:35:47 PM	H2 MFC set to  0.000000
12/10/2012	12:35:47 PM	BCl3 MFC set to  0.000000
12/10/2012	12:35:47 PM	PH3 MFC set to  0.000000
12/10/2012	12:35:47 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:35:47 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:35:48 PM	Tube furnace set to 0
12/10/2012	12:36:18 PM	H2 valve closed
12/10/2012	12:36:18 PM	BCl3 valve closed
12/10/2012	12:36:18 PM	PH3 valve closed
12/10/2012	12:36:18 PM	SiCl4 pre valve closed
12/10/2012	12:36:18 PM	SiCl4 post valve closed
12/10/2012	12:36:18 PM	Bypass valve closed
12/10/2012	12:36:18 PM	Bubbler valve closed
12/10/2012	12:36:18 PM	Helium valve opened
12/10/2012	12:36:18 PM	Main Vac valve opened
12/10/2012	12:36:18 PM	Helium MFC set to  20.000000
12/10/2012	12:36:18 PM	H2 MFC set to  0.000000
12/10/2012	12:36:18 PM	BCl3 MFC set to  0.000000
12/10/2012	12:36:18 PM	PH3 MFC set to  0.000000
12/10/2012	12:36:18 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:36:18 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:36:18 PM	Tube furnace set to 0
12/10/2012	12:36:48 PM	Helium valve closed
12/10/2012	12:36:48 PM	H2 valve closed
12/10/2012	12:36:48 PM	BCl3 valve closed
12/10/2012	12:36:48 PM	PH3 valve closed
12/10/2012	12:36:48 PM	SiCl4 pre valve closed
12/10/2012	12:36:48 PM	SiCl4 post valve closed
12/10/2012	12:36:48 PM	Bypass valve closed
12/10/2012	12:36:48 PM	Bubbler valve closed
12/10/2012	12:36:48 PM	Main Vac valve opened
12/10/2012	12:36:48 PM	Helium MFC set to  0.000000
12/10/2012	12:36:48 PM	H2 MFC set to  0.000000
12/10/2012	12:36:48 PM	BCl3 MFC set to  0.000000
12/10/2012	12:36:48 PM	PH3 MFC set to  0.000000
12/10/2012	12:36:48 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:36:48 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:36:48 PM	Tube furnace set to 0
12/10/2012	12:36:49 PM	Run finished at 12:36 PM
12/10/2012	12:36:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/10/2012	12:38:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/10/2012	12:38:51 PM	Recipe started at 12:38 PM
12/10/2012	12:38:51 PM	Helium valve closed
12/10/2012	12:38:51 PM	H2 valve closed
12/10/2012	12:38:51 PM	BCl3 valve closed
12/10/2012	12:38:51 PM	PH3 valve closed
12/10/2012	12:38:51 PM	SiCl4 pre valve closed
12/10/2012	12:38:51 PM	SiCl4 post valve closed
12/10/2012	12:38:51 PM	Main Vac valve closed
12/10/2012	12:38:51 PM	Bubbler valve closed
12/10/2012	12:38:51 PM	Bypass valve opened
12/10/2012	12:38:51 PM	Helium MFC set to  0.000000
12/10/2012	12:38:51 PM	H2 MFC set to  0.000000
12/10/2012	12:38:51 PM	BCl3 MFC set to  0.000000
12/10/2012	12:38:51 PM	PH3 MFC set to  0.000000
12/10/2012	12:38:51 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:38:51 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:38:51 PM	Tube furnace set to 0
12/10/2012	12:38:51 PM	Helium valve closed
12/10/2012	12:38:51 PM	H2 valve closed
12/10/2012	12:38:51 PM	BCl3 valve closed
12/10/2012	12:38:51 PM	PH3 valve closed
12/10/2012	12:38:51 PM	SiCl4 pre valve closed
12/10/2012	12:38:51 PM	SiCl4 post valve closed
12/10/2012	12:38:51 PM	Main Vac valve closed
12/10/2012	12:38:51 PM	Bubbler valve closed
12/10/2012	12:38:51 PM	Bypass valve opened
12/10/2012	12:38:51 PM	Helium MFC set to  0.000000
12/10/2012	12:38:52 PM	H2 MFC set to  0.000000
12/10/2012	12:38:52 PM	BCl3 MFC set to  0.000000
12/10/2012	12:38:52 PM	PH3 MFC set to  0.000000
12/10/2012	12:38:52 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:38:52 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:38:52 PM	Tube furnace set to 0
12/10/2012	12:38:52 PM	Helium valve closed
12/10/2012	12:38:52 PM	H2 valve closed
12/10/2012	12:38:52 PM	BCl3 valve closed
12/10/2012	12:38:52 PM	PH3 valve closed
12/10/2012	12:38:52 PM	SiCl4 pre valve closed
12/10/2012	12:38:52 PM	SiCl4 post valve closed
12/10/2012	12:38:52 PM	Bypass valve closed
12/10/2012	12:38:52 PM	Bubbler valve closed
12/10/2012	12:38:52 PM	Main Vac valve opened
12/10/2012	12:38:52 PM	Helium MFC set to  0.000000
12/10/2012	12:38:52 PM	H2 MFC set to  0.000000
12/10/2012	12:38:52 PM	BCl3 MFC set to  0.000000
12/10/2012	12:38:52 PM	PH3 MFC set to  0.000000
12/10/2012	12:38:52 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:38:52 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:38:52 PM	Tube furnace set to 0
12/10/2012	12:39:22 PM	H2 valve closed
12/10/2012	12:39:22 PM	BCl3 valve closed
12/10/2012	12:39:22 PM	PH3 valve closed
12/10/2012	12:39:22 PM	SiCl4 pre valve closed
12/10/2012	12:39:22 PM	SiCl4 post valve closed
12/10/2012	12:39:22 PM	Bypass valve closed
12/10/2012	12:39:22 PM	Bubbler valve closed
12/10/2012	12:39:22 PM	Helium valve opened
12/10/2012	12:39:22 PM	Main Vac valve opened
12/10/2012	12:39:22 PM	Helium MFC set to  20.000000
12/10/2012	12:39:22 PM	H2 MFC set to  0.000000
12/10/2012	12:39:22 PM	BCl3 MFC set to  0.000000
12/10/2012	12:39:22 PM	PH3 MFC set to  0.000000
12/10/2012	12:39:22 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:39:22 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:39:23 PM	Tube furnace set to 0
12/10/2012	12:39:52 PM	Helium valve closed
12/10/2012	12:39:52 PM	H2 valve closed
12/10/2012	12:39:52 PM	BCl3 valve closed
12/10/2012	12:39:52 PM	PH3 valve closed
12/10/2012	12:39:52 PM	SiCl4 pre valve closed
12/10/2012	12:39:52 PM	SiCl4 post valve closed
12/10/2012	12:39:52 PM	Bypass valve closed
12/10/2012	12:39:52 PM	Bubbler valve closed
12/10/2012	12:39:52 PM	Main Vac valve opened
12/10/2012	12:39:52 PM	Helium MFC set to  0.000000
12/10/2012	12:39:53 PM	H2 MFC set to  0.000000
12/10/2012	12:39:53 PM	BCl3 MFC set to  0.000000
12/10/2012	12:39:53 PM	PH3 MFC set to  0.000000
12/10/2012	12:39:53 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:39:53 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:39:53 PM	Tube furnace set to 0
12/10/2012	12:40:23 PM	H2 valve closed
12/10/2012	12:40:23 PM	BCl3 valve closed
12/10/2012	12:40:23 PM	PH3 valve closed
12/10/2012	12:40:23 PM	SiCl4 pre valve closed
12/10/2012	12:40:23 PM	SiCl4 post valve closed
12/10/2012	12:40:23 PM	Bypass valve closed
12/10/2012	12:40:23 PM	Bubbler valve closed
12/10/2012	12:40:23 PM	Helium valve opened
12/10/2012	12:40:23 PM	Main Vac valve opened
12/10/2012	12:40:23 PM	Helium MFC set to  20.000000
12/10/2012	12:40:23 PM	H2 MFC set to  0.000000
12/10/2012	12:40:23 PM	BCl3 MFC set to  0.000000
12/10/2012	12:40:23 PM	PH3 MFC set to  0.000000
12/10/2012	12:40:23 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:40:23 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:40:23 PM	Tube furnace set to 0
12/10/2012	12:40:53 PM	Helium valve closed
12/10/2012	12:40:53 PM	H2 valve closed
12/10/2012	12:40:53 PM	BCl3 valve closed
12/10/2012	12:40:53 PM	PH3 valve closed
12/10/2012	12:40:53 PM	SiCl4 pre valve closed
12/10/2012	12:40:53 PM	SiCl4 post valve closed
12/10/2012	12:40:53 PM	Bypass valve closed
12/10/2012	12:40:53 PM	Bubbler valve closed
12/10/2012	12:40:53 PM	Main Vac valve opened
12/10/2012	12:40:53 PM	Helium MFC set to  0.000000
12/10/2012	12:40:53 PM	H2 MFC set to  0.000000
12/10/2012	12:40:53 PM	BCl3 MFC set to  0.000000
12/10/2012	12:40:53 PM	PH3 MFC set to  0.000000
12/10/2012	12:40:53 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:40:53 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:40:53 PM	Tube furnace set to 0
12/10/2012	12:41:23 PM	H2 valve closed
12/10/2012	12:41:23 PM	BCl3 valve closed
12/10/2012	12:41:23 PM	PH3 valve closed
12/10/2012	12:41:23 PM	SiCl4 pre valve closed
12/10/2012	12:41:23 PM	SiCl4 post valve closed
12/10/2012	12:41:23 PM	Bypass valve closed
12/10/2012	12:41:23 PM	Bubbler valve closed
12/10/2012	12:41:23 PM	Helium valve opened
12/10/2012	12:41:23 PM	Main Vac valve opened
12/10/2012	12:41:23 PM	Helium MFC set to  20.000000
12/10/2012	12:41:23 PM	H2 MFC set to  0.000000
12/10/2012	12:41:23 PM	BCl3 MFC set to  0.000000
12/10/2012	12:41:23 PM	PH3 MFC set to  0.000000
12/10/2012	12:41:23 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:41:23 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:41:24 PM	Tube furnace set to 0
12/10/2012	12:41:54 PM	Helium valve closed
12/10/2012	12:41:54 PM	H2 valve closed
12/10/2012	12:41:54 PM	BCl3 valve closed
12/10/2012	12:41:54 PM	PH3 valve closed
12/10/2012	12:41:54 PM	SiCl4 pre valve closed
12/10/2012	12:41:54 PM	SiCl4 post valve closed
12/10/2012	12:41:54 PM	Bypass valve closed
12/10/2012	12:41:54 PM	Bubbler valve closed
12/10/2012	12:41:54 PM	Main Vac valve opened
12/10/2012	12:41:54 PM	Helium MFC set to  0.000000
12/10/2012	12:41:54 PM	H2 MFC set to  0.000000
12/10/2012	12:41:54 PM	BCl3 MFC set to  0.000000
12/10/2012	12:41:54 PM	PH3 MFC set to  0.000000
12/10/2012	12:41:54 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:41:54 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:41:54 PM	Tube furnace set to 0
12/10/2012	12:42:24 PM	H2 valve closed
12/10/2012	12:42:24 PM	BCl3 valve closed
12/10/2012	12:42:24 PM	PH3 valve closed
12/10/2012	12:42:24 PM	SiCl4 pre valve closed
12/10/2012	12:42:24 PM	SiCl4 post valve closed
12/10/2012	12:42:24 PM	Bypass valve closed
12/10/2012	12:42:24 PM	Bubbler valve closed
12/10/2012	12:42:24 PM	Helium valve opened
12/10/2012	12:42:24 PM	Main Vac valve opened
12/10/2012	12:42:24 PM	Helium MFC set to  20.000000
12/10/2012	12:42:24 PM	H2 MFC set to  0.000000
12/10/2012	12:42:24 PM	BCl3 MFC set to  0.000000
12/10/2012	12:42:24 PM	PH3 MFC set to  0.000000
12/10/2012	12:42:24 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:42:24 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:42:24 PM	Tube furnace set to 0
12/10/2012	12:42:54 PM	Helium valve closed
12/10/2012	12:42:54 PM	H2 valve closed
12/10/2012	12:42:54 PM	BCl3 valve closed
12/10/2012	12:42:54 PM	PH3 valve closed
12/10/2012	12:42:54 PM	SiCl4 pre valve closed
12/10/2012	12:42:54 PM	SiCl4 post valve closed
12/10/2012	12:42:54 PM	Bypass valve closed
12/10/2012	12:42:54 PM	Bubbler valve closed
12/10/2012	12:42:54 PM	Main Vac valve opened
12/10/2012	12:42:54 PM	Helium MFC set to  0.000000
12/10/2012	12:42:54 PM	H2 MFC set to  0.000000
12/10/2012	12:42:54 PM	BCl3 MFC set to  0.000000
12/10/2012	12:42:54 PM	PH3 MFC set to  0.000000
12/10/2012	12:42:54 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:42:54 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:42:54 PM	Tube furnace set to 0
12/10/2012	12:43:24 PM	H2 valve closed
12/10/2012	12:43:24 PM	BCl3 valve closed
12/10/2012	12:43:24 PM	PH3 valve closed
12/10/2012	12:43:24 PM	SiCl4 pre valve closed
12/10/2012	12:43:24 PM	SiCl4 post valve closed
12/10/2012	12:43:24 PM	Bypass valve closed
12/10/2012	12:43:24 PM	Bubbler valve closed
12/10/2012	12:43:24 PM	Helium valve opened
12/10/2012	12:43:24 PM	Main Vac valve opened
12/10/2012	12:43:24 PM	Helium MFC set to  20.000000
12/10/2012	12:43:24 PM	H2 MFC set to  0.000000
12/10/2012	12:43:24 PM	BCl3 MFC set to  0.000000
12/10/2012	12:43:24 PM	PH3 MFC set to  0.000000
12/10/2012	12:43:24 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:43:24 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:43:25 PM	Tube furnace set to 0
12/10/2012	12:43:55 PM	Helium valve closed
12/10/2012	12:43:55 PM	H2 valve closed
12/10/2012	12:43:55 PM	BCl3 valve closed
12/10/2012	12:43:55 PM	PH3 valve closed
12/10/2012	12:43:55 PM	SiCl4 pre valve closed
12/10/2012	12:43:55 PM	SiCl4 post valve closed
12/10/2012	12:43:55 PM	Bypass valve closed
12/10/2012	12:43:55 PM	Bubbler valve closed
12/10/2012	12:43:55 PM	Main Vac valve opened
12/10/2012	12:43:55 PM	Helium MFC set to  0.000000
12/10/2012	12:43:55 PM	H2 MFC set to  0.000000
12/10/2012	12:43:55 PM	BCl3 MFC set to  0.000000
12/10/2012	12:43:55 PM	PH3 MFC set to  0.000000
12/10/2012	12:43:55 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:43:55 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:43:55 PM	Tube furnace set to 0
12/10/2012	12:44:25 PM	H2 valve closed
12/10/2012	12:44:25 PM	BCl3 valve closed
12/10/2012	12:44:25 PM	PH3 valve closed
12/10/2012	12:44:25 PM	SiCl4 pre valve closed
12/10/2012	12:44:25 PM	SiCl4 post valve closed
12/10/2012	12:44:25 PM	Bypass valve closed
12/10/2012	12:44:25 PM	Bubbler valve closed
12/10/2012	12:44:25 PM	Helium valve opened
12/10/2012	12:44:25 PM	Main Vac valve opened
12/10/2012	12:44:25 PM	Helium MFC set to  20.000000
12/10/2012	12:44:25 PM	H2 MFC set to  0.000000
12/10/2012	12:44:25 PM	BCl3 MFC set to  0.000000
12/10/2012	12:44:25 PM	PH3 MFC set to  0.000000
12/10/2012	12:44:25 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:44:25 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:44:25 PM	Tube furnace set to 0
12/10/2012	12:44:55 PM	Helium valve closed
12/10/2012	12:44:55 PM	H2 valve closed
12/10/2012	12:44:55 PM	BCl3 valve closed
12/10/2012	12:44:55 PM	PH3 valve closed
12/10/2012	12:44:55 PM	SiCl4 pre valve closed
12/10/2012	12:44:55 PM	SiCl4 post valve closed
12/10/2012	12:44:55 PM	Bypass valve closed
12/10/2012	12:44:55 PM	Bubbler valve closed
12/10/2012	12:44:55 PM	Main Vac valve opened
12/10/2012	12:44:55 PM	Helium MFC set to  0.000000
12/10/2012	12:44:55 PM	H2 MFC set to  0.000000
12/10/2012	12:44:55 PM	BCl3 MFC set to  0.000000
12/10/2012	12:44:55 PM	PH3 MFC set to  0.000000
12/10/2012	12:44:55 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:44:55 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:44:56 PM	Tube furnace set to 0
12/10/2012	12:45:25 PM	H2 valve closed
12/10/2012	12:45:25 PM	BCl3 valve closed
12/10/2012	12:45:25 PM	PH3 valve closed
12/10/2012	12:45:25 PM	SiCl4 pre valve closed
12/10/2012	12:45:25 PM	SiCl4 post valve closed
12/10/2012	12:45:25 PM	Bypass valve closed
12/10/2012	12:45:25 PM	Bubbler valve closed
12/10/2012	12:45:25 PM	Helium valve opened
12/10/2012	12:45:25 PM	Main Vac valve opened
12/10/2012	12:45:25 PM	Helium MFC set to  20.000000
12/10/2012	12:45:25 PM	H2 MFC set to  0.000000
12/10/2012	12:45:25 PM	BCl3 MFC set to  0.000000
12/10/2012	12:45:25 PM	PH3 MFC set to  0.000000
12/10/2012	12:45:25 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:45:25 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:45:26 PM	Tube furnace set to 0
12/10/2012	12:45:56 PM	Helium valve closed
12/10/2012	12:45:56 PM	H2 valve closed
12/10/2012	12:45:56 PM	BCl3 valve closed
12/10/2012	12:45:56 PM	PH3 valve closed
12/10/2012	12:45:56 PM	SiCl4 pre valve closed
12/10/2012	12:45:56 PM	SiCl4 post valve closed
12/10/2012	12:45:56 PM	Bypass valve closed
12/10/2012	12:45:56 PM	Bubbler valve closed
12/10/2012	12:45:56 PM	Main Vac valve opened
12/10/2012	12:45:56 PM	Helium MFC set to  0.000000
12/10/2012	12:45:56 PM	H2 MFC set to  0.000000
12/10/2012	12:45:56 PM	BCl3 MFC set to  0.000000
12/10/2012	12:45:56 PM	PH3 MFC set to  0.000000
12/10/2012	12:45:56 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:45:56 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:45:56 PM	Tube furnace set to 0
12/10/2012	12:46:26 PM	H2 valve closed
12/10/2012	12:46:26 PM	BCl3 valve closed
12/10/2012	12:46:26 PM	PH3 valve closed
12/10/2012	12:46:26 PM	SiCl4 pre valve closed
12/10/2012	12:46:26 PM	SiCl4 post valve closed
12/10/2012	12:46:26 PM	Bypass valve closed
12/10/2012	12:46:26 PM	Bubbler valve closed
12/10/2012	12:46:26 PM	Helium valve opened
12/10/2012	12:46:26 PM	Main Vac valve opened
12/10/2012	12:46:26 PM	Helium MFC set to  20.000000
12/10/2012	12:46:26 PM	H2 MFC set to  0.000000
12/10/2012	12:46:26 PM	BCl3 MFC set to  0.000000
12/10/2012	12:46:26 PM	PH3 MFC set to  0.000000
12/10/2012	12:46:26 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:46:26 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:46:26 PM	Tube furnace set to 0
12/10/2012	12:46:56 PM	Helium valve closed
12/10/2012	12:46:56 PM	H2 valve closed
12/10/2012	12:46:56 PM	BCl3 valve closed
12/10/2012	12:46:56 PM	PH3 valve closed
12/10/2012	12:46:56 PM	SiCl4 pre valve closed
12/10/2012	12:46:56 PM	SiCl4 post valve closed
12/10/2012	12:46:56 PM	Bypass valve closed
12/10/2012	12:46:56 PM	Bubbler valve closed
12/10/2012	12:46:56 PM	Main Vac valve opened
12/10/2012	12:46:56 PM	Helium MFC set to  0.000000
12/10/2012	12:46:56 PM	H2 MFC set to  0.000000
12/10/2012	12:46:56 PM	BCl3 MFC set to  0.000000
12/10/2012	12:46:56 PM	PH3 MFC set to  0.000000
12/10/2012	12:46:56 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:46:56 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:46:57 PM	Tube furnace set to 0
12/10/2012	12:47:27 PM	H2 valve closed
12/10/2012	12:47:27 PM	BCl3 valve closed
12/10/2012	12:47:27 PM	PH3 valve closed
12/10/2012	12:47:27 PM	SiCl4 pre valve closed
12/10/2012	12:47:27 PM	SiCl4 post valve closed
12/10/2012	12:47:27 PM	Bypass valve closed
12/10/2012	12:47:27 PM	Bubbler valve closed
12/10/2012	12:47:27 PM	Helium valve opened
12/10/2012	12:47:27 PM	Main Vac valve opened
12/10/2012	12:47:27 PM	Helium MFC set to  20.000000
12/10/2012	12:47:27 PM	H2 MFC set to  0.000000
12/10/2012	12:47:27 PM	BCl3 MFC set to  0.000000
12/10/2012	12:47:27 PM	PH3 MFC set to  0.000000
12/10/2012	12:47:27 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:47:27 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:47:27 PM	Tube furnace set to 0
12/10/2012	12:47:57 PM	Helium valve closed
12/10/2012	12:47:57 PM	H2 valve closed
12/10/2012	12:47:57 PM	BCl3 valve closed
12/10/2012	12:47:57 PM	PH3 valve closed
12/10/2012	12:47:57 PM	SiCl4 pre valve closed
12/10/2012	12:47:57 PM	SiCl4 post valve closed
12/10/2012	12:47:57 PM	Bypass valve closed
12/10/2012	12:47:57 PM	Bubbler valve closed
12/10/2012	12:47:57 PM	Main Vac valve opened
12/10/2012	12:47:57 PM	Helium MFC set to  0.000000
12/10/2012	12:47:57 PM	H2 MFC set to  0.000000
12/10/2012	12:47:57 PM	BCl3 MFC set to  0.000000
12/10/2012	12:47:57 PM	PH3 MFC set to  0.000000
12/10/2012	12:47:57 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:47:57 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:47:57 PM	Tube furnace set to 0
12/10/2012	12:48:27 PM	H2 valve closed
12/10/2012	12:48:27 PM	BCl3 valve closed
12/10/2012	12:48:27 PM	PH3 valve closed
12/10/2012	12:48:27 PM	SiCl4 pre valve closed
12/10/2012	12:48:27 PM	SiCl4 post valve closed
12/10/2012	12:48:27 PM	Bypass valve closed
12/10/2012	12:48:27 PM	Bubbler valve closed
12/10/2012	12:48:27 PM	Helium valve opened
12/10/2012	12:48:27 PM	Main Vac valve opened
12/10/2012	12:48:27 PM	Helium MFC set to  20.000000
12/10/2012	12:48:27 PM	H2 MFC set to  0.000000
12/10/2012	12:48:27 PM	BCl3 MFC set to  0.000000
12/10/2012	12:48:27 PM	PH3 MFC set to  0.000000
12/10/2012	12:48:27 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:48:27 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:48:27 PM	Tube furnace set to 0
12/10/2012	12:48:58 PM	Helium valve closed
12/10/2012	12:48:58 PM	H2 valve closed
12/10/2012	12:48:58 PM	BCl3 valve closed
12/10/2012	12:48:58 PM	PH3 valve closed
12/10/2012	12:48:58 PM	SiCl4 pre valve closed
12/10/2012	12:48:58 PM	SiCl4 post valve closed
12/10/2012	12:48:58 PM	Bypass valve closed
12/10/2012	12:48:58 PM	Bubbler valve closed
12/10/2012	12:48:58 PM	Main Vac valve opened
12/10/2012	12:48:58 PM	Helium MFC set to  0.000000
12/10/2012	12:48:58 PM	H2 MFC set to  0.000000
12/10/2012	12:48:58 PM	BCl3 MFC set to  0.000000
12/10/2012	12:48:58 PM	PH3 MFC set to  0.000000
12/10/2012	12:48:58 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:48:58 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:48:58 PM	Tube furnace set to 0
12/10/2012	12:48:59 PM	Run finished at 12:48 PM
12/10/2012	12:48:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/10/2012	12:58:34 PM	Main Vac valve closed
12/10/2012	12:58:48 PM	Main Vac valve opened
12/10/2012	12:59:13 PM	Recipe started at 12:59 PM
12/10/2012	12:59:13 PM	Helium valve closed
12/10/2012	12:59:13 PM	H2 valve closed
12/10/2012	12:59:13 PM	BCl3 valve closed
12/10/2012	12:59:13 PM	PH3 valve closed
12/10/2012	12:59:13 PM	SiCl4 pre valve closed
12/10/2012	12:59:13 PM	SiCl4 post valve closed
12/10/2012	12:59:13 PM	Main Vac valve closed
12/10/2012	12:59:13 PM	Bypass valve closed
12/10/2012	12:59:13 PM	Bubbler valve closed
12/10/2012	12:59:13 PM	Helium MFC set to  0.000000
12/10/2012	12:59:13 PM	H2 MFC set to  0.000000
12/10/2012	12:59:13 PM	BCl3 MFC set to  0.000000
12/10/2012	12:59:13 PM	PH3 MFC set to  0.000000
12/10/2012	12:59:13 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:59:13 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:59:13 PM	Tube furnace set to 0
12/10/2012	12:59:16 PM	Helium valve closed
12/10/2012	12:59:16 PM	BCl3 valve closed
12/10/2012	12:59:16 PM	PH3 valve closed
12/10/2012	12:59:16 PM	SiCl4 pre valve closed
12/10/2012	12:59:16 PM	SiCl4 post valve closed
12/10/2012	12:59:16 PM	Main Vac valve closed
12/10/2012	12:59:16 PM	Bypass valve closed
12/10/2012	12:59:16 PM	Bubbler valve closed
12/10/2012	12:59:16 PM	H2 valve opened
12/10/2012	12:59:16 PM	Helium MFC set to  0.000000
12/10/2012	12:59:16 PM	H2 MFC set to  500.000000
12/10/2012	12:59:16 PM	BCl3 MFC set to  0.000000
12/10/2012	12:59:16 PM	PH3 MFC set to  0.000000
12/10/2012	12:59:16 PM	SiCl4 MFC set to  0.000000
12/10/2012	12:59:17 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	12:59:17 PM	Tube furnace set to 0
12/10/2012	1:00:28 PM	Helium valve closed
12/10/2012	1:00:28 PM	BCl3 valve closed
12/10/2012	1:00:28 PM	PH3 valve closed
12/10/2012	1:00:28 PM	SiCl4 pre valve closed
12/10/2012	1:00:28 PM	SiCl4 post valve closed
12/10/2012	1:00:28 PM	Main Vac valve closed
12/10/2012	1:00:28 PM	Bypass valve closed
12/10/2012	1:00:28 PM	H2 valve opened
12/10/2012	1:00:28 PM	Bubbler valve opened
12/10/2012	1:00:29 PM	Helium MFC set to  0.000000
12/10/2012	1:00:29 PM	H2 MFC set to  500.000000
12/10/2012	1:00:29 PM	BCl3 MFC set to  0.000000
12/10/2012	1:00:29 PM	PH3 MFC set to  0.000000
12/10/2012	1:00:29 PM	SiCl4 MFC set to  0.000000
12/10/2012	1:00:29 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	1:00:29 PM	Tube furnace set to 0
12/10/2012	1:00:30 PM	Helium valve closed
12/10/2012	1:00:30 PM	BCl3 valve closed
12/10/2012	1:00:30 PM	PH3 valve closed
12/10/2012	1:00:30 PM	SiCl4 pre valve closed
12/10/2012	1:00:30 PM	SiCl4 post valve closed
12/10/2012	1:00:30 PM	Main Vac valve closed
12/10/2012	1:00:30 PM	Bypass valve closed
12/10/2012	1:00:30 PM	H2 valve opened
12/10/2012	1:00:30 PM	Bubbler valve opened
12/10/2012	1:00:30 PM	Helium MFC set to  0.000000
12/10/2012	1:00:30 PM	H2 MFC set to  500.000000
12/10/2012	1:00:30 PM	BCl3 MFC set to  0.000000
12/10/2012	1:00:30 PM	PH3 MFC set to  0.000000
12/10/2012	1:00:30 PM	SiCl4 MFC set to  0.000000
12/10/2012	1:00:30 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	1:00:30 PM	Tube furnace set to 1000
12/10/2012	1:30:30 PM	Helium valve closed
12/10/2012	1:30:30 PM	BCl3 valve closed
12/10/2012	1:30:30 PM	Main Vac valve closed
12/10/2012	1:30:30 PM	Bypass valve closed
12/10/2012	1:30:30 PM	H2 valve opened
12/10/2012	1:30:30 PM	PH3 valve opened
12/10/2012	1:30:30 PM	SiCl4 pre valve opened
12/10/2012	1:30:30 PM	SiCl4 post valve opened
12/10/2012	1:30:30 PM	Bubbler valve opened
12/10/2012	1:30:30 PM	Helium MFC set to  0.000000
12/10/2012	1:30:30 PM	H2 MFC set to  500.000000
12/10/2012	1:30:30 PM	BCl3 MFC set to  0.000000
12/10/2012	1:30:30 PM	PH3 MFC set to  0.300000
12/10/2012	1:30:30 PM	SiCl4 MFC set to  25.000000
12/10/2012	1:30:30 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	1:30:30 PM	Tube furnace set to 1000
12/10/2012	1:42:30 PM	Helium valve closed
12/10/2012	1:42:30 PM	BCl3 valve closed
12/10/2012	1:42:30 PM	PH3 valve closed
12/10/2012	1:42:30 PM	SiCl4 pre valve closed
12/10/2012	1:42:30 PM	SiCl4 post valve closed
12/10/2012	1:42:30 PM	Main Vac valve closed
12/10/2012	1:42:30 PM	Bypass valve closed
12/10/2012	1:42:30 PM	H2 valve opened
12/10/2012	1:42:30 PM	Bubbler valve opened
12/10/2012	1:42:30 PM	Helium MFC set to  0.000000
12/10/2012	1:42:30 PM	H2 MFC set to  500.000000
12/10/2012	1:42:30 PM	BCl3 MFC set to  0.000000
12/10/2012	1:42:30 PM	PH3 MFC set to  0.000000
12/10/2012	1:42:30 PM	SiCl4 MFC set to  0.000000
12/10/2012	1:42:30 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	1:42:31 PM	Tube furnace set to 750
12/10/2012	1:47:31 PM	H2 valve closed
12/10/2012	1:47:31 PM	BCl3 valve closed
12/10/2012	1:47:31 PM	PH3 valve closed
12/10/2012	1:47:31 PM	SiCl4 pre valve closed
12/10/2012	1:47:31 PM	SiCl4 post valve closed
12/10/2012	1:47:31 PM	Main Vac valve closed
12/10/2012	1:47:31 PM	Bypass valve closed
12/10/2012	1:47:31 PM	Helium valve opened
12/10/2012	1:47:31 PM	Bubbler valve opened
12/10/2012	1:47:31 PM	Helium MFC set to  500.000000
12/10/2012	1:47:31 PM	H2 MFC set to  0.000000
12/10/2012	1:47:31 PM	BCl3 MFC set to  0.000000
12/10/2012	1:47:31 PM	PH3 MFC set to  0.000000
12/10/2012	1:47:31 PM	SiCl4 MFC set to  0.000000
12/10/2012	1:47:31 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	1:47:31 PM	Tube furnace set to 0
12/10/2012	1:59:37 PM	Helium valve closed
12/10/2012	1:59:37 PM	H2 valve closed
12/10/2012	1:59:37 PM	BCl3 valve closed
12/10/2012	1:59:37 PM	PH3 valve closed
12/10/2012	1:59:37 PM	SiCl4 pre valve closed
12/10/2012	1:59:37 PM	SiCl4 post valve closed
12/10/2012	1:59:37 PM	Main Vac valve closed
12/10/2012	1:59:37 PM	Bypass valve closed
12/10/2012	1:59:37 PM	Bubbler valve closed
12/10/2012	1:59:37 PM	Helium MFC set to  0.000000
12/10/2012	1:59:37 PM	H2 MFC set to  0.000000
12/10/2012	1:59:37 PM	BCl3 MFC set to  0.000000
12/10/2012	1:59:37 PM	PH3 MFC set to  0.000000
12/10/2012	1:59:37 PM	SiCl4 MFC set to  0.000000
12/10/2012	1:59:37 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	1:59:37 PM	Tube furnace set to 0
12/10/2012	1:59:38 PM	Run finished at 1:59 PM
12/10/2012	2:02:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2012	2:02:35 PM	Recipe started at 2:02 PM
12/10/2012	2:02:35 PM	Helium valve closed
12/10/2012	2:02:35 PM	H2 valve closed
12/10/2012	2:02:35 PM	BCl3 valve closed
12/10/2012	2:02:35 PM	PH3 valve closed
12/10/2012	2:02:35 PM	SiCl4 pre valve closed
12/10/2012	2:02:35 PM	SiCl4 post valve closed
12/10/2012	2:02:35 PM	Main Vac valve closed
12/10/2012	2:02:35 PM	Bubbler valve closed
12/10/2012	2:02:35 PM	Bypass valve opened
12/10/2012	2:02:35 PM	Helium MFC set to  0.000000
12/10/2012	2:02:35 PM	H2 MFC set to  0.000000
12/10/2012	2:02:35 PM	BCl3 MFC set to  0.000000
12/10/2012	2:02:35 PM	PH3 MFC set to  0.000000
12/10/2012	2:02:35 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:02:35 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:02:36 PM	Tube furnace set to 0
12/10/2012	2:03:43 PM	Helium valve closed
12/10/2012	2:03:43 PM	H2 valve closed
12/10/2012	2:03:43 PM	BCl3 valve closed
12/10/2012	2:03:43 PM	PH3 valve closed
12/10/2012	2:03:43 PM	SiCl4 pre valve closed
12/10/2012	2:03:43 PM	SiCl4 post valve closed
12/10/2012	2:03:43 PM	Main Vac valve closed
12/10/2012	2:03:43 PM	Bubbler valve closed
12/10/2012	2:03:43 PM	Bypass valve opened
12/10/2012	2:03:43 PM	Helium MFC set to  0.000000
12/10/2012	2:03:43 PM	H2 MFC set to  0.000000
12/10/2012	2:03:43 PM	BCl3 MFC set to  0.000000
12/10/2012	2:03:43 PM	PH3 MFC set to  0.000000
12/10/2012	2:03:43 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:03:43 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:03:43 PM	Tube furnace set to 0
12/10/2012	2:03:57 PM	Helium valve closed
12/10/2012	2:03:57 PM	H2 valve closed
12/10/2012	2:03:57 PM	BCl3 valve closed
12/10/2012	2:03:57 PM	PH3 valve closed
12/10/2012	2:03:57 PM	SiCl4 pre valve closed
12/10/2012	2:03:57 PM	SiCl4 post valve closed
12/10/2012	2:03:57 PM	Bypass valve closed
12/10/2012	2:03:57 PM	Bubbler valve closed
12/10/2012	2:03:57 PM	Main Vac valve opened
12/10/2012	2:03:57 PM	Helium MFC set to  0.000000
12/10/2012	2:03:57 PM	H2 MFC set to  0.000000
12/10/2012	2:03:57 PM	BCl3 MFC set to  0.000000
12/10/2012	2:03:57 PM	PH3 MFC set to  0.000000
12/10/2012	2:03:57 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:03:57 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:03:57 PM	Tube furnace set to 0
12/10/2012	2:03:58 PM	Run finished at 2:03 PM
12/10/2012	2:03:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2012	2:04:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/10/2012	2:04:35 PM	Recipe started at 2:04 PM
12/10/2012	2:04:36 PM	Helium valve closed
12/10/2012	2:04:36 PM	H2 valve closed
12/10/2012	2:04:36 PM	BCl3 valve closed
12/10/2012	2:04:36 PM	PH3 valve closed
12/10/2012	2:04:36 PM	SiCl4 pre valve closed
12/10/2012	2:04:36 PM	SiCl4 post valve closed
12/10/2012	2:04:36 PM	Main Vac valve closed
12/10/2012	2:04:36 PM	Bubbler valve closed
12/10/2012	2:04:36 PM	Bypass valve opened
12/10/2012	2:04:36 PM	Helium MFC set to  0.000000
12/10/2012	2:04:36 PM	H2 MFC set to  0.000000
12/10/2012	2:04:36 PM	BCl3 MFC set to  0.000000
12/10/2012	2:04:36 PM	PH3 MFC set to  0.000000
12/10/2012	2:04:36 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:04:36 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:04:36 PM	Tube furnace set to 0
12/10/2012	2:04:36 PM	Helium valve closed
12/10/2012	2:04:36 PM	H2 valve closed
12/10/2012	2:04:36 PM	BCl3 valve closed
12/10/2012	2:04:36 PM	PH3 valve closed
12/10/2012	2:04:36 PM	SiCl4 pre valve closed
12/10/2012	2:04:36 PM	SiCl4 post valve closed
12/10/2012	2:04:36 PM	Main Vac valve closed
12/10/2012	2:04:36 PM	Bubbler valve closed
12/10/2012	2:04:36 PM	Bypass valve opened
12/10/2012	2:04:36 PM	Helium MFC set to  0.000000
12/10/2012	2:04:36 PM	H2 MFC set to  0.000000
12/10/2012	2:04:36 PM	BCl3 MFC set to  0.000000
12/10/2012	2:04:36 PM	PH3 MFC set to  0.000000
12/10/2012	2:04:36 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:04:36 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:04:37 PM	Tube furnace set to 0
12/10/2012	2:04:37 PM	Helium valve closed
12/10/2012	2:04:37 PM	H2 valve closed
12/10/2012	2:04:37 PM	BCl3 valve closed
12/10/2012	2:04:37 PM	PH3 valve closed
12/10/2012	2:04:37 PM	SiCl4 pre valve closed
12/10/2012	2:04:37 PM	SiCl4 post valve closed
12/10/2012	2:04:37 PM	Bypass valve closed
12/10/2012	2:04:37 PM	Bubbler valve closed
12/10/2012	2:04:37 PM	Main Vac valve opened
12/10/2012	2:04:37 PM	Helium MFC set to  0.000000
12/10/2012	2:04:37 PM	H2 MFC set to  0.000000
12/10/2012	2:04:37 PM	BCl3 MFC set to  0.000000
12/10/2012	2:04:37 PM	PH3 MFC set to  0.000000
12/10/2012	2:04:37 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:04:37 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:04:37 PM	Tube furnace set to 0
12/10/2012	2:05:07 PM	H2 valve closed
12/10/2012	2:05:07 PM	BCl3 valve closed
12/10/2012	2:05:07 PM	PH3 valve closed
12/10/2012	2:05:07 PM	SiCl4 pre valve closed
12/10/2012	2:05:07 PM	SiCl4 post valve closed
12/10/2012	2:05:07 PM	Bypass valve closed
12/10/2012	2:05:07 PM	Bubbler valve closed
12/10/2012	2:05:07 PM	Helium valve opened
12/10/2012	2:05:07 PM	Main Vac valve opened
12/10/2012	2:05:07 PM	Helium MFC set to  20.000000
12/10/2012	2:05:07 PM	H2 MFC set to  0.000000
12/10/2012	2:05:07 PM	BCl3 MFC set to  0.000000
12/10/2012	2:05:07 PM	PH3 MFC set to  0.000000
12/10/2012	2:05:07 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:05:07 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:05:07 PM	Tube furnace set to 0
12/10/2012	2:05:37 PM	Helium valve closed
12/10/2012	2:05:37 PM	H2 valve closed
12/10/2012	2:05:37 PM	BCl3 valve closed
12/10/2012	2:05:37 PM	PH3 valve closed
12/10/2012	2:05:37 PM	SiCl4 pre valve closed
12/10/2012	2:05:37 PM	SiCl4 post valve closed
12/10/2012	2:05:37 PM	Bypass valve closed
12/10/2012	2:05:37 PM	Bubbler valve closed
12/10/2012	2:05:37 PM	Main Vac valve opened
12/10/2012	2:05:37 PM	Helium MFC set to  0.000000
12/10/2012	2:05:37 PM	H2 MFC set to  0.000000
12/10/2012	2:05:37 PM	BCl3 MFC set to  0.000000
12/10/2012	2:05:37 PM	PH3 MFC set to  0.000000
12/10/2012	2:05:37 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:05:37 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:05:38 PM	Tube furnace set to 0
12/10/2012	2:06:08 PM	H2 valve closed
12/10/2012	2:06:08 PM	BCl3 valve closed
12/10/2012	2:06:08 PM	PH3 valve closed
12/10/2012	2:06:08 PM	SiCl4 pre valve closed
12/10/2012	2:06:08 PM	SiCl4 post valve closed
12/10/2012	2:06:08 PM	Bypass valve closed
12/10/2012	2:06:08 PM	Bubbler valve closed
12/10/2012	2:06:08 PM	Helium valve opened
12/10/2012	2:06:08 PM	Main Vac valve opened
12/10/2012	2:06:08 PM	Helium MFC set to  20.000000
12/10/2012	2:06:08 PM	H2 MFC set to  0.000000
12/10/2012	2:06:08 PM	BCl3 MFC set to  0.000000
12/10/2012	2:06:08 PM	PH3 MFC set to  0.000000
12/10/2012	2:06:08 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:06:08 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:06:08 PM	Tube furnace set to 0
12/10/2012	2:06:38 PM	Helium valve closed
12/10/2012	2:06:38 PM	H2 valve closed
12/10/2012	2:06:38 PM	BCl3 valve closed
12/10/2012	2:06:38 PM	PH3 valve closed
12/10/2012	2:06:38 PM	SiCl4 pre valve closed
12/10/2012	2:06:38 PM	SiCl4 post valve closed
12/10/2012	2:06:38 PM	Bypass valve closed
12/10/2012	2:06:38 PM	Bubbler valve closed
12/10/2012	2:06:38 PM	Main Vac valve opened
12/10/2012	2:06:38 PM	Helium MFC set to  0.000000
12/10/2012	2:06:38 PM	H2 MFC set to  0.000000
12/10/2012	2:06:38 PM	BCl3 MFC set to  0.000000
12/10/2012	2:06:38 PM	PH3 MFC set to  0.000000
12/10/2012	2:06:38 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:06:38 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:06:38 PM	Tube furnace set to 0
12/10/2012	2:07:08 PM	H2 valve closed
12/10/2012	2:07:08 PM	BCl3 valve closed
12/10/2012	2:07:08 PM	PH3 valve closed
12/10/2012	2:07:08 PM	SiCl4 pre valve closed
12/10/2012	2:07:08 PM	SiCl4 post valve closed
12/10/2012	2:07:08 PM	Bypass valve closed
12/10/2012	2:07:08 PM	Bubbler valve closed
12/10/2012	2:07:08 PM	Helium valve opened
12/10/2012	2:07:08 PM	Main Vac valve opened
12/10/2012	2:07:08 PM	Helium MFC set to  20.000000
12/10/2012	2:07:08 PM	H2 MFC set to  0.000000
12/10/2012	2:07:08 PM	BCl3 MFC set to  0.000000
12/10/2012	2:07:08 PM	PH3 MFC set to  0.000000
12/10/2012	2:07:08 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:07:08 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:07:08 PM	Tube furnace set to 0
12/10/2012	2:07:38 PM	Helium valve closed
12/10/2012	2:07:38 PM	H2 valve closed
12/10/2012	2:07:38 PM	BCl3 valve closed
12/10/2012	2:07:38 PM	PH3 valve closed
12/10/2012	2:07:38 PM	SiCl4 pre valve closed
12/10/2012	2:07:38 PM	SiCl4 post valve closed
12/10/2012	2:07:38 PM	Bypass valve closed
12/10/2012	2:07:38 PM	Bubbler valve closed
12/10/2012	2:07:39 PM	Main Vac valve opened
12/10/2012	2:07:39 PM	Helium MFC set to  0.000000
12/10/2012	2:07:39 PM	H2 MFC set to  0.000000
12/10/2012	2:07:39 PM	BCl3 MFC set to  0.000000
12/10/2012	2:07:39 PM	PH3 MFC set to  0.000000
12/10/2012	2:07:39 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:07:39 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:07:39 PM	Tube furnace set to 0
12/10/2012	2:08:09 PM	H2 valve closed
12/10/2012	2:08:09 PM	BCl3 valve closed
12/10/2012	2:08:09 PM	PH3 valve closed
12/10/2012	2:08:09 PM	SiCl4 pre valve closed
12/10/2012	2:08:09 PM	SiCl4 post valve closed
12/10/2012	2:08:09 PM	Bypass valve closed
12/10/2012	2:08:09 PM	Bubbler valve closed
12/10/2012	2:08:09 PM	Helium valve opened
12/10/2012	2:08:09 PM	Main Vac valve opened
12/10/2012	2:08:09 PM	Helium MFC set to  20.000000
12/10/2012	2:08:09 PM	H2 MFC set to  0.000000
12/10/2012	2:08:09 PM	BCl3 MFC set to  0.000000
12/10/2012	2:08:09 PM	PH3 MFC set to  0.000000
12/10/2012	2:08:09 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:08:09 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:08:09 PM	Tube furnace set to 0
12/10/2012	2:08:39 PM	Helium valve closed
12/10/2012	2:08:39 PM	H2 valve closed
12/10/2012	2:08:39 PM	BCl3 valve closed
12/10/2012	2:08:39 PM	PH3 valve closed
12/10/2012	2:08:39 PM	SiCl4 pre valve closed
12/10/2012	2:08:39 PM	SiCl4 post valve closed
12/10/2012	2:08:39 PM	Bypass valve closed
12/10/2012	2:08:39 PM	Bubbler valve closed
12/10/2012	2:08:39 PM	Main Vac valve opened
12/10/2012	2:08:39 PM	Helium MFC set to  0.000000
12/10/2012	2:08:39 PM	H2 MFC set to  0.000000
12/10/2012	2:08:39 PM	BCl3 MFC set to  0.000000
12/10/2012	2:08:39 PM	PH3 MFC set to  0.000000
12/10/2012	2:08:39 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:08:39 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:08:39 PM	Tube furnace set to 0
12/10/2012	2:09:09 PM	H2 valve closed
12/10/2012	2:09:09 PM	BCl3 valve closed
12/10/2012	2:09:09 PM	PH3 valve closed
12/10/2012	2:09:09 PM	SiCl4 pre valve closed
12/10/2012	2:09:09 PM	SiCl4 post valve closed
12/10/2012	2:09:09 PM	Bypass valve closed
12/10/2012	2:09:09 PM	Bubbler valve closed
12/10/2012	2:09:09 PM	Helium valve opened
12/10/2012	2:09:09 PM	Main Vac valve opened
12/10/2012	2:09:09 PM	Helium MFC set to  20.000000
12/10/2012	2:09:09 PM	H2 MFC set to  0.000000
12/10/2012	2:09:09 PM	BCl3 MFC set to  0.000000
12/10/2012	2:09:09 PM	PH3 MFC set to  0.000000
12/10/2012	2:09:09 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:09:09 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:09:09 PM	Tube furnace set to 0
12/10/2012	2:09:40 PM	Helium valve closed
12/10/2012	2:09:40 PM	H2 valve closed
12/10/2012	2:09:40 PM	BCl3 valve closed
12/10/2012	2:09:40 PM	PH3 valve closed
12/10/2012	2:09:40 PM	SiCl4 pre valve closed
12/10/2012	2:09:40 PM	SiCl4 post valve closed
12/10/2012	2:09:40 PM	Bypass valve closed
12/10/2012	2:09:40 PM	Bubbler valve closed
12/10/2012	2:09:40 PM	Main Vac valve opened
12/10/2012	2:09:40 PM	Helium MFC set to  0.000000
12/10/2012	2:09:40 PM	H2 MFC set to  0.000000
12/10/2012	2:09:40 PM	BCl3 MFC set to  0.000000
12/10/2012	2:09:40 PM	PH3 MFC set to  0.000000
12/10/2012	2:09:40 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:09:40 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:09:40 PM	Tube furnace set to 0
12/10/2012	2:10:10 PM	H2 valve closed
12/10/2012	2:10:10 PM	BCl3 valve closed
12/10/2012	2:10:10 PM	PH3 valve closed
12/10/2012	2:10:10 PM	SiCl4 pre valve closed
12/10/2012	2:10:10 PM	SiCl4 post valve closed
12/10/2012	2:10:10 PM	Bypass valve closed
12/10/2012	2:10:10 PM	Bubbler valve closed
12/10/2012	2:10:10 PM	Helium valve opened
12/10/2012	2:10:10 PM	Main Vac valve opened
12/10/2012	2:10:10 PM	Helium MFC set to  20.000000
12/10/2012	2:10:10 PM	H2 MFC set to  0.000000
12/10/2012	2:10:10 PM	BCl3 MFC set to  0.000000
12/10/2012	2:10:10 PM	PH3 MFC set to  0.000000
12/10/2012	2:10:10 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:10:10 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:10:10 PM	Tube furnace set to 0
12/10/2012	2:10:40 PM	Helium valve closed
12/10/2012	2:10:40 PM	H2 valve closed
12/10/2012	2:10:40 PM	BCl3 valve closed
12/10/2012	2:10:40 PM	PH3 valve closed
12/10/2012	2:10:40 PM	SiCl4 pre valve closed
12/10/2012	2:10:40 PM	SiCl4 post valve closed
12/10/2012	2:10:40 PM	Bypass valve closed
12/10/2012	2:10:40 PM	Bubbler valve closed
12/10/2012	2:10:40 PM	Main Vac valve opened
12/10/2012	2:10:40 PM	Helium MFC set to  0.000000
12/10/2012	2:10:40 PM	H2 MFC set to  0.000000
12/10/2012	2:10:40 PM	BCl3 MFC set to  0.000000
12/10/2012	2:10:40 PM	PH3 MFC set to  0.000000
12/10/2012	2:10:40 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:10:40 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:10:40 PM	Tube furnace set to 0
12/10/2012	2:11:10 PM	H2 valve closed
12/10/2012	2:11:10 PM	BCl3 valve closed
12/10/2012	2:11:10 PM	PH3 valve closed
12/10/2012	2:11:10 PM	SiCl4 pre valve closed
12/10/2012	2:11:10 PM	SiCl4 post valve closed
12/10/2012	2:11:10 PM	Bypass valve closed
12/10/2012	2:11:10 PM	Bubbler valve closed
12/10/2012	2:11:10 PM	Helium valve opened
12/10/2012	2:11:10 PM	Main Vac valve opened
12/10/2012	2:11:10 PM	Helium MFC set to  20.000000
12/10/2012	2:11:10 PM	H2 MFC set to  0.000000
12/10/2012	2:11:10 PM	BCl3 MFC set to  0.000000
12/10/2012	2:11:10 PM	PH3 MFC set to  0.000000
12/10/2012	2:11:10 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:11:10 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:11:11 PM	Tube furnace set to 0
12/10/2012	2:11:41 PM	Helium valve closed
12/10/2012	2:11:41 PM	H2 valve closed
12/10/2012	2:11:41 PM	BCl3 valve closed
12/10/2012	2:11:41 PM	PH3 valve closed
12/10/2012	2:11:41 PM	SiCl4 pre valve closed
12/10/2012	2:11:41 PM	SiCl4 post valve closed
12/10/2012	2:11:41 PM	Bypass valve closed
12/10/2012	2:11:41 PM	Bubbler valve closed
12/10/2012	2:11:41 PM	Main Vac valve opened
12/10/2012	2:11:41 PM	Helium MFC set to  0.000000
12/10/2012	2:11:41 PM	H2 MFC set to  0.000000
12/10/2012	2:11:41 PM	BCl3 MFC set to  0.000000
12/10/2012	2:11:41 PM	PH3 MFC set to  0.000000
12/10/2012	2:11:41 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:11:41 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:11:41 PM	Tube furnace set to 0
12/10/2012	2:12:11 PM	H2 valve closed
12/10/2012	2:12:11 PM	BCl3 valve closed
12/10/2012	2:12:11 PM	PH3 valve closed
12/10/2012	2:12:11 PM	SiCl4 pre valve closed
12/10/2012	2:12:11 PM	SiCl4 post valve closed
12/10/2012	2:12:11 PM	Bypass valve closed
12/10/2012	2:12:11 PM	Bubbler valve closed
12/10/2012	2:12:11 PM	Helium valve opened
12/10/2012	2:12:11 PM	Main Vac valve opened
12/10/2012	2:12:11 PM	Helium MFC set to  20.000000
12/10/2012	2:12:11 PM	H2 MFC set to  0.000000
12/10/2012	2:12:11 PM	BCl3 MFC set to  0.000000
12/10/2012	2:12:11 PM	PH3 MFC set to  0.000000
12/10/2012	2:12:11 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:12:11 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:12:11 PM	Tube furnace set to 0
12/10/2012	2:12:41 PM	Helium valve closed
12/10/2012	2:12:41 PM	H2 valve closed
12/10/2012	2:12:41 PM	BCl3 valve closed
12/10/2012	2:12:41 PM	PH3 valve closed
12/10/2012	2:12:41 PM	SiCl4 pre valve closed
12/10/2012	2:12:41 PM	SiCl4 post valve closed
12/10/2012	2:12:41 PM	Bypass valve closed
12/10/2012	2:12:41 PM	Bubbler valve closed
12/10/2012	2:12:41 PM	Main Vac valve opened
12/10/2012	2:12:41 PM	Helium MFC set to  0.000000
12/10/2012	2:12:41 PM	H2 MFC set to  0.000000
12/10/2012	2:12:41 PM	BCl3 MFC set to  0.000000
12/10/2012	2:12:41 PM	PH3 MFC set to  0.000000
12/10/2012	2:12:41 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:12:41 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:12:41 PM	Tube furnace set to 0
12/10/2012	2:13:11 PM	H2 valve closed
12/10/2012	2:13:11 PM	BCl3 valve closed
12/10/2012	2:13:11 PM	PH3 valve closed
12/10/2012	2:13:11 PM	SiCl4 pre valve closed
12/10/2012	2:13:11 PM	SiCl4 post valve closed
12/10/2012	2:13:11 PM	Bypass valve closed
12/10/2012	2:13:11 PM	Bubbler valve closed
12/10/2012	2:13:11 PM	Helium valve opened
12/10/2012	2:13:11 PM	Main Vac valve opened
12/10/2012	2:13:11 PM	Helium MFC set to  20.000000
12/10/2012	2:13:11 PM	H2 MFC set to  0.000000
12/10/2012	2:13:11 PM	BCl3 MFC set to  0.000000
12/10/2012	2:13:11 PM	PH3 MFC set to  0.000000
12/10/2012	2:13:11 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:13:11 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:13:12 PM	Tube furnace set to 0
12/10/2012	2:13:42 PM	Helium valve closed
12/10/2012	2:13:42 PM	H2 valve closed
12/10/2012	2:13:42 PM	BCl3 valve closed
12/10/2012	2:13:42 PM	PH3 valve closed
12/10/2012	2:13:42 PM	SiCl4 pre valve closed
12/10/2012	2:13:42 PM	SiCl4 post valve closed
12/10/2012	2:13:42 PM	Bypass valve closed
12/10/2012	2:13:42 PM	Bubbler valve closed
12/10/2012	2:13:42 PM	Main Vac valve opened
12/10/2012	2:13:42 PM	Helium MFC set to  0.000000
12/10/2012	2:13:42 PM	H2 MFC set to  0.000000
12/10/2012	2:13:42 PM	BCl3 MFC set to  0.000000
12/10/2012	2:13:42 PM	PH3 MFC set to  0.000000
12/10/2012	2:13:42 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:13:42 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:13:42 PM	Tube furnace set to 0
12/10/2012	2:14:12 PM	H2 valve closed
12/10/2012	2:14:12 PM	BCl3 valve closed
12/10/2012	2:14:12 PM	PH3 valve closed
12/10/2012	2:14:12 PM	SiCl4 pre valve closed
12/10/2012	2:14:12 PM	SiCl4 post valve closed
12/10/2012	2:14:12 PM	Bypass valve closed
12/10/2012	2:14:12 PM	Bubbler valve closed
12/10/2012	2:14:12 PM	Helium valve opened
12/10/2012	2:14:12 PM	Main Vac valve opened
12/10/2012	2:14:12 PM	Helium MFC set to  20.000000
12/10/2012	2:14:12 PM	H2 MFC set to  0.000000
12/10/2012	2:14:12 PM	BCl3 MFC set to  0.000000
12/10/2012	2:14:12 PM	PH3 MFC set to  0.000000
12/10/2012	2:14:12 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:14:12 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:14:12 PM	Tube furnace set to 0
12/10/2012	2:14:42 PM	Helium valve closed
12/10/2012	2:14:42 PM	H2 valve closed
12/10/2012	2:14:42 PM	BCl3 valve closed
12/10/2012	2:14:42 PM	PH3 valve closed
12/10/2012	2:14:42 PM	SiCl4 pre valve closed
12/10/2012	2:14:42 PM	SiCl4 post valve closed
12/10/2012	2:14:42 PM	Bypass valve closed
12/10/2012	2:14:42 PM	Bubbler valve closed
12/10/2012	2:14:42 PM	Main Vac valve opened
12/10/2012	2:14:42 PM	Helium MFC set to  0.000000
12/10/2012	2:14:42 PM	H2 MFC set to  0.000000
12/10/2012	2:14:42 PM	BCl3 MFC set to  0.000000
12/10/2012	2:14:42 PM	PH3 MFC set to  0.000000
12/10/2012	2:14:42 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:14:42 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:14:42 PM	Tube furnace set to 0
12/10/2012	2:14:43 PM	Run finished at 2:14 PM
12/10/2012	2:14:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/10/2012	2:16:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/10/2012	2:16:13 PM	Recipe started at 2:16 PM
12/10/2012	2:16:13 PM	Helium valve closed
12/10/2012	2:16:13 PM	H2 valve closed
12/10/2012	2:16:13 PM	BCl3 valve closed
12/10/2012	2:16:13 PM	PH3 valve closed
12/10/2012	2:16:13 PM	SiCl4 pre valve closed
12/10/2012	2:16:13 PM	SiCl4 post valve closed
12/10/2012	2:16:13 PM	Main Vac valve closed
12/10/2012	2:16:13 PM	Bubbler valve closed
12/10/2012	2:16:13 PM	Bypass valve opened
12/10/2012	2:16:13 PM	Helium MFC set to  0.000000
12/10/2012	2:16:13 PM	H2 MFC set to  0.000000
12/10/2012	2:16:13 PM	BCl3 MFC set to  0.000000
12/10/2012	2:16:13 PM	PH3 MFC set to  0.000000
12/10/2012	2:16:13 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:16:13 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:16:14 PM	Tube furnace set to 0
12/10/2012	2:16:14 PM	Helium valve closed
12/10/2012	2:16:14 PM	H2 valve closed
12/10/2012	2:16:14 PM	BCl3 valve closed
12/10/2012	2:16:14 PM	PH3 valve closed
12/10/2012	2:16:14 PM	SiCl4 pre valve closed
12/10/2012	2:16:14 PM	SiCl4 post valve closed
12/10/2012	2:16:14 PM	Main Vac valve closed
12/10/2012	2:16:14 PM	Bubbler valve closed
12/10/2012	2:16:14 PM	Bypass valve opened
12/10/2012	2:16:14 PM	Helium MFC set to  0.000000
12/10/2012	2:16:14 PM	H2 MFC set to  0.000000
12/10/2012	2:16:14 PM	BCl3 MFC set to  0.000000
12/10/2012	2:16:14 PM	PH3 MFC set to  0.000000
12/10/2012	2:16:14 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:16:14 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:16:14 PM	Tube furnace set to 0
12/10/2012	2:16:14 PM	Helium valve closed
12/10/2012	2:16:14 PM	H2 valve closed
12/10/2012	2:16:14 PM	BCl3 valve closed
12/10/2012	2:16:14 PM	PH3 valve closed
12/10/2012	2:16:14 PM	SiCl4 pre valve closed
12/10/2012	2:16:14 PM	SiCl4 post valve closed
12/10/2012	2:16:14 PM	Bypass valve closed
12/10/2012	2:16:14 PM	Bubbler valve closed
12/10/2012	2:16:14 PM	Main Vac valve opened
12/10/2012	2:16:14 PM	Helium MFC set to  0.000000
12/10/2012	2:16:14 PM	H2 MFC set to  0.000000
12/10/2012	2:16:14 PM	BCl3 MFC set to  0.000000
12/10/2012	2:16:14 PM	PH3 MFC set to  0.000000
12/10/2012	2:16:14 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:16:14 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:16:15 PM	Tube furnace set to 0
12/10/2012	2:16:45 PM	H2 valve closed
12/10/2012	2:16:45 PM	BCl3 valve closed
12/10/2012	2:16:45 PM	PH3 valve closed
12/10/2012	2:16:45 PM	SiCl4 pre valve closed
12/10/2012	2:16:45 PM	SiCl4 post valve closed
12/10/2012	2:16:45 PM	Bypass valve closed
12/10/2012	2:16:45 PM	Bubbler valve closed
12/10/2012	2:16:45 PM	Helium valve opened
12/10/2012	2:16:45 PM	Main Vac valve opened
12/10/2012	2:16:45 PM	Helium MFC set to  20.000000
12/10/2012	2:16:45 PM	H2 MFC set to  0.000000
12/10/2012	2:16:45 PM	BCl3 MFC set to  0.000000
12/10/2012	2:16:45 PM	PH3 MFC set to  0.000000
12/10/2012	2:16:45 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:16:45 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:16:45 PM	Tube furnace set to 0
12/10/2012	2:17:15 PM	Helium valve closed
12/10/2012	2:17:15 PM	H2 valve closed
12/10/2012	2:17:15 PM	BCl3 valve closed
12/10/2012	2:17:15 PM	PH3 valve closed
12/10/2012	2:17:15 PM	SiCl4 pre valve closed
12/10/2012	2:17:15 PM	SiCl4 post valve closed
12/10/2012	2:17:15 PM	Bypass valve closed
12/10/2012	2:17:15 PM	Bubbler valve closed
12/10/2012	2:17:15 PM	Main Vac valve opened
12/10/2012	2:17:15 PM	Helium MFC set to  0.000000
12/10/2012	2:17:15 PM	H2 MFC set to  0.000000
12/10/2012	2:17:15 PM	BCl3 MFC set to  0.000000
12/10/2012	2:17:15 PM	PH3 MFC set to  0.000000
12/10/2012	2:17:15 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:17:15 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:17:15 PM	Tube furnace set to 0
12/10/2012	2:17:45 PM	H2 valve closed
12/10/2012	2:17:45 PM	BCl3 valve closed
12/10/2012	2:17:45 PM	PH3 valve closed
12/10/2012	2:17:45 PM	SiCl4 pre valve closed
12/10/2012	2:17:45 PM	SiCl4 post valve closed
12/10/2012	2:17:45 PM	Bypass valve closed
12/10/2012	2:17:45 PM	Bubbler valve closed
12/10/2012	2:17:45 PM	Helium valve opened
12/10/2012	2:17:45 PM	Main Vac valve opened
12/10/2012	2:17:45 PM	Helium MFC set to  20.000000
12/10/2012	2:17:45 PM	H2 MFC set to  0.000000
12/10/2012	2:17:45 PM	BCl3 MFC set to  0.000000
12/10/2012	2:17:45 PM	PH3 MFC set to  0.000000
12/10/2012	2:17:45 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:17:45 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:17:45 PM	Tube furnace set to 0
12/10/2012	2:18:15 PM	Helium valve closed
12/10/2012	2:18:15 PM	H2 valve closed
12/10/2012	2:18:16 PM	BCl3 valve closed
12/10/2012	2:18:16 PM	PH3 valve closed
12/10/2012	2:18:16 PM	SiCl4 pre valve closed
12/10/2012	2:18:16 PM	SiCl4 post valve closed
12/10/2012	2:18:16 PM	Bypass valve closed
12/10/2012	2:18:16 PM	Bubbler valve closed
12/10/2012	2:18:16 PM	Main Vac valve opened
12/10/2012	2:18:16 PM	Helium MFC set to  0.000000
12/10/2012	2:18:16 PM	H2 MFC set to  0.000000
12/10/2012	2:18:16 PM	BCl3 MFC set to  0.000000
12/10/2012	2:18:16 PM	PH3 MFC set to  0.000000
12/10/2012	2:18:16 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:18:16 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:18:16 PM	Tube furnace set to 0
12/10/2012	2:18:46 PM	H2 valve closed
12/10/2012	2:18:46 PM	BCl3 valve closed
12/10/2012	2:18:46 PM	PH3 valve closed
12/10/2012	2:18:46 PM	SiCl4 pre valve closed
12/10/2012	2:18:46 PM	SiCl4 post valve closed
12/10/2012	2:18:46 PM	Bypass valve closed
12/10/2012	2:18:46 PM	Bubbler valve closed
12/10/2012	2:18:46 PM	Helium valve opened
12/10/2012	2:18:46 PM	Main Vac valve opened
12/10/2012	2:18:46 PM	Helium MFC set to  20.000000
12/10/2012	2:18:46 PM	H2 MFC set to  0.000000
12/10/2012	2:18:46 PM	BCl3 MFC set to  0.000000
12/10/2012	2:18:46 PM	PH3 MFC set to  0.000000
12/10/2012	2:18:46 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:18:46 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:18:46 PM	Tube furnace set to 0
12/10/2012	2:19:16 PM	Helium valve closed
12/10/2012	2:19:16 PM	H2 valve closed
12/10/2012	2:19:16 PM	BCl3 valve closed
12/10/2012	2:19:16 PM	PH3 valve closed
12/10/2012	2:19:16 PM	SiCl4 pre valve closed
12/10/2012	2:19:16 PM	SiCl4 post valve closed
12/10/2012	2:19:16 PM	Bypass valve closed
12/10/2012	2:19:16 PM	Bubbler valve closed
12/10/2012	2:19:16 PM	Main Vac valve opened
12/10/2012	2:19:16 PM	Helium MFC set to  0.000000
12/10/2012	2:19:16 PM	H2 MFC set to  0.000000
12/10/2012	2:19:16 PM	BCl3 MFC set to  0.000000
12/10/2012	2:19:16 PM	PH3 MFC set to  0.000000
12/10/2012	2:19:16 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:19:16 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:19:16 PM	Tube furnace set to 0
12/10/2012	2:19:46 PM	H2 valve closed
12/10/2012	2:19:46 PM	BCl3 valve closed
12/10/2012	2:19:46 PM	PH3 valve closed
12/10/2012	2:19:46 PM	SiCl4 pre valve closed
12/10/2012	2:19:46 PM	SiCl4 post valve closed
12/10/2012	2:19:46 PM	Bypass valve closed
12/10/2012	2:19:46 PM	Bubbler valve closed
12/10/2012	2:19:46 PM	Helium valve opened
12/10/2012	2:19:46 PM	Main Vac valve opened
12/10/2012	2:19:46 PM	Helium MFC set to  20.000000
12/10/2012	2:19:46 PM	H2 MFC set to  0.000000
12/10/2012	2:19:46 PM	BCl3 MFC set to  0.000000
12/10/2012	2:19:46 PM	PH3 MFC set to  0.000000
12/10/2012	2:19:46 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:19:46 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:19:47 PM	Tube furnace set to 0
12/10/2012	2:20:17 PM	Helium valve closed
12/10/2012	2:20:17 PM	H2 valve closed
12/10/2012	2:20:17 PM	BCl3 valve closed
12/10/2012	2:20:17 PM	PH3 valve closed
12/10/2012	2:20:17 PM	SiCl4 pre valve closed
12/10/2012	2:20:17 PM	SiCl4 post valve closed
12/10/2012	2:20:17 PM	Bypass valve closed
12/10/2012	2:20:17 PM	Bubbler valve closed
12/10/2012	2:20:17 PM	Main Vac valve opened
12/10/2012	2:20:17 PM	Helium MFC set to  0.000000
12/10/2012	2:20:17 PM	H2 MFC set to  0.000000
12/10/2012	2:20:17 PM	BCl3 MFC set to  0.000000
12/10/2012	2:20:17 PM	PH3 MFC set to  0.000000
12/10/2012	2:20:17 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:20:17 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:20:17 PM	Tube furnace set to 0
12/10/2012	2:20:47 PM	H2 valve closed
12/10/2012	2:20:47 PM	BCl3 valve closed
12/10/2012	2:20:47 PM	PH3 valve closed
12/10/2012	2:20:47 PM	SiCl4 pre valve closed
12/10/2012	2:20:47 PM	SiCl4 post valve closed
12/10/2012	2:20:47 PM	Bypass valve closed
12/10/2012	2:20:47 PM	Bubbler valve closed
12/10/2012	2:20:47 PM	Helium valve opened
12/10/2012	2:20:47 PM	Main Vac valve opened
12/10/2012	2:20:47 PM	Helium MFC set to  20.000000
12/10/2012	2:20:47 PM	H2 MFC set to  0.000000
12/10/2012	2:20:47 PM	BCl3 MFC set to  0.000000
12/10/2012	2:20:47 PM	PH3 MFC set to  0.000000
12/10/2012	2:20:47 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:20:47 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:20:47 PM	Tube furnace set to 0
12/10/2012	2:21:17 PM	Helium valve closed
12/10/2012	2:21:17 PM	H2 valve closed
12/10/2012	2:21:17 PM	BCl3 valve closed
12/10/2012	2:21:17 PM	PH3 valve closed
12/10/2012	2:21:17 PM	SiCl4 pre valve closed
12/10/2012	2:21:17 PM	SiCl4 post valve closed
12/10/2012	2:21:17 PM	Bypass valve closed
12/10/2012	2:21:17 PM	Bubbler valve closed
12/10/2012	2:21:17 PM	Main Vac valve opened
12/10/2012	2:21:17 PM	Helium MFC set to  0.000000
12/10/2012	2:21:17 PM	H2 MFC set to  0.000000
12/10/2012	2:21:17 PM	BCl3 MFC set to  0.000000
12/10/2012	2:21:17 PM	PH3 MFC set to  0.000000
12/10/2012	2:21:17 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:21:17 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:21:17 PM	Tube furnace set to 0
12/10/2012	2:21:47 PM	H2 valve closed
12/10/2012	2:21:47 PM	BCl3 valve closed
12/10/2012	2:21:47 PM	PH3 valve closed
12/10/2012	2:21:47 PM	SiCl4 pre valve closed
12/10/2012	2:21:47 PM	SiCl4 post valve closed
12/10/2012	2:21:47 PM	Bypass valve closed
12/10/2012	2:21:47 PM	Bubbler valve closed
12/10/2012	2:21:47 PM	Helium valve opened
12/10/2012	2:21:47 PM	Main Vac valve opened
12/10/2012	2:21:47 PM	Helium MFC set to  20.000000
12/10/2012	2:21:47 PM	H2 MFC set to  0.000000
12/10/2012	2:21:47 PM	BCl3 MFC set to  0.000000
12/10/2012	2:21:47 PM	PH3 MFC set to  0.000000
12/10/2012	2:21:47 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:21:47 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:21:48 PM	Tube furnace set to 0
12/10/2012	2:22:18 PM	Helium valve closed
12/10/2012	2:22:18 PM	H2 valve closed
12/10/2012	2:22:18 PM	BCl3 valve closed
12/10/2012	2:22:18 PM	PH3 valve closed
12/10/2012	2:22:18 PM	SiCl4 pre valve closed
12/10/2012	2:22:18 PM	SiCl4 post valve closed
12/10/2012	2:22:18 PM	Bypass valve closed
12/10/2012	2:22:18 PM	Bubbler valve closed
12/10/2012	2:22:18 PM	Main Vac valve opened
12/10/2012	2:22:18 PM	Helium MFC set to  0.000000
12/10/2012	2:22:18 PM	H2 MFC set to  0.000000
12/10/2012	2:22:18 PM	BCl3 MFC set to  0.000000
12/10/2012	2:22:18 PM	PH3 MFC set to  0.000000
12/10/2012	2:22:18 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:22:18 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:22:18 PM	Tube furnace set to 0
12/10/2012	2:22:48 PM	H2 valve closed
12/10/2012	2:22:48 PM	BCl3 valve closed
12/10/2012	2:22:48 PM	PH3 valve closed
12/10/2012	2:22:48 PM	SiCl4 pre valve closed
12/10/2012	2:22:48 PM	SiCl4 post valve closed
12/10/2012	2:22:48 PM	Bypass valve closed
12/10/2012	2:22:48 PM	Bubbler valve closed
12/10/2012	2:22:48 PM	Helium valve opened
12/10/2012	2:22:48 PM	Main Vac valve opened
12/10/2012	2:22:48 PM	Helium MFC set to  20.000000
12/10/2012	2:22:48 PM	H2 MFC set to  0.000000
12/10/2012	2:22:48 PM	BCl3 MFC set to  0.000000
12/10/2012	2:22:48 PM	PH3 MFC set to  0.000000
12/10/2012	2:22:48 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:22:48 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:22:48 PM	Tube furnace set to 0
12/10/2012	2:23:18 PM	Helium valve closed
12/10/2012	2:23:18 PM	H2 valve closed
12/10/2012	2:23:18 PM	BCl3 valve closed
12/10/2012	2:23:18 PM	PH3 valve closed
12/10/2012	2:23:18 PM	SiCl4 pre valve closed
12/10/2012	2:23:18 PM	SiCl4 post valve closed
12/10/2012	2:23:18 PM	Bypass valve closed
12/10/2012	2:23:18 PM	Bubbler valve closed
12/10/2012	2:23:18 PM	Main Vac valve opened
12/10/2012	2:23:18 PM	Helium MFC set to  0.000000
12/10/2012	2:23:18 PM	H2 MFC set to  0.000000
12/10/2012	2:23:18 PM	BCl3 MFC set to  0.000000
12/10/2012	2:23:18 PM	PH3 MFC set to  0.000000
12/10/2012	2:23:18 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:23:18 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:23:18 PM	Tube furnace set to 0
12/10/2012	2:23:42 PM	H2 valve closed
12/10/2012	2:23:42 PM	BCl3 valve closed
12/10/2012	2:23:42 PM	PH3 valve closed
12/10/2012	2:23:42 PM	SiCl4 pre valve closed
12/10/2012	2:23:42 PM	SiCl4 post valve closed
12/10/2012	2:23:42 PM	Bypass valve closed
12/10/2012	2:23:42 PM	Bubbler valve closed
12/10/2012	2:23:42 PM	Helium valve opened
12/10/2012	2:23:42 PM	Main Vac valve opened
12/10/2012	2:23:42 PM	Helium MFC set to  20.000000
12/10/2012	2:23:42 PM	H2 MFC set to  0.000000
12/10/2012	2:23:42 PM	BCl3 MFC set to  0.000000
12/10/2012	2:23:42 PM	PH3 MFC set to  0.000000
12/10/2012	2:23:42 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:23:42 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:23:42 PM	Tube furnace set to 0
12/10/2012	2:23:43 PM	Helium valve closed
12/10/2012	2:23:43 PM	H2 valve closed
12/10/2012	2:23:43 PM	BCl3 valve closed
12/10/2012	2:23:43 PM	PH3 valve closed
12/10/2012	2:23:43 PM	SiCl4 pre valve closed
12/10/2012	2:23:43 PM	SiCl4 post valve closed
12/10/2012	2:23:43 PM	Bypass valve closed
12/10/2012	2:23:43 PM	Bubbler valve closed
12/10/2012	2:23:43 PM	Main Vac valve opened
12/10/2012	2:23:43 PM	Helium MFC set to  0.000000
12/10/2012	2:23:43 PM	H2 MFC set to  0.000000
12/10/2012	2:23:43 PM	BCl3 MFC set to  0.000000
12/10/2012	2:23:43 PM	PH3 MFC set to  0.000000
12/10/2012	2:23:43 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:23:43 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:23:43 PM	Tube furnace set to 0
12/10/2012	2:23:43 PM	H2 valve closed
12/10/2012	2:23:43 PM	BCl3 valve closed
12/10/2012	2:23:43 PM	PH3 valve closed
12/10/2012	2:23:43 PM	SiCl4 pre valve closed
12/10/2012	2:23:43 PM	SiCl4 post valve closed
12/10/2012	2:23:43 PM	Bypass valve closed
12/10/2012	2:23:43 PM	Bubbler valve closed
12/10/2012	2:23:43 PM	Helium valve opened
12/10/2012	2:23:43 PM	Main Vac valve opened
12/10/2012	2:23:43 PM	Helium MFC set to  20.000000
12/10/2012	2:23:43 PM	H2 MFC set to  0.000000
12/10/2012	2:23:43 PM	BCl3 MFC set to  0.000000
12/10/2012	2:23:43 PM	PH3 MFC set to  0.000000
12/10/2012	2:23:43 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:23:43 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:23:43 PM	Tube furnace set to 0
12/10/2012	2:23:44 PM	Helium valve closed
12/10/2012	2:23:44 PM	H2 valve closed
12/10/2012	2:23:44 PM	BCl3 valve closed
12/10/2012	2:23:44 PM	PH3 valve closed
12/10/2012	2:23:44 PM	SiCl4 pre valve closed
12/10/2012	2:23:44 PM	SiCl4 post valve closed
12/10/2012	2:23:44 PM	Bypass valve closed
12/10/2012	2:23:44 PM	Bubbler valve closed
12/10/2012	2:23:44 PM	Main Vac valve opened
12/10/2012	2:23:44 PM	Helium MFC set to  0.000000
12/10/2012	2:23:44 PM	H2 MFC set to  0.000000
12/10/2012	2:23:44 PM	BCl3 MFC set to  0.000000
12/10/2012	2:23:44 PM	PH3 MFC set to  0.000000
12/10/2012	2:23:44 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:23:44 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:23:44 PM	Tube furnace set to 0
12/10/2012	2:23:45 PM	H2 valve closed
12/10/2012	2:23:45 PM	BCl3 valve closed
12/10/2012	2:23:45 PM	PH3 valve closed
12/10/2012	2:23:45 PM	SiCl4 pre valve closed
12/10/2012	2:23:45 PM	SiCl4 post valve closed
12/10/2012	2:23:45 PM	Bypass valve closed
12/10/2012	2:23:45 PM	Bubbler valve closed
12/10/2012	2:23:45 PM	Helium valve opened
12/10/2012	2:23:45 PM	Main Vac valve opened
12/10/2012	2:23:45 PM	Helium MFC set to  20.000000
12/10/2012	2:23:45 PM	H2 MFC set to  0.000000
12/10/2012	2:23:45 PM	BCl3 MFC set to  0.000000
12/10/2012	2:23:45 PM	PH3 MFC set to  0.000000
12/10/2012	2:23:45 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:23:45 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:23:45 PM	Tube furnace set to 0
12/10/2012	2:23:46 PM	Helium valve closed
12/10/2012	2:23:46 PM	H2 valve closed
12/10/2012	2:23:46 PM	BCl3 valve closed
12/10/2012	2:23:46 PM	PH3 valve closed
12/10/2012	2:23:46 PM	SiCl4 pre valve closed
12/10/2012	2:23:46 PM	SiCl4 post valve closed
12/10/2012	2:23:46 PM	Bypass valve closed
12/10/2012	2:23:46 PM	Bubbler valve closed
12/10/2012	2:23:46 PM	Main Vac valve opened
12/10/2012	2:23:46 PM	Helium MFC set to  0.000000
12/10/2012	2:23:46 PM	H2 MFC set to  0.000000
12/10/2012	2:23:46 PM	BCl3 MFC set to  0.000000
12/10/2012	2:23:46 PM	PH3 MFC set to  0.000000
12/10/2012	2:23:46 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:23:46 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:23:46 PM	Tube furnace set to 0
12/10/2012	2:23:47 PM	Run finished at 2:23 PM
12/10/2012	2:23:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/10/2012	2:25:39 PM	Main Vac valve closed
12/10/2012	2:25:52 PM	Main Vac valve opened
12/10/2012	2:27:47 PM	Recipe started at 2:27 PM
12/10/2012	2:27:47 PM	Helium valve closed
12/10/2012	2:27:47 PM	H2 valve closed
12/10/2012	2:27:47 PM	BCl3 valve closed
12/10/2012	2:27:47 PM	PH3 valve closed
12/10/2012	2:27:47 PM	SiCl4 pre valve closed
12/10/2012	2:27:47 PM	SiCl4 post valve closed
12/10/2012	2:27:47 PM	Main Vac valve closed
12/10/2012	2:27:47 PM	Bypass valve closed
12/10/2012	2:27:47 PM	Bubbler valve closed
12/10/2012	2:27:47 PM	Helium MFC set to  0.000000
12/10/2012	2:27:47 PM	H2 MFC set to  0.000000
12/10/2012	2:27:47 PM	BCl3 MFC set to  0.000000
12/10/2012	2:27:47 PM	PH3 MFC set to  0.000000
12/10/2012	2:27:47 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:27:47 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:27:47 PM	Tube furnace set to 0
12/10/2012	2:27:50 PM	Helium valve closed
12/10/2012	2:27:50 PM	BCl3 valve closed
12/10/2012	2:27:50 PM	PH3 valve closed
12/10/2012	2:27:50 PM	SiCl4 pre valve closed
12/10/2012	2:27:50 PM	SiCl4 post valve closed
12/10/2012	2:27:50 PM	Main Vac valve closed
12/10/2012	2:27:50 PM	Bypass valve closed
12/10/2012	2:27:50 PM	Bubbler valve closed
12/10/2012	2:27:50 PM	H2 valve opened
12/10/2012	2:27:50 PM	Helium MFC set to  0.000000
12/10/2012	2:27:50 PM	H2 MFC set to  500.000000
12/10/2012	2:27:50 PM	BCl3 MFC set to  0.000000
12/10/2012	2:27:50 PM	PH3 MFC set to  0.000000
12/10/2012	2:27:50 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:27:50 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:27:50 PM	Tube furnace set to 0
12/10/2012	2:29:01 PM	Helium valve closed
12/10/2012	2:29:01 PM	BCl3 valve closed
12/10/2012	2:29:01 PM	PH3 valve closed
12/10/2012	2:29:01 PM	SiCl4 pre valve closed
12/10/2012	2:29:01 PM	SiCl4 post valve closed
12/10/2012	2:29:01 PM	Main Vac valve closed
12/10/2012	2:29:01 PM	Bypass valve closed
12/10/2012	2:29:01 PM	H2 valve opened
12/10/2012	2:29:01 PM	Bubbler valve opened
12/10/2012	2:29:01 PM	Helium MFC set to  0.000000
12/10/2012	2:29:01 PM	H2 MFC set to  500.000000
12/10/2012	2:29:01 PM	BCl3 MFC set to  0.000000
12/10/2012	2:29:01 PM	PH3 MFC set to  0.000000
12/10/2012	2:29:01 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:29:01 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:29:01 PM	Tube furnace set to 0
12/10/2012	2:29:02 PM	Helium valve closed
12/10/2012	2:29:02 PM	BCl3 valve closed
12/10/2012	2:29:02 PM	PH3 valve closed
12/10/2012	2:29:02 PM	SiCl4 pre valve closed
12/10/2012	2:29:02 PM	SiCl4 post valve closed
12/10/2012	2:29:02 PM	Main Vac valve closed
12/10/2012	2:29:02 PM	Bypass valve closed
12/10/2012	2:29:02 PM	H2 valve opened
12/10/2012	2:29:02 PM	Bubbler valve opened
12/10/2012	2:29:02 PM	Helium MFC set to  0.000000
12/10/2012	2:29:02 PM	H2 MFC set to  500.000000
12/10/2012	2:29:02 PM	BCl3 MFC set to  0.000000
12/10/2012	2:29:02 PM	PH3 MFC set to  0.000000
12/10/2012	2:29:02 PM	SiCl4 MFC set to  0.000000
12/10/2012	2:29:02 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:29:03 PM	Tube furnace set to 1000
12/10/2012	2:59:03 PM	Helium valve closed
12/10/2012	2:59:03 PM	BCl3 valve closed
12/10/2012	2:59:03 PM	Main Vac valve closed
12/10/2012	2:59:03 PM	Bypass valve closed
12/10/2012	2:59:03 PM	H2 valve opened
12/10/2012	2:59:03 PM	PH3 valve opened
12/10/2012	2:59:03 PM	SiCl4 pre valve opened
12/10/2012	2:59:03 PM	SiCl4 post valve opened
12/10/2012	2:59:03 PM	Bubbler valve opened
12/10/2012	2:59:03 PM	Helium MFC set to  0.000000
12/10/2012	2:59:03 PM	H2 MFC set to  500.000000
12/10/2012	2:59:03 PM	BCl3 MFC set to  0.000000
12/10/2012	2:59:03 PM	PH3 MFC set to  0.300000
12/10/2012	2:59:03 PM	SiCl4 MFC set to  25.000000
12/10/2012	2:59:03 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	2:59:03 PM	Tube furnace set to 1000
12/10/2012	3:14:03 PM	Helium valve closed
12/10/2012	3:14:03 PM	BCl3 valve closed
12/10/2012	3:14:03 PM	PH3 valve closed
12/10/2012	3:14:03 PM	SiCl4 pre valve closed
12/10/2012	3:14:03 PM	SiCl4 post valve closed
12/10/2012	3:14:03 PM	Main Vac valve closed
12/10/2012	3:14:03 PM	Bypass valve closed
12/10/2012	3:14:03 PM	H2 valve opened
12/10/2012	3:14:03 PM	Bubbler valve opened
12/10/2012	3:14:03 PM	Helium MFC set to  0.000000
12/10/2012	3:14:03 PM	H2 MFC set to  500.000000
12/10/2012	3:14:03 PM	BCl3 MFC set to  0.000000
12/10/2012	3:14:03 PM	PH3 MFC set to  0.000000
12/10/2012	3:14:03 PM	SiCl4 MFC set to  0.000000
12/10/2012	3:14:03 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	3:14:03 PM	Tube furnace set to 750
12/10/2012	3:19:03 PM	H2 valve closed
12/10/2012	3:19:03 PM	BCl3 valve closed
12/10/2012	3:19:03 PM	PH3 valve closed
12/10/2012	3:19:03 PM	SiCl4 pre valve closed
12/10/2012	3:19:03 PM	SiCl4 post valve closed
12/10/2012	3:19:03 PM	Main Vac valve closed
12/10/2012	3:19:03 PM	Bypass valve closed
12/10/2012	3:19:03 PM	Helium valve opened
12/10/2012	3:19:03 PM	Bubbler valve opened
12/10/2012	3:19:03 PM	Helium MFC set to  500.000000
12/10/2012	3:19:03 PM	H2 MFC set to  0.000000
12/10/2012	3:19:03 PM	BCl3 MFC set to  0.000000
12/10/2012	3:19:03 PM	PH3 MFC set to  0.000000
12/10/2012	3:19:03 PM	SiCl4 MFC set to  0.000000
12/10/2012	3:19:03 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	3:19:03 PM	Tube furnace set to 0
12/10/2012	3:39:03 PM	Helium valve closed
12/10/2012	3:39:03 PM	H2 valve closed
12/10/2012	3:39:03 PM	BCl3 valve closed
12/10/2012	3:39:03 PM	PH3 valve closed
12/10/2012	3:39:03 PM	SiCl4 pre valve closed
12/10/2012	3:39:03 PM	SiCl4 post valve closed
12/10/2012	3:39:03 PM	Main Vac valve closed
12/10/2012	3:39:03 PM	Bypass valve closed
12/10/2012	3:39:03 PM	Bubbler valve closed
12/10/2012	3:39:03 PM	Helium MFC set to  0.000000
12/10/2012	3:39:03 PM	H2 MFC set to  0.000000
12/10/2012	3:39:03 PM	BCl3 MFC set to  0.000000
12/10/2012	3:39:03 PM	PH3 MFC set to  0.000000
12/10/2012	3:39:03 PM	SiCl4 MFC set to  0.000000
12/10/2012	3:39:03 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	3:39:04 PM	Tube furnace set to 0
12/10/2012	3:39:05 PM	Run finished at 3:39 PM
12/10/2012	3:44:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2012	3:45:00 PM	Recipe started at 3:44 PM
12/10/2012	3:45:00 PM	Helium valve closed
12/10/2012	3:45:00 PM	H2 valve closed
12/10/2012	3:45:00 PM	BCl3 valve closed
12/10/2012	3:45:00 PM	PH3 valve closed
12/10/2012	3:45:00 PM	SiCl4 pre valve closed
12/10/2012	3:45:00 PM	SiCl4 post valve closed
12/10/2012	3:45:00 PM	Main Vac valve closed
12/10/2012	3:45:00 PM	Bubbler valve closed
12/10/2012	3:45:00 PM	Bypass valve opened
12/10/2012	3:45:00 PM	Helium MFC set to  0.000000
12/10/2012	3:45:00 PM	H2 MFC set to  0.000000
12/10/2012	3:45:00 PM	BCl3 MFC set to  0.000000
12/10/2012	3:45:00 PM	PH3 MFC set to  0.000000
12/10/2012	3:45:00 PM	SiCl4 MFC set to  0.000000
12/10/2012	3:45:00 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	3:45:00 PM	Tube furnace set to 0
12/10/2012	3:46:07 PM	Helium valve closed
12/10/2012	3:46:07 PM	H2 valve closed
12/10/2012	3:46:07 PM	BCl3 valve closed
12/10/2012	3:46:07 PM	PH3 valve closed
12/10/2012	3:46:07 PM	SiCl4 pre valve closed
12/10/2012	3:46:07 PM	SiCl4 post valve closed
12/10/2012	3:46:07 PM	Main Vac valve closed
12/10/2012	3:46:07 PM	Bubbler valve closed
12/10/2012	3:46:07 PM	Bypass valve opened
12/10/2012	3:46:07 PM	Helium MFC set to  0.000000
12/10/2012	3:46:07 PM	H2 MFC set to  0.000000
12/10/2012	3:46:07 PM	BCl3 MFC set to  0.000000
12/10/2012	3:46:07 PM	PH3 MFC set to  0.000000
12/10/2012	3:46:07 PM	SiCl4 MFC set to  0.000000
12/10/2012	3:46:07 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	3:46:07 PM	Tube furnace set to 0
12/10/2012	3:47:07 PM	Helium valve closed
12/10/2012	3:47:07 PM	H2 valve closed
12/10/2012	3:47:07 PM	BCl3 valve closed
12/10/2012	3:47:07 PM	PH3 valve closed
12/10/2012	3:47:07 PM	SiCl4 pre valve closed
12/10/2012	3:47:07 PM	SiCl4 post valve closed
12/10/2012	3:47:07 PM	Bypass valve closed
12/10/2012	3:47:07 PM	Bubbler valve closed
12/10/2012	3:47:07 PM	Main Vac valve opened
12/10/2012	3:47:07 PM	Helium MFC set to  0.000000
12/10/2012	3:47:08 PM	H2 MFC set to  0.000000
12/10/2012	3:47:08 PM	BCl3 MFC set to  0.000000
12/10/2012	3:47:08 PM	PH3 MFC set to  0.000000
12/10/2012	3:47:08 PM	SiCl4 MFC set to  0.000000
12/10/2012	3:47:08 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	3:47:08 PM	Tube furnace set to 0
12/10/2012	3:47:09 PM	Run finished at 3:47 PM
12/10/2012	3:47:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2012	4:32:53 PM	Main Vac valve closed
12/10/2012	4:33:06 PM	Main Vac valve opened
12/10/2012	4:39:45 PM	Recipe started at 4:39 PM
12/10/2012	4:39:45 PM	Helium valve closed
12/10/2012	4:39:45 PM	H2 valve closed
12/10/2012	4:39:45 PM	BCl3 valve closed
12/10/2012	4:39:45 PM	PH3 valve closed
12/10/2012	4:39:45 PM	SiCl4 pre valve closed
12/10/2012	4:39:45 PM	SiCl4 post valve closed
12/10/2012	4:39:45 PM	Main Vac valve closed
12/10/2012	4:39:45 PM	Bypass valve closed
12/10/2012	4:39:45 PM	Bubbler valve closed
12/10/2012	4:39:45 PM	Helium MFC set to  0.000000
12/10/2012	4:39:45 PM	H2 MFC set to  0.000000
12/10/2012	4:39:45 PM	BCl3 MFC set to  0.000000
12/10/2012	4:39:45 PM	PH3 MFC set to  0.000000
12/10/2012	4:39:45 PM	SiCl4 MFC set to  0.000000
12/10/2012	4:39:45 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	4:39:45 PM	Tube furnace set to 0
12/10/2012	4:39:48 PM	Helium valve closed
12/10/2012	4:39:48 PM	BCl3 valve closed
12/10/2012	4:39:48 PM	PH3 valve closed
12/10/2012	4:39:48 PM	SiCl4 pre valve closed
12/10/2012	4:39:48 PM	SiCl4 post valve closed
12/10/2012	4:39:48 PM	Main Vac valve closed
12/10/2012	4:39:48 PM	Bypass valve closed
12/10/2012	4:39:48 PM	Bubbler valve closed
12/10/2012	4:39:48 PM	H2 valve opened
12/10/2012	4:39:48 PM	Helium MFC set to  0.000000
12/10/2012	4:39:48 PM	H2 MFC set to  500.000000
12/10/2012	4:39:48 PM	BCl3 MFC set to  0.000000
12/10/2012	4:39:48 PM	PH3 MFC set to  0.000000
12/10/2012	4:39:48 PM	SiCl4 MFC set to  0.000000
12/10/2012	4:39:48 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	4:39:48 PM	Tube furnace set to 0
12/10/2012	4:41:01 PM	Helium valve closed
12/10/2012	4:41:01 PM	BCl3 valve closed
12/10/2012	4:41:01 PM	PH3 valve closed
12/10/2012	4:41:01 PM	SiCl4 pre valve closed
12/10/2012	4:41:01 PM	SiCl4 post valve closed
12/10/2012	4:41:01 PM	Main Vac valve closed
12/10/2012	4:41:01 PM	Bypass valve closed
12/10/2012	4:41:01 PM	H2 valve opened
12/10/2012	4:41:01 PM	Bubbler valve opened
12/10/2012	4:41:01 PM	Helium MFC set to  0.000000
12/10/2012	4:41:01 PM	H2 MFC set to  500.000000
12/10/2012	4:41:01 PM	BCl3 MFC set to  0.000000
12/10/2012	4:41:01 PM	PH3 MFC set to  0.000000
12/10/2012	4:41:01 PM	SiCl4 MFC set to  0.000000
12/10/2012	4:41:01 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	4:41:01 PM	Tube furnace set to 0
12/10/2012	4:41:02 PM	Helium valve closed
12/10/2012	4:41:02 PM	BCl3 valve closed
12/10/2012	4:41:02 PM	PH3 valve closed
12/10/2012	4:41:02 PM	SiCl4 pre valve closed
12/10/2012	4:41:02 PM	SiCl4 post valve closed
12/10/2012	4:41:02 PM	Main Vac valve closed
12/10/2012	4:41:02 PM	Bypass valve closed
12/10/2012	4:41:02 PM	H2 valve opened
12/10/2012	4:41:02 PM	Bubbler valve opened
12/10/2012	4:41:02 PM	Helium MFC set to  0.000000
12/10/2012	4:41:02 PM	H2 MFC set to  500.000000
12/10/2012	4:41:02 PM	BCl3 MFC set to  0.000000
12/10/2012	4:41:02 PM	PH3 MFC set to  0.000000
12/10/2012	4:41:02 PM	SiCl4 MFC set to  0.000000
12/10/2012	4:41:02 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	4:41:02 PM	Tube furnace set to 1000
12/10/2012	5:11:02 PM	Helium valve closed
12/10/2012	5:11:02 PM	BCl3 valve closed
12/10/2012	5:11:02 PM	Main Vac valve closed
12/10/2012	5:11:02 PM	Bypass valve closed
12/10/2012	5:11:02 PM	H2 valve opened
12/10/2012	5:11:02 PM	PH3 valve opened
12/10/2012	5:11:02 PM	SiCl4 pre valve opened
12/10/2012	5:11:02 PM	SiCl4 post valve opened
12/10/2012	5:11:02 PM	Bubbler valve opened
12/10/2012	5:11:02 PM	Helium MFC set to  0.000000
12/10/2012	5:11:02 PM	H2 MFC set to  500.000000
12/10/2012	5:11:02 PM	BCl3 MFC set to  0.000000
12/10/2012	5:11:02 PM	PH3 MFC set to  0.300000
12/10/2012	5:11:02 PM	SiCl4 MFC set to  25.000000
12/10/2012	5:11:02 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:11:02 PM	Tube furnace set to 1000
12/10/2012	5:26:02 PM	Helium valve closed
12/10/2012	5:26:02 PM	BCl3 valve closed
12/10/2012	5:26:02 PM	PH3 valve closed
12/10/2012	5:26:02 PM	SiCl4 pre valve closed
12/10/2012	5:26:02 PM	SiCl4 post valve closed
12/10/2012	5:26:02 PM	Main Vac valve closed
12/10/2012	5:26:02 PM	Bypass valve closed
12/10/2012	5:26:02 PM	H2 valve opened
12/10/2012	5:26:02 PM	Bubbler valve opened
12/10/2012	5:26:02 PM	Helium MFC set to  0.000000
12/10/2012	5:26:02 PM	H2 MFC set to  500.000000
12/10/2012	5:26:02 PM	BCl3 MFC set to  0.000000
12/10/2012	5:26:02 PM	PH3 MFC set to  0.000000
12/10/2012	5:26:02 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:26:02 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:26:03 PM	Tube furnace set to 750
12/10/2012	5:31:03 PM	H2 valve closed
12/10/2012	5:31:03 PM	BCl3 valve closed
12/10/2012	5:31:03 PM	PH3 valve closed
12/10/2012	5:31:03 PM	SiCl4 pre valve closed
12/10/2012	5:31:03 PM	SiCl4 post valve closed
12/10/2012	5:31:03 PM	Main Vac valve closed
12/10/2012	5:31:03 PM	Bypass valve closed
12/10/2012	5:31:03 PM	Helium valve opened
12/10/2012	5:31:03 PM	Bubbler valve opened
12/10/2012	5:31:03 PM	Helium MFC set to  500.000000
12/10/2012	5:31:03 PM	H2 MFC set to  0.000000
12/10/2012	5:31:03 PM	BCl3 MFC set to  0.000000
12/10/2012	5:31:03 PM	PH3 MFC set to  0.000000
12/10/2012	5:31:03 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:31:03 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:31:03 PM	Tube furnace set to 0
12/10/2012	5:39:41 PM	Helium valve closed
12/10/2012	5:39:41 PM	H2 valve closed
12/10/2012	5:39:41 PM	BCl3 valve closed
12/10/2012	5:39:41 PM	PH3 valve closed
12/10/2012	5:39:41 PM	SiCl4 pre valve closed
12/10/2012	5:39:41 PM	SiCl4 post valve closed
12/10/2012	5:39:41 PM	Main Vac valve closed
12/10/2012	5:39:41 PM	Bypass valve closed
12/10/2012	5:39:41 PM	Bubbler valve closed
12/10/2012	5:39:41 PM	Helium MFC set to  0.000000
12/10/2012	5:39:41 PM	H2 MFC set to  0.000000
12/10/2012	5:39:41 PM	BCl3 MFC set to  0.000000
12/10/2012	5:39:41 PM	PH3 MFC set to  0.000000
12/10/2012	5:39:41 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:39:41 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:39:41 PM	Tube furnace set to 0
12/10/2012	5:39:42 PM	Run finished at 5:39 PM
12/10/2012	5:42:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2012	5:42:53 PM	Recipe started at 5:42 PM
12/10/2012	5:42:54 PM	Helium valve closed
12/10/2012	5:42:54 PM	H2 valve closed
12/10/2012	5:42:54 PM	BCl3 valve closed
12/10/2012	5:42:54 PM	PH3 valve closed
12/10/2012	5:42:54 PM	SiCl4 pre valve closed
12/10/2012	5:42:54 PM	SiCl4 post valve closed
12/10/2012	5:42:54 PM	Main Vac valve closed
12/10/2012	5:42:54 PM	Bubbler valve closed
12/10/2012	5:42:54 PM	Bypass valve opened
12/10/2012	5:42:54 PM	Helium MFC set to  0.000000
12/10/2012	5:42:54 PM	H2 MFC set to  0.000000
12/10/2012	5:42:54 PM	BCl3 MFC set to  0.000000
12/10/2012	5:42:54 PM	PH3 MFC set to  0.000000
12/10/2012	5:42:54 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:42:54 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:42:54 PM	Tube furnace set to 0
12/10/2012	5:44:00 PM	Helium valve closed
12/10/2012	5:44:00 PM	H2 valve closed
12/10/2012	5:44:00 PM	BCl3 valve closed
12/10/2012	5:44:00 PM	PH3 valve closed
12/10/2012	5:44:00 PM	SiCl4 pre valve closed
12/10/2012	5:44:00 PM	SiCl4 post valve closed
12/10/2012	5:44:00 PM	Main Vac valve closed
12/10/2012	5:44:00 PM	Bubbler valve closed
12/10/2012	5:44:00 PM	Bypass valve opened
12/10/2012	5:44:00 PM	Helium MFC set to  0.000000
12/10/2012	5:44:00 PM	H2 MFC set to  0.000000
12/10/2012	5:44:00 PM	BCl3 MFC set to  0.000000
12/10/2012	5:44:00 PM	PH3 MFC set to  0.000000
12/10/2012	5:44:00 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:44:00 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:44:00 PM	Tube furnace set to 0
12/10/2012	5:44:14 PM	Helium valve closed
12/10/2012	5:44:14 PM	H2 valve closed
12/10/2012	5:44:14 PM	BCl3 valve closed
12/10/2012	5:44:14 PM	PH3 valve closed
12/10/2012	5:44:14 PM	SiCl4 pre valve closed
12/10/2012	5:44:14 PM	SiCl4 post valve closed
12/10/2012	5:44:14 PM	Bypass valve closed
12/10/2012	5:44:14 PM	Bubbler valve closed
12/10/2012	5:44:14 PM	Main Vac valve opened
12/10/2012	5:44:14 PM	Helium MFC set to  0.000000
12/10/2012	5:44:14 PM	H2 MFC set to  0.000000
12/10/2012	5:44:14 PM	BCl3 MFC set to  0.000000
12/10/2012	5:44:14 PM	PH3 MFC set to  0.000000
12/10/2012	5:44:14 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:44:14 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:44:14 PM	Tube furnace set to 0
12/10/2012	5:44:15 PM	Run finished at 5:44 PM
12/10/2012	5:44:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2012	5:44:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/10/2012	5:45:04 PM	Recipe started at 5:44 PM
12/10/2012	5:45:04 PM	Helium valve closed
12/10/2012	5:45:04 PM	H2 valve closed
12/10/2012	5:45:04 PM	BCl3 valve closed
12/10/2012	5:45:04 PM	PH3 valve closed
12/10/2012	5:45:04 PM	SiCl4 pre valve closed
12/10/2012	5:45:04 PM	SiCl4 post valve closed
12/10/2012	5:45:04 PM	Main Vac valve closed
12/10/2012	5:45:04 PM	Bubbler valve closed
12/10/2012	5:45:04 PM	Bypass valve opened
12/10/2012	5:45:04 PM	Helium MFC set to  0.000000
12/10/2012	5:45:04 PM	H2 MFC set to  0.000000
12/10/2012	5:45:04 PM	BCl3 MFC set to  0.000000
12/10/2012	5:45:04 PM	PH3 MFC set to  0.000000
12/10/2012	5:45:04 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:45:04 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:45:04 PM	Tube furnace set to 0
12/10/2012	5:45:04 PM	Helium valve closed
12/10/2012	5:45:04 PM	H2 valve closed
12/10/2012	5:45:04 PM	BCl3 valve closed
12/10/2012	5:45:04 PM	PH3 valve closed
12/10/2012	5:45:04 PM	SiCl4 pre valve closed
12/10/2012	5:45:04 PM	SiCl4 post valve closed
12/10/2012	5:45:04 PM	Main Vac valve closed
12/10/2012	5:45:04 PM	Bubbler valve closed
12/10/2012	5:45:04 PM	Bypass valve opened
12/10/2012	5:45:04 PM	Helium MFC set to  0.000000
12/10/2012	5:45:04 PM	H2 MFC set to  0.000000
12/10/2012	5:45:04 PM	BCl3 MFC set to  0.000000
12/10/2012	5:45:04 PM	PH3 MFC set to  0.000000
12/10/2012	5:45:04 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:45:04 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:45:05 PM	Tube furnace set to 0
12/10/2012	5:45:05 PM	Helium valve closed
12/10/2012	5:45:05 PM	H2 valve closed
12/10/2012	5:45:05 PM	BCl3 valve closed
12/10/2012	5:45:05 PM	PH3 valve closed
12/10/2012	5:45:05 PM	SiCl4 pre valve closed
12/10/2012	5:45:05 PM	SiCl4 post valve closed
12/10/2012	5:45:05 PM	Bypass valve closed
12/10/2012	5:45:05 PM	Bubbler valve closed
12/10/2012	5:45:05 PM	Main Vac valve opened
12/10/2012	5:45:05 PM	Helium MFC set to  0.000000
12/10/2012	5:45:05 PM	H2 MFC set to  0.000000
12/10/2012	5:45:05 PM	BCl3 MFC set to  0.000000
12/10/2012	5:45:05 PM	PH3 MFC set to  0.000000
12/10/2012	5:45:05 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:45:05 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:45:05 PM	Tube furnace set to 0
12/10/2012	5:45:35 PM	H2 valve closed
12/10/2012	5:45:35 PM	BCl3 valve closed
12/10/2012	5:45:35 PM	PH3 valve closed
12/10/2012	5:45:35 PM	SiCl4 pre valve closed
12/10/2012	5:45:35 PM	SiCl4 post valve closed
12/10/2012	5:45:35 PM	Bypass valve closed
12/10/2012	5:45:35 PM	Bubbler valve closed
12/10/2012	5:45:35 PM	Helium valve opened
12/10/2012	5:45:35 PM	Main Vac valve opened
12/10/2012	5:45:35 PM	Helium MFC set to  20.000000
12/10/2012	5:45:35 PM	H2 MFC set to  0.000000
12/10/2012	5:45:35 PM	BCl3 MFC set to  0.000000
12/10/2012	5:45:35 PM	PH3 MFC set to  0.000000
12/10/2012	5:45:35 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:45:35 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:45:35 PM	Tube furnace set to 0
12/10/2012	5:46:05 PM	Helium valve closed
12/10/2012	5:46:05 PM	H2 valve closed
12/10/2012	5:46:05 PM	BCl3 valve closed
12/10/2012	5:46:05 PM	PH3 valve closed
12/10/2012	5:46:05 PM	SiCl4 pre valve closed
12/10/2012	5:46:05 PM	SiCl4 post valve closed
12/10/2012	5:46:05 PM	Bypass valve closed
12/10/2012	5:46:05 PM	Bubbler valve closed
12/10/2012	5:46:05 PM	Main Vac valve opened
12/10/2012	5:46:05 PM	Helium MFC set to  0.000000
12/10/2012	5:46:05 PM	H2 MFC set to  0.000000
12/10/2012	5:46:05 PM	BCl3 MFC set to  0.000000
12/10/2012	5:46:05 PM	PH3 MFC set to  0.000000
12/10/2012	5:46:05 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:46:05 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:46:06 PM	Tube furnace set to 0
12/10/2012	5:46:36 PM	H2 valve closed
12/10/2012	5:46:36 PM	BCl3 valve closed
12/10/2012	5:46:36 PM	PH3 valve closed
12/10/2012	5:46:36 PM	SiCl4 pre valve closed
12/10/2012	5:46:36 PM	SiCl4 post valve closed
12/10/2012	5:46:36 PM	Bypass valve closed
12/10/2012	5:46:36 PM	Bubbler valve closed
12/10/2012	5:46:36 PM	Helium valve opened
12/10/2012	5:46:36 PM	Main Vac valve opened
12/10/2012	5:46:36 PM	Helium MFC set to  20.000000
12/10/2012	5:46:36 PM	H2 MFC set to  0.000000
12/10/2012	5:46:36 PM	BCl3 MFC set to  0.000000
12/10/2012	5:46:36 PM	PH3 MFC set to  0.000000
12/10/2012	5:46:36 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:46:36 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:46:36 PM	Tube furnace set to 0
12/10/2012	5:47:06 PM	Helium valve closed
12/10/2012	5:47:06 PM	H2 valve closed
12/10/2012	5:47:06 PM	BCl3 valve closed
12/10/2012	5:47:06 PM	PH3 valve closed
12/10/2012	5:47:06 PM	SiCl4 pre valve closed
12/10/2012	5:47:06 PM	SiCl4 post valve closed
12/10/2012	5:47:06 PM	Bypass valve closed
12/10/2012	5:47:06 PM	Bubbler valve closed
12/10/2012	5:47:06 PM	Main Vac valve opened
12/10/2012	5:47:06 PM	Helium MFC set to  0.000000
12/10/2012	5:47:06 PM	H2 MFC set to  0.000000
12/10/2012	5:47:06 PM	BCl3 MFC set to  0.000000
12/10/2012	5:47:06 PM	PH3 MFC set to  0.000000
12/10/2012	5:47:06 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:47:06 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:47:06 PM	Tube furnace set to 0
12/10/2012	5:47:36 PM	H2 valve closed
12/10/2012	5:47:36 PM	BCl3 valve closed
12/10/2012	5:47:36 PM	PH3 valve closed
12/10/2012	5:47:36 PM	SiCl4 pre valve closed
12/10/2012	5:47:36 PM	SiCl4 post valve closed
12/10/2012	5:47:36 PM	Bypass valve closed
12/10/2012	5:47:36 PM	Bubbler valve closed
12/10/2012	5:47:36 PM	Helium valve opened
12/10/2012	5:47:36 PM	Main Vac valve opened
12/10/2012	5:47:36 PM	Helium MFC set to  20.000000
12/10/2012	5:47:36 PM	H2 MFC set to  0.000000
12/10/2012	5:47:36 PM	BCl3 MFC set to  0.000000
12/10/2012	5:47:36 PM	PH3 MFC set to  0.000000
12/10/2012	5:47:36 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:47:36 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:47:36 PM	Tube furnace set to 0
12/10/2012	5:48:06 PM	Helium valve closed
12/10/2012	5:48:06 PM	H2 valve closed
12/10/2012	5:48:06 PM	BCl3 valve closed
12/10/2012	5:48:07 PM	PH3 valve closed
12/10/2012	5:48:07 PM	SiCl4 pre valve closed
12/10/2012	5:48:07 PM	SiCl4 post valve closed
12/10/2012	5:48:07 PM	Bypass valve closed
12/10/2012	5:48:07 PM	Bubbler valve closed
12/10/2012	5:48:07 PM	Main Vac valve opened
12/10/2012	5:48:07 PM	Helium MFC set to  0.000000
12/10/2012	5:48:07 PM	H2 MFC set to  0.000000
12/10/2012	5:48:07 PM	BCl3 MFC set to  0.000000
12/10/2012	5:48:07 PM	PH3 MFC set to  0.000000
12/10/2012	5:48:07 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:48:07 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:48:07 PM	Tube furnace set to 0
12/10/2012	5:48:37 PM	H2 valve closed
12/10/2012	5:48:37 PM	BCl3 valve closed
12/10/2012	5:48:37 PM	PH3 valve closed
12/10/2012	5:48:37 PM	SiCl4 pre valve closed
12/10/2012	5:48:37 PM	SiCl4 post valve closed
12/10/2012	5:48:37 PM	Bypass valve closed
12/10/2012	5:48:37 PM	Bubbler valve closed
12/10/2012	5:48:37 PM	Helium valve opened
12/10/2012	5:48:37 PM	Main Vac valve opened
12/10/2012	5:48:37 PM	Helium MFC set to  20.000000
12/10/2012	5:48:37 PM	H2 MFC set to  0.000000
12/10/2012	5:48:37 PM	BCl3 MFC set to  0.000000
12/10/2012	5:48:37 PM	PH3 MFC set to  0.000000
12/10/2012	5:48:37 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:48:37 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:48:37 PM	Tube furnace set to 0
12/10/2012	5:49:07 PM	Helium valve closed
12/10/2012	5:49:07 PM	H2 valve closed
12/10/2012	5:49:07 PM	BCl3 valve closed
12/10/2012	5:49:07 PM	PH3 valve closed
12/10/2012	5:49:07 PM	SiCl4 pre valve closed
12/10/2012	5:49:07 PM	SiCl4 post valve closed
12/10/2012	5:49:07 PM	Bypass valve closed
12/10/2012	5:49:07 PM	Bubbler valve closed
12/10/2012	5:49:07 PM	Main Vac valve opened
12/10/2012	5:49:07 PM	Helium MFC set to  0.000000
12/10/2012	5:49:07 PM	H2 MFC set to  0.000000
12/10/2012	5:49:07 PM	BCl3 MFC set to  0.000000
12/10/2012	5:49:07 PM	PH3 MFC set to  0.000000
12/10/2012	5:49:07 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:49:07 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:49:07 PM	Tube furnace set to 0
12/10/2012	5:49:37 PM	H2 valve closed
12/10/2012	5:49:37 PM	BCl3 valve closed
12/10/2012	5:49:37 PM	PH3 valve closed
12/10/2012	5:49:37 PM	SiCl4 pre valve closed
12/10/2012	5:49:37 PM	SiCl4 post valve closed
12/10/2012	5:49:37 PM	Bypass valve closed
12/10/2012	5:49:37 PM	Bubbler valve closed
12/10/2012	5:49:37 PM	Helium valve opened
12/10/2012	5:49:37 PM	Main Vac valve opened
12/10/2012	5:49:37 PM	Helium MFC set to  20.000000
12/10/2012	5:49:37 PM	H2 MFC set to  0.000000
12/10/2012	5:49:37 PM	BCl3 MFC set to  0.000000
12/10/2012	5:49:37 PM	PH3 MFC set to  0.000000
12/10/2012	5:49:37 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:49:37 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:49:38 PM	Tube furnace set to 0
12/10/2012	5:50:08 PM	Helium valve closed
12/10/2012	5:50:08 PM	H2 valve closed
12/10/2012	5:50:08 PM	BCl3 valve closed
12/10/2012	5:50:08 PM	PH3 valve closed
12/10/2012	5:50:08 PM	SiCl4 pre valve closed
12/10/2012	5:50:08 PM	SiCl4 post valve closed
12/10/2012	5:50:08 PM	Bypass valve closed
12/10/2012	5:50:08 PM	Bubbler valve closed
12/10/2012	5:50:08 PM	Main Vac valve opened
12/10/2012	5:50:08 PM	Helium MFC set to  0.000000
12/10/2012	5:50:08 PM	H2 MFC set to  0.000000
12/10/2012	5:50:08 PM	BCl3 MFC set to  0.000000
12/10/2012	5:50:08 PM	PH3 MFC set to  0.000000
12/10/2012	5:50:08 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:50:08 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:50:08 PM	Tube furnace set to 0
12/10/2012	5:50:38 PM	H2 valve closed
12/10/2012	5:50:38 PM	BCl3 valve closed
12/10/2012	5:50:38 PM	PH3 valve closed
12/10/2012	5:50:38 PM	SiCl4 pre valve closed
12/10/2012	5:50:38 PM	SiCl4 post valve closed
12/10/2012	5:50:38 PM	Bypass valve closed
12/10/2012	5:50:38 PM	Bubbler valve closed
12/10/2012	5:50:38 PM	Helium valve opened
12/10/2012	5:50:38 PM	Main Vac valve opened
12/10/2012	5:50:38 PM	Helium MFC set to  20.000000
12/10/2012	5:50:38 PM	H2 MFC set to  0.000000
12/10/2012	5:50:38 PM	BCl3 MFC set to  0.000000
12/10/2012	5:50:38 PM	PH3 MFC set to  0.000000
12/10/2012	5:50:38 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:50:38 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:50:38 PM	Tube furnace set to 0
12/10/2012	5:51:08 PM	Helium valve closed
12/10/2012	5:51:08 PM	H2 valve closed
12/10/2012	5:51:08 PM	BCl3 valve closed
12/10/2012	5:51:08 PM	PH3 valve closed
12/10/2012	5:51:08 PM	SiCl4 pre valve closed
12/10/2012	5:51:08 PM	SiCl4 post valve closed
12/10/2012	5:51:08 PM	Bypass valve closed
12/10/2012	5:51:08 PM	Bubbler valve closed
12/10/2012	5:51:08 PM	Main Vac valve opened
12/10/2012	5:51:08 PM	Helium MFC set to  0.000000
12/10/2012	5:51:08 PM	H2 MFC set to  0.000000
12/10/2012	5:51:08 PM	BCl3 MFC set to  0.000000
12/10/2012	5:51:08 PM	PH3 MFC set to  0.000000
12/10/2012	5:51:08 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:51:08 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:51:08 PM	Tube furnace set to 0
12/10/2012	5:51:38 PM	H2 valve closed
12/10/2012	5:51:38 PM	BCl3 valve closed
12/10/2012	5:51:38 PM	PH3 valve closed
12/10/2012	5:51:38 PM	SiCl4 pre valve closed
12/10/2012	5:51:38 PM	SiCl4 post valve closed
12/10/2012	5:51:38 PM	Bypass valve closed
12/10/2012	5:51:38 PM	Bubbler valve closed
12/10/2012	5:51:38 PM	Helium valve opened
12/10/2012	5:51:38 PM	Main Vac valve opened
12/10/2012	5:51:38 PM	Helium MFC set to  20.000000
12/10/2012	5:51:38 PM	H2 MFC set to  0.000000
12/10/2012	5:51:38 PM	BCl3 MFC set to  0.000000
12/10/2012	5:51:38 PM	PH3 MFC set to  0.000000
12/10/2012	5:51:38 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:51:38 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:51:39 PM	Tube furnace set to 0
12/10/2012	5:52:09 PM	Helium valve closed
12/10/2012	5:52:09 PM	H2 valve closed
12/10/2012	5:52:09 PM	BCl3 valve closed
12/10/2012	5:52:09 PM	PH3 valve closed
12/10/2012	5:52:09 PM	SiCl4 pre valve closed
12/10/2012	5:52:09 PM	SiCl4 post valve closed
12/10/2012	5:52:09 PM	Bypass valve closed
12/10/2012	5:52:09 PM	Bubbler valve closed
12/10/2012	5:52:09 PM	Main Vac valve opened
12/10/2012	5:52:09 PM	Helium MFC set to  0.000000
12/10/2012	5:52:09 PM	H2 MFC set to  0.000000
12/10/2012	5:52:09 PM	BCl3 MFC set to  0.000000
12/10/2012	5:52:09 PM	PH3 MFC set to  0.000000
12/10/2012	5:52:09 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:52:09 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:52:09 PM	Tube furnace set to 0
12/10/2012	5:52:39 PM	H2 valve closed
12/10/2012	5:52:39 PM	BCl3 valve closed
12/10/2012	5:52:39 PM	PH3 valve closed
12/10/2012	5:52:39 PM	SiCl4 pre valve closed
12/10/2012	5:52:39 PM	SiCl4 post valve closed
12/10/2012	5:52:39 PM	Bypass valve closed
12/10/2012	5:52:39 PM	Bubbler valve closed
12/10/2012	5:52:39 PM	Helium valve opened
12/10/2012	5:52:39 PM	Main Vac valve opened
12/10/2012	5:52:39 PM	Helium MFC set to  20.000000
12/10/2012	5:52:39 PM	H2 MFC set to  0.000000
12/10/2012	5:52:39 PM	BCl3 MFC set to  0.000000
12/10/2012	5:52:39 PM	PH3 MFC set to  0.000000
12/10/2012	5:52:39 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:52:39 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:52:39 PM	Tube furnace set to 0
12/10/2012	5:53:09 PM	Helium valve closed
12/10/2012	5:53:09 PM	H2 valve closed
12/10/2012	5:53:09 PM	BCl3 valve closed
12/10/2012	5:53:09 PM	PH3 valve closed
12/10/2012	5:53:09 PM	SiCl4 pre valve closed
12/10/2012	5:53:09 PM	SiCl4 post valve closed
12/10/2012	5:53:09 PM	Bypass valve closed
12/10/2012	5:53:09 PM	Bubbler valve closed
12/10/2012	5:53:09 PM	Main Vac valve opened
12/10/2012	5:53:09 PM	Helium MFC set to  0.000000
12/10/2012	5:53:09 PM	H2 MFC set to  0.000000
12/10/2012	5:53:09 PM	BCl3 MFC set to  0.000000
12/10/2012	5:53:09 PM	PH3 MFC set to  0.000000
12/10/2012	5:53:09 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:53:09 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:53:09 PM	Tube furnace set to 0
12/10/2012	5:53:39 PM	H2 valve closed
12/10/2012	5:53:39 PM	BCl3 valve closed
12/10/2012	5:53:39 PM	PH3 valve closed
12/10/2012	5:53:39 PM	SiCl4 pre valve closed
12/10/2012	5:53:39 PM	SiCl4 post valve closed
12/10/2012	5:53:39 PM	Bypass valve closed
12/10/2012	5:53:39 PM	Bubbler valve closed
12/10/2012	5:53:39 PM	Helium valve opened
12/10/2012	5:53:40 PM	Main Vac valve opened
12/10/2012	5:53:40 PM	Helium MFC set to  20.000000
12/10/2012	5:53:40 PM	H2 MFC set to  0.000000
12/10/2012	5:53:40 PM	BCl3 MFC set to  0.000000
12/10/2012	5:53:40 PM	PH3 MFC set to  0.000000
12/10/2012	5:53:40 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:53:40 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:53:40 PM	Tube furnace set to 0
12/10/2012	5:54:10 PM	Helium valve closed
12/10/2012	5:54:10 PM	H2 valve closed
12/10/2012	5:54:10 PM	BCl3 valve closed
12/10/2012	5:54:10 PM	PH3 valve closed
12/10/2012	5:54:10 PM	SiCl4 pre valve closed
12/10/2012	5:54:10 PM	SiCl4 post valve closed
12/10/2012	5:54:10 PM	Bypass valve closed
12/10/2012	5:54:10 PM	Bubbler valve closed
12/10/2012	5:54:10 PM	Main Vac valve opened
12/10/2012	5:54:10 PM	Helium MFC set to  0.000000
12/10/2012	5:54:10 PM	H2 MFC set to  0.000000
12/10/2012	5:54:10 PM	BCl3 MFC set to  0.000000
12/10/2012	5:54:10 PM	PH3 MFC set to  0.000000
12/10/2012	5:54:10 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:54:10 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:54:10 PM	Tube furnace set to 0
12/10/2012	5:54:40 PM	H2 valve closed
12/10/2012	5:54:40 PM	BCl3 valve closed
12/10/2012	5:54:40 PM	PH3 valve closed
12/10/2012	5:54:40 PM	SiCl4 pre valve closed
12/10/2012	5:54:40 PM	SiCl4 post valve closed
12/10/2012	5:54:40 PM	Bypass valve closed
12/10/2012	5:54:40 PM	Bubbler valve closed
12/10/2012	5:54:40 PM	Helium valve opened
12/10/2012	5:54:40 PM	Main Vac valve opened
12/10/2012	5:54:40 PM	Helium MFC set to  20.000000
12/10/2012	5:54:40 PM	H2 MFC set to  0.000000
12/10/2012	5:54:40 PM	BCl3 MFC set to  0.000000
12/10/2012	5:54:40 PM	PH3 MFC set to  0.000000
12/10/2012	5:54:40 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:54:40 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:54:40 PM	Tube furnace set to 0
12/10/2012	5:55:10 PM	Helium valve closed
12/10/2012	5:55:10 PM	H2 valve closed
12/10/2012	5:55:10 PM	BCl3 valve closed
12/10/2012	5:55:10 PM	PH3 valve closed
12/10/2012	5:55:10 PM	SiCl4 pre valve closed
12/10/2012	5:55:10 PM	SiCl4 post valve closed
12/10/2012	5:55:10 PM	Bypass valve closed
12/10/2012	5:55:10 PM	Bubbler valve closed
12/10/2012	5:55:10 PM	Main Vac valve opened
12/10/2012	5:55:10 PM	Helium MFC set to  0.000000
12/10/2012	5:55:10 PM	H2 MFC set to  0.000000
12/10/2012	5:55:10 PM	BCl3 MFC set to  0.000000
12/10/2012	5:55:10 PM	PH3 MFC set to  0.000000
12/10/2012	5:55:10 PM	SiCl4 MFC set to  0.000000
12/10/2012	5:55:10 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	5:55:10 PM	Tube furnace set to 0
12/10/2012	5:55:11 PM	Run finished at 5:55 PM
12/10/2012	5:55:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/10/2012	6:45:13 PM	Main Vac valve closed
12/10/2012	6:45:28 PM	Main Vac valve opened
12/10/2012	6:46:26 PM	Recipe started at 6:46 PM
12/10/2012	6:46:26 PM	Helium valve closed
12/10/2012	6:46:26 PM	H2 valve closed
12/10/2012	6:46:26 PM	BCl3 valve closed
12/10/2012	6:46:26 PM	PH3 valve closed
12/10/2012	6:46:26 PM	SiCl4 pre valve closed
12/10/2012	6:46:26 PM	SiCl4 post valve closed
12/10/2012	6:46:26 PM	Main Vac valve closed
12/10/2012	6:46:26 PM	Bypass valve closed
12/10/2012	6:46:26 PM	Bubbler valve closed
12/10/2012	6:46:26 PM	Helium MFC set to  0.000000
12/10/2012	6:46:26 PM	H2 MFC set to  0.000000
12/10/2012	6:46:26 PM	BCl3 MFC set to  0.000000
12/10/2012	6:46:26 PM	PH3 MFC set to  0.000000
12/10/2012	6:46:26 PM	SiCl4 MFC set to  0.000000
12/10/2012	6:46:26 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	6:46:26 PM	Tube furnace set to 0
12/10/2012	6:46:29 PM	Helium valve closed
12/10/2012	6:46:29 PM	BCl3 valve closed
12/10/2012	6:46:29 PM	PH3 valve closed
12/10/2012	6:46:29 PM	SiCl4 pre valve closed
12/10/2012	6:46:29 PM	SiCl4 post valve closed
12/10/2012	6:46:29 PM	Main Vac valve closed
12/10/2012	6:46:29 PM	Bypass valve closed
12/10/2012	6:46:29 PM	Bubbler valve closed
12/10/2012	6:46:29 PM	H2 valve opened
12/10/2012	6:46:29 PM	Helium MFC set to  0.000000
12/10/2012	6:46:29 PM	H2 MFC set to  500.000000
12/10/2012	6:46:29 PM	BCl3 MFC set to  0.000000
12/10/2012	6:46:29 PM	PH3 MFC set to  0.000000
12/10/2012	6:46:29 PM	SiCl4 MFC set to  0.000000
12/10/2012	6:46:29 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	6:46:29 PM	Tube furnace set to 0
12/10/2012	6:47:41 PM	Helium valve closed
12/10/2012	6:47:41 PM	BCl3 valve closed
12/10/2012	6:47:41 PM	PH3 valve closed
12/10/2012	6:47:41 PM	SiCl4 pre valve closed
12/10/2012	6:47:41 PM	SiCl4 post valve closed
12/10/2012	6:47:41 PM	Main Vac valve closed
12/10/2012	6:47:41 PM	Bypass valve closed
12/10/2012	6:47:41 PM	H2 valve opened
12/10/2012	6:47:41 PM	Bubbler valve opened
12/10/2012	6:47:41 PM	Helium MFC set to  0.000000
12/10/2012	6:47:41 PM	H2 MFC set to  500.000000
12/10/2012	6:47:41 PM	BCl3 MFC set to  0.000000
12/10/2012	6:47:41 PM	PH3 MFC set to  0.000000
12/10/2012	6:47:41 PM	SiCl4 MFC set to  0.000000
12/10/2012	6:47:41 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	6:47:42 PM	Tube furnace set to 0
12/10/2012	6:47:43 PM	Helium valve closed
12/10/2012	6:47:43 PM	BCl3 valve closed
12/10/2012	6:47:43 PM	PH3 valve closed
12/10/2012	6:47:43 PM	SiCl4 pre valve closed
12/10/2012	6:47:43 PM	SiCl4 post valve closed
12/10/2012	6:47:43 PM	Main Vac valve closed
12/10/2012	6:47:43 PM	Bypass valve closed
12/10/2012	6:47:43 PM	H2 valve opened
12/10/2012	6:47:43 PM	Bubbler valve opened
12/10/2012	6:47:43 PM	Helium MFC set to  0.000000
12/10/2012	6:47:43 PM	H2 MFC set to  500.000000
12/10/2012	6:47:43 PM	BCl3 MFC set to  0.000000
12/10/2012	6:47:43 PM	PH3 MFC set to  0.000000
12/10/2012	6:47:43 PM	SiCl4 MFC set to  0.000000
12/10/2012	6:47:43 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	6:47:43 PM	Tube furnace set to 1000
12/10/2012	7:17:43 PM	Helium valve closed
12/10/2012	7:17:43 PM	BCl3 valve closed
12/10/2012	7:17:43 PM	Main Vac valve closed
12/10/2012	7:17:43 PM	Bypass valve closed
12/10/2012	7:17:43 PM	H2 valve opened
12/10/2012	7:17:43 PM	PH3 valve opened
12/10/2012	7:17:43 PM	SiCl4 pre valve opened
12/10/2012	7:17:43 PM	SiCl4 post valve opened
12/10/2012	7:17:43 PM	Bubbler valve opened
12/10/2012	7:17:43 PM	Helium MFC set to  0.000000
12/10/2012	7:17:43 PM	H2 MFC set to  500.000000
12/10/2012	7:17:43 PM	BCl3 MFC set to  0.000000
12/10/2012	7:17:43 PM	PH3 MFC set to  0.300000
12/10/2012	7:17:43 PM	SiCl4 MFC set to  25.000000
12/10/2012	7:17:43 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	7:17:43 PM	Tube furnace set to 1000
12/10/2012	7:31:43 PM	Helium valve closed
12/10/2012	7:31:43 PM	BCl3 valve closed
12/10/2012	7:31:43 PM	PH3 valve closed
12/10/2012	7:31:43 PM	SiCl4 pre valve closed
12/10/2012	7:31:43 PM	SiCl4 post valve closed
12/10/2012	7:31:43 PM	Main Vac valve closed
12/10/2012	7:31:43 PM	Bypass valve closed
12/10/2012	7:31:43 PM	H2 valve opened
12/10/2012	7:31:43 PM	Bubbler valve opened
12/10/2012	7:31:43 PM	Helium MFC set to  0.000000
12/10/2012	7:31:43 PM	H2 MFC set to  500.000000
12/10/2012	7:31:43 PM	BCl3 MFC set to  0.000000
12/10/2012	7:31:43 PM	PH3 MFC set to  0.000000
12/10/2012	7:31:43 PM	SiCl4 MFC set to  0.000000
12/10/2012	7:31:43 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	7:31:43 PM	Tube furnace set to 750
12/10/2012	7:36:43 PM	H2 valve closed
12/10/2012	7:36:43 PM	BCl3 valve closed
12/10/2012	7:36:43 PM	PH3 valve closed
12/10/2012	7:36:43 PM	SiCl4 pre valve closed
12/10/2012	7:36:43 PM	SiCl4 post valve closed
12/10/2012	7:36:43 PM	Main Vac valve closed
12/10/2012	7:36:43 PM	Bypass valve closed
12/10/2012	7:36:43 PM	Helium valve opened
12/10/2012	7:36:43 PM	Bubbler valve opened
12/10/2012	7:36:43 PM	Helium MFC set to  500.000000
12/10/2012	7:36:43 PM	H2 MFC set to  0.000000
12/10/2012	7:36:43 PM	BCl3 MFC set to  0.000000
12/10/2012	7:36:43 PM	PH3 MFC set to  0.000000
12/10/2012	7:36:43 PM	SiCl4 MFC set to  0.000000
12/10/2012	7:36:43 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	7:36:44 PM	Tube furnace set to 0
12/10/2012	7:52:33 PM	Helium valve closed
12/10/2012	7:52:33 PM	H2 valve closed
12/10/2012	7:52:33 PM	BCl3 valve closed
12/10/2012	7:52:33 PM	PH3 valve closed
12/10/2012	7:52:33 PM	SiCl4 pre valve closed
12/10/2012	7:52:33 PM	SiCl4 post valve closed
12/10/2012	7:52:33 PM	Main Vac valve closed
12/10/2012	7:52:33 PM	Bypass valve closed
12/10/2012	7:52:33 PM	Bubbler valve closed
12/10/2012	7:52:33 PM	Helium MFC set to  0.000000
12/10/2012	7:52:33 PM	H2 MFC set to  0.000000
12/10/2012	7:52:33 PM	BCl3 MFC set to  0.000000
12/10/2012	7:52:33 PM	PH3 MFC set to  0.000000
12/10/2012	7:52:33 PM	SiCl4 MFC set to  0.000000
12/10/2012	7:52:33 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	7:52:33 PM	Tube furnace set to 0
12/10/2012	7:52:34 PM	Run finished at 7:52 PM
12/10/2012	7:55:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2012	7:55:08 PM	Recipe started at 7:55 PM
12/10/2012	7:55:08 PM	Helium valve closed
12/10/2012	7:55:08 PM	H2 valve closed
12/10/2012	7:55:08 PM	BCl3 valve closed
12/10/2012	7:55:08 PM	PH3 valve closed
12/10/2012	7:55:08 PM	SiCl4 pre valve closed
12/10/2012	7:55:08 PM	SiCl4 post valve closed
12/10/2012	7:55:08 PM	Main Vac valve closed
12/10/2012	7:55:08 PM	Bubbler valve closed
12/10/2012	7:55:08 PM	Bypass valve opened
12/10/2012	7:55:08 PM	Helium MFC set to  0.000000
12/10/2012	7:55:08 PM	H2 MFC set to  0.000000
12/10/2012	7:55:08 PM	BCl3 MFC set to  0.000000
12/10/2012	7:55:08 PM	PH3 MFC set to  0.000000
12/10/2012	7:55:08 PM	SiCl4 MFC set to  0.000000
12/10/2012	7:55:08 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	7:55:08 PM	Tube furnace set to 0
12/10/2012	7:56:13 PM	Helium valve closed
12/10/2012	7:56:13 PM	H2 valve closed
12/10/2012	7:56:13 PM	BCl3 valve closed
12/10/2012	7:56:13 PM	PH3 valve closed
12/10/2012	7:56:13 PM	SiCl4 pre valve closed
12/10/2012	7:56:13 PM	SiCl4 post valve closed
12/10/2012	7:56:13 PM	Main Vac valve closed
12/10/2012	7:56:13 PM	Bubbler valve closed
12/10/2012	7:56:13 PM	Bypass valve opened
12/10/2012	7:56:13 PM	Helium MFC set to  0.000000
12/10/2012	7:56:13 PM	H2 MFC set to  0.000000
12/10/2012	7:56:13 PM	BCl3 MFC set to  0.000000
12/10/2012	7:56:13 PM	PH3 MFC set to  0.000000
12/10/2012	7:56:13 PM	SiCl4 MFC set to  0.000000
12/10/2012	7:56:13 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	7:56:13 PM	Tube furnace set to 0
12/10/2012	7:56:27 PM	Helium valve closed
12/10/2012	7:56:27 PM	H2 valve closed
12/10/2012	7:56:27 PM	BCl3 valve closed
12/10/2012	7:56:27 PM	PH3 valve closed
12/10/2012	7:56:27 PM	SiCl4 pre valve closed
12/10/2012	7:56:27 PM	SiCl4 post valve closed
12/10/2012	7:56:27 PM	Bypass valve closed
12/10/2012	7:56:27 PM	Bubbler valve closed
12/10/2012	7:56:27 PM	Main Vac valve opened
12/10/2012	7:56:27 PM	Helium MFC set to  0.000000
12/10/2012	7:56:27 PM	H2 MFC set to  0.000000
12/10/2012	7:56:27 PM	BCl3 MFC set to  0.000000
12/10/2012	7:56:27 PM	PH3 MFC set to  0.000000
12/10/2012	7:56:27 PM	SiCl4 MFC set to  0.000000
12/10/2012	7:56:27 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	7:56:27 PM	Tube furnace set to 0
12/10/2012	7:56:28 PM	Run finished at 7:56 PM
12/10/2012	7:56:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2012	7:56:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/10/2012	7:57:06 PM	Recipe started at 7:57 PM
12/10/2012	7:57:06 PM	Helium valve closed
12/10/2012	7:57:06 PM	H2 valve closed
12/10/2012	7:57:06 PM	BCl3 valve closed
12/10/2012	7:57:06 PM	PH3 valve closed
12/10/2012	7:57:06 PM	SiCl4 pre valve closed
12/10/2012	7:57:06 PM	SiCl4 post valve closed
12/10/2012	7:57:06 PM	Main Vac valve closed
12/10/2012	7:57:06 PM	Bubbler valve closed
12/10/2012	7:57:06 PM	Bypass valve opened
12/10/2012	7:57:06 PM	Helium MFC set to  0.000000
12/10/2012	7:57:06 PM	H2 MFC set to  0.000000
12/10/2012	7:57:06 PM	BCl3 MFC set to  0.000000
12/10/2012	7:57:06 PM	PH3 MFC set to  0.000000
12/10/2012	7:57:06 PM	SiCl4 MFC set to  0.000000
12/10/2012	7:57:06 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	7:57:06 PM	Tube furnace set to 0
12/10/2012	7:57:06 PM	Helium valve closed
12/10/2012	7:57:06 PM	H2 valve closed
12/10/2012	7:57:06 PM	BCl3 valve closed
12/10/2012	7:57:06 PM	PH3 valve closed
12/10/2012	7:57:06 PM	SiCl4 pre valve closed
12/10/2012	7:57:06 PM	SiCl4 post valve closed
12/10/2012	7:57:06 PM	Main Vac valve closed
12/10/2012	7:57:06 PM	Bubbler valve closed
12/10/2012	7:57:06 PM	Bypass valve opened
12/10/2012	7:57:06 PM	Helium MFC set to  0.000000
12/10/2012	7:57:06 PM	H2 MFC set to  0.000000
12/10/2012	7:57:06 PM	BCl3 MFC set to  0.000000
12/10/2012	7:57:06 PM	PH3 MFC set to  0.000000
12/10/2012	7:57:06 PM	SiCl4 MFC set to  0.000000
12/10/2012	7:57:06 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	7:57:07 PM	Tube furnace set to 0
12/10/2012	7:57:07 PM	Helium valve closed
12/10/2012	7:57:07 PM	H2 valve closed
12/10/2012	7:57:07 PM	BCl3 valve closed
12/10/2012	7:57:07 PM	PH3 valve closed
12/10/2012	7:57:07 PM	SiCl4 pre valve closed
12/10/2012	7:57:07 PM	SiCl4 post valve closed
12/10/2012	7:57:07 PM	Bypass valve closed
12/10/2012	7:57:07 PM	Bubbler valve closed
12/10/2012	7:57:07 PM	Main Vac valve opened
12/10/2012	7:57:07 PM	Helium MFC set to  0.000000
12/10/2012	7:57:07 PM	H2 MFC set to  0.000000
12/10/2012	7:57:07 PM	BCl3 MFC set to  0.000000
12/10/2012	7:57:07 PM	PH3 MFC set to  0.000000
12/10/2012	7:57:07 PM	SiCl4 MFC set to  0.000000
12/10/2012	7:57:07 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	7:57:07 PM	Tube furnace set to 0
12/10/2012	7:57:37 PM	H2 valve closed
12/10/2012	7:57:37 PM	BCl3 valve closed
12/10/2012	7:57:37 PM	PH3 valve closed
12/10/2012	7:57:37 PM	SiCl4 pre valve closed
12/10/2012	7:57:37 PM	SiCl4 post valve closed
12/10/2012	7:57:37 PM	Bypass valve closed
12/10/2012	7:57:37 PM	Bubbler valve closed
12/10/2012	7:57:37 PM	Helium valve opened
12/10/2012	7:57:37 PM	Main Vac valve opened
12/10/2012	7:57:37 PM	Helium MFC set to  20.000000
12/10/2012	7:57:37 PM	H2 MFC set to  0.000000
12/10/2012	7:57:37 PM	BCl3 MFC set to  0.000000
12/10/2012	7:57:37 PM	PH3 MFC set to  0.000000
12/10/2012	7:57:37 PM	SiCl4 MFC set to  0.000000
12/10/2012	7:57:37 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	7:57:37 PM	Tube furnace set to 0
12/10/2012	7:58:07 PM	Helium valve closed
12/10/2012	7:58:07 PM	H2 valve closed
12/10/2012	7:58:07 PM	BCl3 valve closed
12/10/2012	7:58:07 PM	PH3 valve closed
12/10/2012	7:58:07 PM	SiCl4 pre valve closed
12/10/2012	7:58:07 PM	SiCl4 post valve closed
12/10/2012	7:58:07 PM	Bypass valve closed
12/10/2012	7:58:08 PM	Bubbler valve closed
12/10/2012	7:58:08 PM	Main Vac valve opened
12/10/2012	7:58:08 PM	Helium MFC set to  0.000000
12/10/2012	7:58:08 PM	H2 MFC set to  0.000000
12/10/2012	7:58:08 PM	BCl3 MFC set to  0.000000
12/10/2012	7:58:08 PM	PH3 MFC set to  0.000000
12/10/2012	7:58:08 PM	SiCl4 MFC set to  0.000000
12/10/2012	7:58:08 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	7:58:08 PM	Tube furnace set to 0
12/10/2012	7:58:38 PM	H2 valve closed
12/10/2012	7:58:38 PM	BCl3 valve closed
12/10/2012	7:58:38 PM	PH3 valve closed
12/10/2012	7:58:38 PM	SiCl4 pre valve closed
12/10/2012	7:58:38 PM	SiCl4 post valve closed
12/10/2012	7:58:38 PM	Bypass valve closed
12/10/2012	7:58:38 PM	Bubbler valve closed
12/10/2012	7:58:38 PM	Helium valve opened
12/10/2012	7:58:38 PM	Main Vac valve opened
12/10/2012	7:58:38 PM	Helium MFC set to  20.000000
12/10/2012	7:58:38 PM	H2 MFC set to  0.000000
12/10/2012	7:58:38 PM	BCl3 MFC set to  0.000000
12/10/2012	7:58:38 PM	PH3 MFC set to  0.000000
12/10/2012	7:58:38 PM	SiCl4 MFC set to  0.000000
12/10/2012	7:58:38 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	7:58:38 PM	Tube furnace set to 0
12/10/2012	7:59:08 PM	Helium valve closed
12/10/2012	7:59:08 PM	H2 valve closed
12/10/2012	7:59:08 PM	BCl3 valve closed
12/10/2012	7:59:08 PM	PH3 valve closed
12/10/2012	7:59:08 PM	SiCl4 pre valve closed
12/10/2012	7:59:08 PM	SiCl4 post valve closed
12/10/2012	7:59:08 PM	Bypass valve closed
12/10/2012	7:59:08 PM	Bubbler valve closed
12/10/2012	7:59:08 PM	Main Vac valve opened
12/10/2012	7:59:08 PM	Helium MFC set to  0.000000
12/10/2012	7:59:08 PM	H2 MFC set to  0.000000
12/10/2012	7:59:08 PM	BCl3 MFC set to  0.000000
12/10/2012	7:59:08 PM	PH3 MFC set to  0.000000
12/10/2012	7:59:08 PM	SiCl4 MFC set to  0.000000
12/10/2012	7:59:08 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	7:59:08 PM	Tube furnace set to 0
12/10/2012	7:59:38 PM	H2 valve closed
12/10/2012	7:59:38 PM	BCl3 valve closed
12/10/2012	7:59:38 PM	PH3 valve closed
12/10/2012	7:59:38 PM	SiCl4 pre valve closed
12/10/2012	7:59:38 PM	SiCl4 post valve closed
12/10/2012	7:59:38 PM	Bypass valve closed
12/10/2012	7:59:38 PM	Bubbler valve closed
12/10/2012	7:59:38 PM	Helium valve opened
12/10/2012	7:59:38 PM	Main Vac valve opened
12/10/2012	7:59:38 PM	Helium MFC set to  20.000000
12/10/2012	7:59:38 PM	H2 MFC set to  0.000000
12/10/2012	7:59:38 PM	BCl3 MFC set to  0.000000
12/10/2012	7:59:38 PM	PH3 MFC set to  0.000000
12/10/2012	7:59:38 PM	SiCl4 MFC set to  0.000000
12/10/2012	7:59:38 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	7:59:38 PM	Tube furnace set to 0
12/10/2012	8:00:09 PM	Helium valve closed
12/10/2012	8:00:09 PM	H2 valve closed
12/10/2012	8:00:09 PM	BCl3 valve closed
12/10/2012	8:00:09 PM	PH3 valve closed
12/10/2012	8:00:09 PM	SiCl4 pre valve closed
12/10/2012	8:00:09 PM	SiCl4 post valve closed
12/10/2012	8:00:09 PM	Bypass valve closed
12/10/2012	8:00:09 PM	Bubbler valve closed
12/10/2012	8:00:09 PM	Main Vac valve opened
12/10/2012	8:00:09 PM	Helium MFC set to  0.000000
12/10/2012	8:00:09 PM	H2 MFC set to  0.000000
12/10/2012	8:00:09 PM	BCl3 MFC set to  0.000000
12/10/2012	8:00:09 PM	PH3 MFC set to  0.000000
12/10/2012	8:00:09 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:00:09 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:00:09 PM	Tube furnace set to 0
12/10/2012	8:00:39 PM	H2 valve closed
12/10/2012	8:00:39 PM	BCl3 valve closed
12/10/2012	8:00:39 PM	PH3 valve closed
12/10/2012	8:00:39 PM	SiCl4 pre valve closed
12/10/2012	8:00:39 PM	SiCl4 post valve closed
12/10/2012	8:00:39 PM	Bypass valve closed
12/10/2012	8:00:39 PM	Bubbler valve closed
12/10/2012	8:00:39 PM	Helium valve opened
12/10/2012	8:00:39 PM	Main Vac valve opened
12/10/2012	8:00:39 PM	Helium MFC set to  20.000000
12/10/2012	8:00:39 PM	H2 MFC set to  0.000000
12/10/2012	8:00:39 PM	BCl3 MFC set to  0.000000
12/10/2012	8:00:39 PM	PH3 MFC set to  0.000000
12/10/2012	8:00:39 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:00:39 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:00:39 PM	Tube furnace set to 0
12/10/2012	8:01:09 PM	Helium valve closed
12/10/2012	8:01:09 PM	H2 valve closed
12/10/2012	8:01:09 PM	BCl3 valve closed
12/10/2012	8:01:09 PM	PH3 valve closed
12/10/2012	8:01:09 PM	SiCl4 pre valve closed
12/10/2012	8:01:09 PM	SiCl4 post valve closed
12/10/2012	8:01:09 PM	Bypass valve closed
12/10/2012	8:01:09 PM	Bubbler valve closed
12/10/2012	8:01:09 PM	Main Vac valve opened
12/10/2012	8:01:09 PM	Helium MFC set to  0.000000
12/10/2012	8:01:09 PM	H2 MFC set to  0.000000
12/10/2012	8:01:09 PM	BCl3 MFC set to  0.000000
12/10/2012	8:01:09 PM	PH3 MFC set to  0.000000
12/10/2012	8:01:09 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:01:09 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:01:09 PM	Tube furnace set to 0
12/10/2012	8:01:39 PM	H2 valve closed
12/10/2012	8:01:39 PM	BCl3 valve closed
12/10/2012	8:01:39 PM	PH3 valve closed
12/10/2012	8:01:39 PM	SiCl4 pre valve closed
12/10/2012	8:01:39 PM	SiCl4 post valve closed
12/10/2012	8:01:39 PM	Bypass valve closed
12/10/2012	8:01:39 PM	Bubbler valve closed
12/10/2012	8:01:39 PM	Helium valve opened
12/10/2012	8:01:39 PM	Main Vac valve opened
12/10/2012	8:01:39 PM	Helium MFC set to  20.000000
12/10/2012	8:01:39 PM	H2 MFC set to  0.000000
12/10/2012	8:01:39 PM	BCl3 MFC set to  0.000000
12/10/2012	8:01:39 PM	PH3 MFC set to  0.000000
12/10/2012	8:01:39 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:01:39 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:01:40 PM	Tube furnace set to 0
12/10/2012	8:02:10 PM	Helium valve closed
12/10/2012	8:02:10 PM	H2 valve closed
12/10/2012	8:02:10 PM	BCl3 valve closed
12/10/2012	8:02:10 PM	PH3 valve closed
12/10/2012	8:02:10 PM	SiCl4 pre valve closed
12/10/2012	8:02:10 PM	SiCl4 post valve closed
12/10/2012	8:02:10 PM	Bypass valve closed
12/10/2012	8:02:10 PM	Bubbler valve closed
12/10/2012	8:02:10 PM	Main Vac valve opened
12/10/2012	8:02:10 PM	Helium MFC set to  0.000000
12/10/2012	8:02:10 PM	H2 MFC set to  0.000000
12/10/2012	8:02:10 PM	BCl3 MFC set to  0.000000
12/10/2012	8:02:10 PM	PH3 MFC set to  0.000000
12/10/2012	8:02:10 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:02:10 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:02:10 PM	Tube furnace set to 0
12/10/2012	8:02:40 PM	H2 valve closed
12/10/2012	8:02:40 PM	BCl3 valve closed
12/10/2012	8:02:40 PM	PH3 valve closed
12/10/2012	8:02:40 PM	SiCl4 pre valve closed
12/10/2012	8:02:40 PM	SiCl4 post valve closed
12/10/2012	8:02:40 PM	Bypass valve closed
12/10/2012	8:02:40 PM	Bubbler valve closed
12/10/2012	8:02:40 PM	Helium valve opened
12/10/2012	8:02:40 PM	Main Vac valve opened
12/10/2012	8:02:40 PM	Helium MFC set to  20.000000
12/10/2012	8:02:40 PM	H2 MFC set to  0.000000
12/10/2012	8:02:40 PM	BCl3 MFC set to  0.000000
12/10/2012	8:02:40 PM	PH3 MFC set to  0.000000
12/10/2012	8:02:40 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:02:40 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:02:40 PM	Tube furnace set to 0
12/10/2012	8:03:10 PM	Helium valve closed
12/10/2012	8:03:10 PM	H2 valve closed
12/10/2012	8:03:10 PM	BCl3 valve closed
12/10/2012	8:03:10 PM	PH3 valve closed
12/10/2012	8:03:10 PM	SiCl4 pre valve closed
12/10/2012	8:03:10 PM	SiCl4 post valve closed
12/10/2012	8:03:10 PM	Bypass valve closed
12/10/2012	8:03:10 PM	Bubbler valve closed
12/10/2012	8:03:10 PM	Main Vac valve opened
12/10/2012	8:03:10 PM	Helium MFC set to  0.000000
12/10/2012	8:03:10 PM	H2 MFC set to  0.000000
12/10/2012	8:03:10 PM	BCl3 MFC set to  0.000000
12/10/2012	8:03:10 PM	PH3 MFC set to  0.000000
12/10/2012	8:03:10 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:03:10 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:03:10 PM	Tube furnace set to 0
12/10/2012	8:03:40 PM	H2 valve closed
12/10/2012	8:03:40 PM	BCl3 valve closed
12/10/2012	8:03:40 PM	PH3 valve closed
12/10/2012	8:03:40 PM	SiCl4 pre valve closed
12/10/2012	8:03:40 PM	SiCl4 post valve closed
12/10/2012	8:03:40 PM	Bypass valve closed
12/10/2012	8:03:40 PM	Bubbler valve closed
12/10/2012	8:03:40 PM	Helium valve opened
12/10/2012	8:03:40 PM	Main Vac valve opened
12/10/2012	8:03:40 PM	Helium MFC set to  20.000000
12/10/2012	8:03:40 PM	H2 MFC set to  0.000000
12/10/2012	8:03:40 PM	BCl3 MFC set to  0.000000
12/10/2012	8:03:40 PM	PH3 MFC set to  0.000000
12/10/2012	8:03:40 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:03:40 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:03:41 PM	Tube furnace set to 0
12/10/2012	8:04:11 PM	Helium valve closed
12/10/2012	8:04:11 PM	H2 valve closed
12/10/2012	8:04:11 PM	BCl3 valve closed
12/10/2012	8:04:11 PM	PH3 valve closed
12/10/2012	8:04:11 PM	SiCl4 pre valve closed
12/10/2012	8:04:11 PM	SiCl4 post valve closed
12/10/2012	8:04:11 PM	Bypass valve closed
12/10/2012	8:04:11 PM	Bubbler valve closed
12/10/2012	8:04:11 PM	Main Vac valve opened
12/10/2012	8:04:11 PM	Helium MFC set to  0.000000
12/10/2012	8:04:11 PM	H2 MFC set to  0.000000
12/10/2012	8:04:11 PM	BCl3 MFC set to  0.000000
12/10/2012	8:04:11 PM	PH3 MFC set to  0.000000
12/10/2012	8:04:11 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:04:11 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:04:11 PM	Tube furnace set to 0
12/10/2012	8:04:41 PM	H2 valve closed
12/10/2012	8:04:41 PM	BCl3 valve closed
12/10/2012	8:04:41 PM	PH3 valve closed
12/10/2012	8:04:41 PM	SiCl4 pre valve closed
12/10/2012	8:04:41 PM	SiCl4 post valve closed
12/10/2012	8:04:41 PM	Bypass valve closed
12/10/2012	8:04:41 PM	Bubbler valve closed
12/10/2012	8:04:41 PM	Helium valve opened
12/10/2012	8:04:41 PM	Main Vac valve opened
12/10/2012	8:04:41 PM	Helium MFC set to  20.000000
12/10/2012	8:04:41 PM	H2 MFC set to  0.000000
12/10/2012	8:04:41 PM	BCl3 MFC set to  0.000000
12/10/2012	8:04:41 PM	PH3 MFC set to  0.000000
12/10/2012	8:04:41 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:04:41 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:04:41 PM	Tube furnace set to 0
12/10/2012	8:05:11 PM	Helium valve closed
12/10/2012	8:05:11 PM	H2 valve closed
12/10/2012	8:05:11 PM	BCl3 valve closed
12/10/2012	8:05:11 PM	PH3 valve closed
12/10/2012	8:05:11 PM	SiCl4 pre valve closed
12/10/2012	8:05:11 PM	SiCl4 post valve closed
12/10/2012	8:05:11 PM	Bypass valve closed
12/10/2012	8:05:11 PM	Bubbler valve closed
12/10/2012	8:05:11 PM	Main Vac valve opened
12/10/2012	8:05:11 PM	Helium MFC set to  0.000000
12/10/2012	8:05:11 PM	H2 MFC set to  0.000000
12/10/2012	8:05:11 PM	BCl3 MFC set to  0.000000
12/10/2012	8:05:11 PM	PH3 MFC set to  0.000000
12/10/2012	8:05:11 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:05:11 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:05:11 PM	Tube furnace set to 0
12/10/2012	8:05:41 PM	H2 valve closed
12/10/2012	8:05:41 PM	BCl3 valve closed
12/10/2012	8:05:41 PM	PH3 valve closed
12/10/2012	8:05:41 PM	SiCl4 pre valve closed
12/10/2012	8:05:41 PM	SiCl4 post valve closed
12/10/2012	8:05:41 PM	Bypass valve closed
12/10/2012	8:05:42 PM	Bubbler valve closed
12/10/2012	8:05:42 PM	Helium valve opened
12/10/2012	8:05:42 PM	Main Vac valve opened
12/10/2012	8:05:42 PM	Helium MFC set to  20.000000
12/10/2012	8:05:42 PM	H2 MFC set to  0.000000
12/10/2012	8:05:42 PM	BCl3 MFC set to  0.000000
12/10/2012	8:05:42 PM	PH3 MFC set to  0.000000
12/10/2012	8:05:42 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:05:42 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:05:42 PM	Tube furnace set to 0
12/10/2012	8:06:12 PM	Helium valve closed
12/10/2012	8:06:12 PM	H2 valve closed
12/10/2012	8:06:12 PM	BCl3 valve closed
12/10/2012	8:06:12 PM	PH3 valve closed
12/10/2012	8:06:12 PM	SiCl4 pre valve closed
12/10/2012	8:06:12 PM	SiCl4 post valve closed
12/10/2012	8:06:12 PM	Bypass valve closed
12/10/2012	8:06:12 PM	Bubbler valve closed
12/10/2012	8:06:12 PM	Main Vac valve opened
12/10/2012	8:06:12 PM	Helium MFC set to  0.000000
12/10/2012	8:06:12 PM	H2 MFC set to  0.000000
12/10/2012	8:06:12 PM	BCl3 MFC set to  0.000000
12/10/2012	8:06:12 PM	PH3 MFC set to  0.000000
12/10/2012	8:06:12 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:06:12 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:06:12 PM	Tube furnace set to 0
12/10/2012	8:06:42 PM	H2 valve closed
12/10/2012	8:06:42 PM	BCl3 valve closed
12/10/2012	8:06:42 PM	PH3 valve closed
12/10/2012	8:06:42 PM	SiCl4 pre valve closed
12/10/2012	8:06:42 PM	SiCl4 post valve closed
12/10/2012	8:06:42 PM	Bypass valve closed
12/10/2012	8:06:42 PM	Bubbler valve closed
12/10/2012	8:06:42 PM	Helium valve opened
12/10/2012	8:06:42 PM	Main Vac valve opened
12/10/2012	8:06:42 PM	Helium MFC set to  20.000000
12/10/2012	8:06:42 PM	H2 MFC set to  0.000000
12/10/2012	8:06:42 PM	BCl3 MFC set to  0.000000
12/10/2012	8:06:42 PM	PH3 MFC set to  0.000000
12/10/2012	8:06:42 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:06:42 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:06:42 PM	Tube furnace set to 0
12/10/2012	8:07:12 PM	Helium valve closed
12/10/2012	8:07:12 PM	H2 valve closed
12/10/2012	8:07:12 PM	BCl3 valve closed
12/10/2012	8:07:12 PM	PH3 valve closed
12/10/2012	8:07:12 PM	SiCl4 pre valve closed
12/10/2012	8:07:12 PM	SiCl4 post valve closed
12/10/2012	8:07:12 PM	Bypass valve closed
12/10/2012	8:07:12 PM	Bubbler valve closed
12/10/2012	8:07:12 PM	Main Vac valve opened
12/10/2012	8:07:12 PM	Helium MFC set to  0.000000
12/10/2012	8:07:12 PM	H2 MFC set to  0.000000
12/10/2012	8:07:12 PM	BCl3 MFC set to  0.000000
12/10/2012	8:07:12 PM	PH3 MFC set to  0.000000
12/10/2012	8:07:12 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:07:12 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:07:13 PM	Tube furnace set to 0
12/10/2012	8:07:14 PM	Run finished at 8:07 PM
12/10/2012	8:07:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/10/2012	8:07:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/10/2012	8:08:02 PM	Recipe started at 8:07 PM
12/10/2012	8:08:02 PM	Helium valve closed
12/10/2012	8:08:02 PM	H2 valve closed
12/10/2012	8:08:02 PM	BCl3 valve closed
12/10/2012	8:08:02 PM	PH3 valve closed
12/10/2012	8:08:02 PM	SiCl4 pre valve closed
12/10/2012	8:08:02 PM	SiCl4 post valve closed
12/10/2012	8:08:02 PM	Main Vac valve closed
12/10/2012	8:08:02 PM	Bubbler valve closed
12/10/2012	8:08:02 PM	Bypass valve opened
12/10/2012	8:08:02 PM	Helium MFC set to  0.000000
12/10/2012	8:08:02 PM	H2 MFC set to  0.000000
12/10/2012	8:08:02 PM	BCl3 MFC set to  0.000000
12/10/2012	8:08:02 PM	PH3 MFC set to  0.000000
12/10/2012	8:08:02 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:08:02 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:08:03 PM	Tube furnace set to 0
12/10/2012	8:08:03 PM	Helium valve closed
12/10/2012	8:08:03 PM	H2 valve closed
12/10/2012	8:08:03 PM	BCl3 valve closed
12/10/2012	8:08:03 PM	PH3 valve closed
12/10/2012	8:08:03 PM	SiCl4 pre valve closed
12/10/2012	8:08:03 PM	SiCl4 post valve closed
12/10/2012	8:08:03 PM	Main Vac valve closed
12/10/2012	8:08:03 PM	Bubbler valve closed
12/10/2012	8:08:03 PM	Bypass valve opened
12/10/2012	8:08:03 PM	Helium MFC set to  0.000000
12/10/2012	8:08:03 PM	H2 MFC set to  0.000000
12/10/2012	8:08:03 PM	BCl3 MFC set to  0.000000
12/10/2012	8:08:03 PM	PH3 MFC set to  0.000000
12/10/2012	8:08:03 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:08:03 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:08:03 PM	Tube furnace set to 0
12/10/2012	8:08:03 PM	Helium valve closed
12/10/2012	8:08:03 PM	H2 valve closed
12/10/2012	8:08:03 PM	BCl3 valve closed
12/10/2012	8:08:03 PM	PH3 valve closed
12/10/2012	8:08:03 PM	SiCl4 pre valve closed
12/10/2012	8:08:03 PM	SiCl4 post valve closed
12/10/2012	8:08:03 PM	Bypass valve closed
12/10/2012	8:08:03 PM	Bubbler valve closed
12/10/2012	8:08:03 PM	Main Vac valve opened
12/10/2012	8:08:03 PM	Helium MFC set to  0.000000
12/10/2012	8:08:03 PM	H2 MFC set to  0.000000
12/10/2012	8:08:03 PM	BCl3 MFC set to  0.000000
12/10/2012	8:08:03 PM	PH3 MFC set to  0.000000
12/10/2012	8:08:03 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:08:03 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:08:04 PM	Tube furnace set to 0
12/10/2012	8:08:34 PM	H2 valve closed
12/10/2012	8:08:34 PM	BCl3 valve closed
12/10/2012	8:08:34 PM	PH3 valve closed
12/10/2012	8:08:34 PM	SiCl4 pre valve closed
12/10/2012	8:08:34 PM	SiCl4 post valve closed
12/10/2012	8:08:34 PM	Bypass valve closed
12/10/2012	8:08:34 PM	Bubbler valve closed
12/10/2012	8:08:34 PM	Helium valve opened
12/10/2012	8:08:34 PM	Main Vac valve opened
12/10/2012	8:08:34 PM	Helium MFC set to  20.000000
12/10/2012	8:08:34 PM	H2 MFC set to  0.000000
12/10/2012	8:08:34 PM	BCl3 MFC set to  0.000000
12/10/2012	8:08:34 PM	PH3 MFC set to  0.000000
12/10/2012	8:08:34 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:08:34 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:08:34 PM	Tube furnace set to 0
12/10/2012	8:09:04 PM	Helium valve closed
12/10/2012	8:09:04 PM	H2 valve closed
12/10/2012	8:09:04 PM	BCl3 valve closed
12/10/2012	8:09:04 PM	PH3 valve closed
12/10/2012	8:09:04 PM	SiCl4 pre valve closed
12/10/2012	8:09:04 PM	SiCl4 post valve closed
12/10/2012	8:09:04 PM	Bypass valve closed
12/10/2012	8:09:04 PM	Bubbler valve closed
12/10/2012	8:09:04 PM	Main Vac valve opened
12/10/2012	8:09:04 PM	Helium MFC set to  0.000000
12/10/2012	8:09:04 PM	H2 MFC set to  0.000000
12/10/2012	8:09:04 PM	BCl3 MFC set to  0.000000
12/10/2012	8:09:04 PM	PH3 MFC set to  0.000000
12/10/2012	8:09:04 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:09:04 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:09:04 PM	Tube furnace set to 0
12/10/2012	8:09:34 PM	H2 valve closed
12/10/2012	8:09:34 PM	BCl3 valve closed
12/10/2012	8:09:34 PM	PH3 valve closed
12/10/2012	8:09:34 PM	SiCl4 pre valve closed
12/10/2012	8:09:34 PM	SiCl4 post valve closed
12/10/2012	8:09:34 PM	Bypass valve closed
12/10/2012	8:09:34 PM	Bubbler valve closed
12/10/2012	8:09:34 PM	Helium valve opened
12/10/2012	8:09:34 PM	Main Vac valve opened
12/10/2012	8:09:34 PM	Helium MFC set to  20.000000
12/10/2012	8:09:34 PM	H2 MFC set to  0.000000
12/10/2012	8:09:34 PM	BCl3 MFC set to  0.000000
12/10/2012	8:09:34 PM	PH3 MFC set to  0.000000
12/10/2012	8:09:34 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:09:34 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:09:34 PM	Tube furnace set to 0
12/10/2012	8:10:04 PM	Helium valve closed
12/10/2012	8:10:04 PM	H2 valve closed
12/10/2012	8:10:04 PM	BCl3 valve closed
12/10/2012	8:10:04 PM	PH3 valve closed
12/10/2012	8:10:04 PM	SiCl4 pre valve closed
12/10/2012	8:10:04 PM	SiCl4 post valve closed
12/10/2012	8:10:04 PM	Bypass valve closed
12/10/2012	8:10:04 PM	Bubbler valve closed
12/10/2012	8:10:04 PM	Main Vac valve opened
12/10/2012	8:10:04 PM	Helium MFC set to  0.000000
12/10/2012	8:10:04 PM	H2 MFC set to  0.000000
12/10/2012	8:10:04 PM	BCl3 MFC set to  0.000000
12/10/2012	8:10:04 PM	PH3 MFC set to  0.000000
12/10/2012	8:10:05 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:10:05 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:10:05 PM	Tube furnace set to 0
12/10/2012	8:10:35 PM	H2 valve closed
12/10/2012	8:10:35 PM	BCl3 valve closed
12/10/2012	8:10:35 PM	PH3 valve closed
12/10/2012	8:10:35 PM	SiCl4 pre valve closed
12/10/2012	8:10:35 PM	SiCl4 post valve closed
12/10/2012	8:10:35 PM	Bypass valve closed
12/10/2012	8:10:35 PM	Bubbler valve closed
12/10/2012	8:10:35 PM	Helium valve opened
12/10/2012	8:10:35 PM	Main Vac valve opened
12/10/2012	8:10:35 PM	Helium MFC set to  20.000000
12/10/2012	8:10:35 PM	H2 MFC set to  0.000000
12/10/2012	8:10:35 PM	BCl3 MFC set to  0.000000
12/10/2012	8:10:35 PM	PH3 MFC set to  0.000000
12/10/2012	8:10:35 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:10:35 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:10:35 PM	Tube furnace set to 0
12/10/2012	8:11:05 PM	Helium valve closed
12/10/2012	8:11:05 PM	H2 valve closed
12/10/2012	8:11:05 PM	BCl3 valve closed
12/10/2012	8:11:05 PM	PH3 valve closed
12/10/2012	8:11:05 PM	SiCl4 pre valve closed
12/10/2012	8:11:05 PM	SiCl4 post valve closed
12/10/2012	8:11:05 PM	Bypass valve closed
12/10/2012	8:11:05 PM	Bubbler valve closed
12/10/2012	8:11:05 PM	Main Vac valve opened
12/10/2012	8:11:05 PM	Helium MFC set to  0.000000
12/10/2012	8:11:05 PM	H2 MFC set to  0.000000
12/10/2012	8:11:05 PM	BCl3 MFC set to  0.000000
12/10/2012	8:11:05 PM	PH3 MFC set to  0.000000
12/10/2012	8:11:05 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:11:05 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:11:05 PM	Tube furnace set to 0
12/10/2012	8:11:35 PM	H2 valve closed
12/10/2012	8:11:35 PM	BCl3 valve closed
12/10/2012	8:11:35 PM	PH3 valve closed
12/10/2012	8:11:35 PM	SiCl4 pre valve closed
12/10/2012	8:11:35 PM	SiCl4 post valve closed
12/10/2012	8:11:35 PM	Bypass valve closed
12/10/2012	8:11:35 PM	Bubbler valve closed
12/10/2012	8:11:35 PM	Helium valve opened
12/10/2012	8:11:35 PM	Main Vac valve opened
12/10/2012	8:11:35 PM	Helium MFC set to  20.000000
12/10/2012	8:11:35 PM	H2 MFC set to  0.000000
12/10/2012	8:11:35 PM	BCl3 MFC set to  0.000000
12/10/2012	8:11:35 PM	PH3 MFC set to  0.000000
12/10/2012	8:11:35 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:11:35 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:11:35 PM	Tube furnace set to 0
12/10/2012	8:12:05 PM	Helium valve closed
12/10/2012	8:12:05 PM	H2 valve closed
12/10/2012	8:12:05 PM	BCl3 valve closed
12/10/2012	8:12:06 PM	PH3 valve closed
12/10/2012	8:12:06 PM	SiCl4 pre valve closed
12/10/2012	8:12:06 PM	SiCl4 post valve closed
12/10/2012	8:12:06 PM	Bypass valve closed
12/10/2012	8:12:06 PM	Bubbler valve closed
12/10/2012	8:12:06 PM	Main Vac valve opened
12/10/2012	8:12:06 PM	Helium MFC set to  0.000000
12/10/2012	8:12:06 PM	H2 MFC set to  0.000000
12/10/2012	8:12:06 PM	BCl3 MFC set to  0.000000
12/10/2012	8:12:06 PM	PH3 MFC set to  0.000000
12/10/2012	8:12:06 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:12:06 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:12:06 PM	Tube furnace set to 0
12/10/2012	8:12:36 PM	H2 valve closed
12/10/2012	8:12:36 PM	BCl3 valve closed
12/10/2012	8:12:36 PM	PH3 valve closed
12/10/2012	8:12:36 PM	SiCl4 pre valve closed
12/10/2012	8:12:36 PM	SiCl4 post valve closed
12/10/2012	8:12:36 PM	Bypass valve closed
12/10/2012	8:12:36 PM	Bubbler valve closed
12/10/2012	8:12:36 PM	Helium valve opened
12/10/2012	8:12:36 PM	Main Vac valve opened
12/10/2012	8:12:36 PM	Helium MFC set to  20.000000
12/10/2012	8:12:36 PM	H2 MFC set to  0.000000
12/10/2012	8:12:36 PM	BCl3 MFC set to  0.000000
12/10/2012	8:12:36 PM	PH3 MFC set to  0.000000
12/10/2012	8:12:36 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:12:36 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:12:36 PM	Tube furnace set to 0
12/10/2012	8:13:06 PM	Helium valve closed
12/10/2012	8:13:06 PM	H2 valve closed
12/10/2012	8:13:06 PM	BCl3 valve closed
12/10/2012	8:13:06 PM	PH3 valve closed
12/10/2012	8:13:06 PM	SiCl4 pre valve closed
12/10/2012	8:13:06 PM	SiCl4 post valve closed
12/10/2012	8:13:06 PM	Bypass valve closed
12/10/2012	8:13:06 PM	Bubbler valve closed
12/10/2012	8:13:06 PM	Main Vac valve opened
12/10/2012	8:13:06 PM	Helium MFC set to  0.000000
12/10/2012	8:13:06 PM	H2 MFC set to  0.000000
12/10/2012	8:13:06 PM	BCl3 MFC set to  0.000000
12/10/2012	8:13:06 PM	PH3 MFC set to  0.000000
12/10/2012	8:13:06 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:13:06 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:13:06 PM	Tube furnace set to 0
12/10/2012	8:13:36 PM	H2 valve closed
12/10/2012	8:13:36 PM	BCl3 valve closed
12/10/2012	8:13:36 PM	PH3 valve closed
12/10/2012	8:13:36 PM	SiCl4 pre valve closed
12/10/2012	8:13:36 PM	SiCl4 post valve closed
12/10/2012	8:13:36 PM	Bypass valve closed
12/10/2012	8:13:36 PM	Bubbler valve closed
12/10/2012	8:13:36 PM	Helium valve opened
12/10/2012	8:13:36 PM	Main Vac valve opened
12/10/2012	8:13:36 PM	Helium MFC set to  20.000000
12/10/2012	8:13:36 PM	H2 MFC set to  0.000000
12/10/2012	8:13:36 PM	BCl3 MFC set to  0.000000
12/10/2012	8:13:36 PM	PH3 MFC set to  0.000000
12/10/2012	8:13:36 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:13:36 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:13:37 PM	Tube furnace set to 0
12/10/2012	8:14:07 PM	Helium valve closed
12/10/2012	8:14:07 PM	H2 valve closed
12/10/2012	8:14:07 PM	BCl3 valve closed
12/10/2012	8:14:07 PM	PH3 valve closed
12/10/2012	8:14:07 PM	SiCl4 pre valve closed
12/10/2012	8:14:07 PM	SiCl4 post valve closed
12/10/2012	8:14:07 PM	Bypass valve closed
12/10/2012	8:14:07 PM	Bubbler valve closed
12/10/2012	8:14:07 PM	Main Vac valve opened
12/10/2012	8:14:07 PM	Helium MFC set to  0.000000
12/10/2012	8:14:07 PM	H2 MFC set to  0.000000
12/10/2012	8:14:07 PM	BCl3 MFC set to  0.000000
12/10/2012	8:14:07 PM	PH3 MFC set to  0.000000
12/10/2012	8:14:07 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:14:07 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:14:07 PM	Tube furnace set to 0
12/10/2012	8:14:37 PM	H2 valve closed
12/10/2012	8:14:37 PM	BCl3 valve closed
12/10/2012	8:14:37 PM	PH3 valve closed
12/10/2012	8:14:37 PM	SiCl4 pre valve closed
12/10/2012	8:14:37 PM	SiCl4 post valve closed
12/10/2012	8:14:37 PM	Bypass valve closed
12/10/2012	8:14:37 PM	Bubbler valve closed
12/10/2012	8:14:37 PM	Helium valve opened
12/10/2012	8:14:37 PM	Main Vac valve opened
12/10/2012	8:14:37 PM	Helium MFC set to  20.000000
12/10/2012	8:14:37 PM	H2 MFC set to  0.000000
12/10/2012	8:14:37 PM	BCl3 MFC set to  0.000000
12/10/2012	8:14:37 PM	PH3 MFC set to  0.000000
12/10/2012	8:14:37 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:14:37 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:14:37 PM	Tube furnace set to 0
12/10/2012	8:15:07 PM	Helium valve closed
12/10/2012	8:15:07 PM	H2 valve closed
12/10/2012	8:15:07 PM	BCl3 valve closed
12/10/2012	8:15:07 PM	PH3 valve closed
12/10/2012	8:15:07 PM	SiCl4 pre valve closed
12/10/2012	8:15:07 PM	SiCl4 post valve closed
12/10/2012	8:15:07 PM	Bypass valve closed
12/10/2012	8:15:07 PM	Bubbler valve closed
12/10/2012	8:15:07 PM	Main Vac valve opened
12/10/2012	8:15:07 PM	Helium MFC set to  0.000000
12/10/2012	8:15:07 PM	H2 MFC set to  0.000000
12/10/2012	8:15:07 PM	BCl3 MFC set to  0.000000
12/10/2012	8:15:07 PM	PH3 MFC set to  0.000000
12/10/2012	8:15:07 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:15:07 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:15:07 PM	Tube furnace set to 0
12/10/2012	8:15:37 PM	H2 valve closed
12/10/2012	8:15:37 PM	BCl3 valve closed
12/10/2012	8:15:37 PM	PH3 valve closed
12/10/2012	8:15:37 PM	SiCl4 pre valve closed
12/10/2012	8:15:37 PM	SiCl4 post valve closed
12/10/2012	8:15:37 PM	Bypass valve closed
12/10/2012	8:15:37 PM	Bubbler valve closed
12/10/2012	8:15:37 PM	Helium valve opened
12/10/2012	8:15:37 PM	Main Vac valve opened
12/10/2012	8:15:37 PM	Helium MFC set to  20.000000
12/10/2012	8:15:37 PM	H2 MFC set to  0.000000
12/10/2012	8:15:37 PM	BCl3 MFC set to  0.000000
12/10/2012	8:15:37 PM	PH3 MFC set to  0.000000
12/10/2012	8:15:37 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:15:37 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:15:38 PM	Tube furnace set to 0
12/10/2012	8:16:08 PM	Helium valve closed
12/10/2012	8:16:08 PM	H2 valve closed
12/10/2012	8:16:08 PM	BCl3 valve closed
12/10/2012	8:16:08 PM	PH3 valve closed
12/10/2012	8:16:08 PM	SiCl4 pre valve closed
12/10/2012	8:16:08 PM	SiCl4 post valve closed
12/10/2012	8:16:08 PM	Bypass valve closed
12/10/2012	8:16:08 PM	Bubbler valve closed
12/10/2012	8:16:08 PM	Main Vac valve opened
12/10/2012	8:16:08 PM	Helium MFC set to  0.000000
12/10/2012	8:16:08 PM	H2 MFC set to  0.000000
12/10/2012	8:16:08 PM	BCl3 MFC set to  0.000000
12/10/2012	8:16:08 PM	PH3 MFC set to  0.000000
12/10/2012	8:16:08 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:16:08 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:16:08 PM	Tube furnace set to 0
12/10/2012	8:16:38 PM	H2 valve closed
12/10/2012	8:16:38 PM	BCl3 valve closed
12/10/2012	8:16:38 PM	PH3 valve closed
12/10/2012	8:16:38 PM	SiCl4 pre valve closed
12/10/2012	8:16:38 PM	SiCl4 post valve closed
12/10/2012	8:16:38 PM	Bypass valve closed
12/10/2012	8:16:38 PM	Bubbler valve closed
12/10/2012	8:16:38 PM	Helium valve opened
12/10/2012	8:16:38 PM	Main Vac valve opened
12/10/2012	8:16:38 PM	Helium MFC set to  20.000000
12/10/2012	8:16:38 PM	H2 MFC set to  0.000000
12/10/2012	8:16:38 PM	BCl3 MFC set to  0.000000
12/10/2012	8:16:38 PM	PH3 MFC set to  0.000000
12/10/2012	8:16:38 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:16:38 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:16:38 PM	Tube furnace set to 0
12/10/2012	8:17:08 PM	Helium valve closed
12/10/2012	8:17:08 PM	H2 valve closed
12/10/2012	8:17:08 PM	BCl3 valve closed
12/10/2012	8:17:08 PM	PH3 valve closed
12/10/2012	8:17:08 PM	SiCl4 pre valve closed
12/10/2012	8:17:08 PM	SiCl4 post valve closed
12/10/2012	8:17:08 PM	Bypass valve closed
12/10/2012	8:17:08 PM	Bubbler valve closed
12/10/2012	8:17:08 PM	Main Vac valve opened
12/10/2012	8:17:08 PM	Helium MFC set to  0.000000
12/10/2012	8:17:08 PM	H2 MFC set to  0.000000
12/10/2012	8:17:08 PM	BCl3 MFC set to  0.000000
12/10/2012	8:17:08 PM	PH3 MFC set to  0.000000
12/10/2012	8:17:08 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:17:08 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:17:08 PM	Tube furnace set to 0
12/10/2012	8:17:38 PM	H2 valve closed
12/10/2012	8:17:38 PM	BCl3 valve closed
12/10/2012	8:17:38 PM	PH3 valve closed
12/10/2012	8:17:38 PM	SiCl4 pre valve closed
12/10/2012	8:17:38 PM	SiCl4 post valve closed
12/10/2012	8:17:38 PM	Bypass valve closed
12/10/2012	8:17:38 PM	Bubbler valve closed
12/10/2012	8:17:38 PM	Helium valve opened
12/10/2012	8:17:38 PM	Main Vac valve opened
12/10/2012	8:17:38 PM	Helium MFC set to  20.000000
12/10/2012	8:17:38 PM	H2 MFC set to  0.000000
12/10/2012	8:17:39 PM	BCl3 MFC set to  0.000000
12/10/2012	8:17:39 PM	PH3 MFC set to  0.000000
12/10/2012	8:17:39 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:17:39 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:17:39 PM	Tube furnace set to 0
12/10/2012	8:18:09 PM	Helium valve closed
12/10/2012	8:18:09 PM	H2 valve closed
12/10/2012	8:18:09 PM	BCl3 valve closed
12/10/2012	8:18:09 PM	PH3 valve closed
12/10/2012	8:18:09 PM	SiCl4 pre valve closed
12/10/2012	8:18:09 PM	SiCl4 post valve closed
12/10/2012	8:18:09 PM	Bypass valve closed
12/10/2012	8:18:09 PM	Bubbler valve closed
12/10/2012	8:18:09 PM	Main Vac valve opened
12/10/2012	8:18:09 PM	Helium MFC set to  0.000000
12/10/2012	8:18:09 PM	H2 MFC set to  0.000000
12/10/2012	8:18:09 PM	BCl3 MFC set to  0.000000
12/10/2012	8:18:09 PM	PH3 MFC set to  0.000000
12/10/2012	8:18:09 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:18:09 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:18:09 PM	Tube furnace set to 0
12/10/2012	8:18:10 PM	Run finished at 8:18 PM
12/10/2012	8:18:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/10/2012	8:23:33 PM	Main Vac valve closed
12/10/2012	8:23:46 PM	Main Vac valve opened
12/10/2012	8:24:28 PM	Recipe started at 8:24 PM
12/10/2012	8:24:28 PM	Helium valve closed
12/10/2012	8:24:28 PM	H2 valve closed
12/10/2012	8:24:28 PM	BCl3 valve closed
12/10/2012	8:24:28 PM	PH3 valve closed
12/10/2012	8:24:28 PM	SiCl4 pre valve closed
12/10/2012	8:24:28 PM	SiCl4 post valve closed
12/10/2012	8:24:28 PM	Main Vac valve closed
12/10/2012	8:24:28 PM	Bypass valve closed
12/10/2012	8:24:28 PM	Bubbler valve closed
12/10/2012	8:24:28 PM	Helium MFC set to  0.000000
12/10/2012	8:24:28 PM	H2 MFC set to  0.000000
12/10/2012	8:24:28 PM	BCl3 MFC set to  0.000000
12/10/2012	8:24:28 PM	PH3 MFC set to  0.000000
12/10/2012	8:24:28 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:24:28 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:24:28 PM	Tube furnace set to 0
12/10/2012	8:24:31 PM	Helium valve closed
12/10/2012	8:24:31 PM	BCl3 valve closed
12/10/2012	8:24:31 PM	PH3 valve closed
12/10/2012	8:24:31 PM	SiCl4 pre valve closed
12/10/2012	8:24:31 PM	SiCl4 post valve closed
12/10/2012	8:24:31 PM	Main Vac valve closed
12/10/2012	8:24:31 PM	Bypass valve closed
12/10/2012	8:24:31 PM	Bubbler valve closed
12/10/2012	8:24:31 PM	H2 valve opened
12/10/2012	8:24:31 PM	Helium MFC set to  0.000000
12/10/2012	8:24:31 PM	H2 MFC set to  500.000000
12/10/2012	8:24:31 PM	BCl3 MFC set to  0.000000
12/10/2012	8:24:31 PM	PH3 MFC set to  0.000000
12/10/2012	8:24:31 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:24:31 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:24:32 PM	Tube furnace set to 0
12/10/2012	8:25:42 PM	Helium valve closed
12/10/2012	8:25:42 PM	BCl3 valve closed
12/10/2012	8:25:42 PM	PH3 valve closed
12/10/2012	8:25:42 PM	SiCl4 pre valve closed
12/10/2012	8:25:42 PM	SiCl4 post valve closed
12/10/2012	8:25:42 PM	Main Vac valve closed
12/10/2012	8:25:42 PM	Bypass valve closed
12/10/2012	8:25:42 PM	H2 valve opened
12/10/2012	8:25:42 PM	Bubbler valve opened
12/10/2012	8:25:42 PM	Helium MFC set to  0.000000
12/10/2012	8:25:42 PM	H2 MFC set to  500.000000
12/10/2012	8:25:42 PM	BCl3 MFC set to  0.000000
12/10/2012	8:25:42 PM	PH3 MFC set to  0.000000
12/10/2012	8:25:42 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:25:42 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:25:42 PM	Tube furnace set to 0
12/10/2012	8:25:43 PM	Helium valve closed
12/10/2012	8:25:43 PM	BCl3 valve closed
12/10/2012	8:25:43 PM	PH3 valve closed
12/10/2012	8:25:43 PM	SiCl4 pre valve closed
12/10/2012	8:25:43 PM	SiCl4 post valve closed
12/10/2012	8:25:43 PM	Main Vac valve closed
12/10/2012	8:25:43 PM	Bypass valve closed
12/10/2012	8:25:43 PM	H2 valve opened
12/10/2012	8:25:43 PM	Bubbler valve opened
12/10/2012	8:25:43 PM	Helium MFC set to  0.000000
12/10/2012	8:25:43 PM	H2 MFC set to  500.000000
12/10/2012	8:25:43 PM	BCl3 MFC set to  0.000000
12/10/2012	8:25:43 PM	PH3 MFC set to  0.000000
12/10/2012	8:25:43 PM	SiCl4 MFC set to  0.000000
12/10/2012	8:25:43 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:25:43 PM	Tube furnace set to 1000
12/10/2012	8:55:43 PM	Helium valve closed
12/10/2012	8:55:43 PM	BCl3 valve closed
12/10/2012	8:55:43 PM	Main Vac valve closed
12/10/2012	8:55:43 PM	Bypass valve closed
12/10/2012	8:55:43 PM	H2 valve opened
12/10/2012	8:55:43 PM	PH3 valve opened
12/10/2012	8:55:43 PM	SiCl4 pre valve opened
12/10/2012	8:55:43 PM	SiCl4 post valve opened
12/10/2012	8:55:43 PM	Bubbler valve opened
12/10/2012	8:55:43 PM	Helium MFC set to  0.000000
12/10/2012	8:55:43 PM	H2 MFC set to  500.000000
12/10/2012	8:55:43 PM	BCl3 MFC set to  0.000000
12/10/2012	8:55:43 PM	PH3 MFC set to  0.300000
12/10/2012	8:55:43 PM	SiCl4 MFC set to  25.000000
12/10/2012	8:55:43 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	8:55:44 PM	Tube furnace set to 1000
12/10/2012	9:10:44 PM	Helium valve closed
12/10/2012	9:10:44 PM	BCl3 valve closed
12/10/2012	9:10:44 PM	PH3 valve closed
12/10/2012	9:10:44 PM	SiCl4 pre valve closed
12/10/2012	9:10:44 PM	SiCl4 post valve closed
12/10/2012	9:10:44 PM	Main Vac valve closed
12/10/2012	9:10:44 PM	Bypass valve closed
12/10/2012	9:10:44 PM	H2 valve opened
12/10/2012	9:10:44 PM	Bubbler valve opened
12/10/2012	9:10:44 PM	Helium MFC set to  0.000000
12/10/2012	9:10:44 PM	H2 MFC set to  500.000000
12/10/2012	9:10:44 PM	BCl3 MFC set to  0.000000
12/10/2012	9:10:44 PM	PH3 MFC set to  0.000000
12/10/2012	9:10:44 PM	SiCl4 MFC set to  0.000000
12/10/2012	9:10:44 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	9:10:44 PM	Tube furnace set to 750
12/10/2012	9:15:44 PM	H2 valve closed
12/10/2012	9:15:44 PM	BCl3 valve closed
12/10/2012	9:15:44 PM	PH3 valve closed
12/10/2012	9:15:44 PM	SiCl4 pre valve closed
12/10/2012	9:15:44 PM	SiCl4 post valve closed
12/10/2012	9:15:44 PM	Main Vac valve closed
12/10/2012	9:15:44 PM	Bypass valve closed
12/10/2012	9:15:44 PM	Helium valve opened
12/10/2012	9:15:44 PM	Bubbler valve opened
12/10/2012	9:15:44 PM	Helium MFC set to  500.000000
12/10/2012	9:15:44 PM	H2 MFC set to  0.000000
12/10/2012	9:15:44 PM	BCl3 MFC set to  0.000000
12/10/2012	9:15:44 PM	PH3 MFC set to  0.000000
12/10/2012	9:15:44 PM	SiCl4 MFC set to  0.000000
12/10/2012	9:15:44 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	9:15:44 PM	Tube furnace set to 0
12/10/2012	9:35:44 PM	Helium valve closed
12/10/2012	9:35:44 PM	H2 valve closed
12/10/2012	9:35:44 PM	BCl3 valve closed
12/10/2012	9:35:44 PM	PH3 valve closed
12/10/2012	9:35:44 PM	SiCl4 pre valve closed
12/10/2012	9:35:44 PM	SiCl4 post valve closed
12/10/2012	9:35:44 PM	Main Vac valve closed
12/10/2012	9:35:44 PM	Bypass valve closed
12/10/2012	9:35:44 PM	Bubbler valve closed
12/10/2012	9:35:44 PM	Helium MFC set to  0.000000
12/10/2012	9:35:44 PM	H2 MFC set to  0.000000
12/10/2012	9:35:44 PM	BCl3 MFC set to  0.000000
12/10/2012	9:35:44 PM	PH3 MFC set to  0.000000
12/10/2012	9:35:44 PM	SiCl4 MFC set to  0.000000
12/10/2012	9:35:44 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	9:35:44 PM	Tube furnace set to 0
12/10/2012	9:35:45 PM	Run finished at 9:35 PM
12/10/2012	9:59:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/10/2012	9:59:15 PM	Recipe started at 9:59 PM
12/10/2012	9:59:15 PM	Helium valve closed
12/10/2012	9:59:15 PM	H2 valve closed
12/10/2012	9:59:15 PM	BCl3 valve closed
12/10/2012	9:59:15 PM	PH3 valve closed
12/10/2012	9:59:15 PM	SiCl4 pre valve closed
12/10/2012	9:59:15 PM	SiCl4 post valve closed
12/10/2012	9:59:15 PM	Main Vac valve closed
12/10/2012	9:59:15 PM	Bypass valve closed
12/10/2012	9:59:15 PM	Bubbler valve closed
12/10/2012	9:59:15 PM	Helium MFC set to  0.000000
12/10/2012	9:59:15 PM	H2 MFC set to  0.000000
12/10/2012	9:59:15 PM	BCl3 MFC set to  0.000000
12/10/2012	9:59:15 PM	PH3 MFC set to  0.000000
12/10/2012	9:59:15 PM	SiCl4 MFC set to  0.000000
12/10/2012	9:59:15 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	9:59:15 PM	Tube furnace set to 0
12/10/2012	9:59:18 PM	H2 valve closed
12/10/2012	9:59:18 PM	BCl3 valve closed
12/10/2012	9:59:18 PM	PH3 valve closed
12/10/2012	9:59:18 PM	SiCl4 pre valve closed
12/10/2012	9:59:18 PM	SiCl4 post valve closed
12/10/2012	9:59:18 PM	Main Vac valve closed
12/10/2012	9:59:18 PM	Bypass valve closed
12/10/2012	9:59:18 PM	Bubbler valve closed
12/10/2012	9:59:18 PM	Helium valve opened
12/10/2012	9:59:18 PM	Helium MFC set to  500.000000
12/10/2012	9:59:18 PM	H2 MFC set to  0.000000
12/10/2012	9:59:18 PM	BCl3 MFC set to  0.000000
12/10/2012	9:59:18 PM	PH3 MFC set to  0.000000
12/10/2012	9:59:18 PM	SiCl4 MFC set to  0.000000
12/10/2012	9:59:18 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	9:59:18 PM	Tube furnace set to 0
12/10/2012	9:59:19 PM	Helium valve closed
12/10/2012	9:59:19 PM	H2 valve closed
12/10/2012	9:59:19 PM	BCl3 valve closed
12/10/2012	9:59:19 PM	PH3 valve closed
12/10/2012	9:59:19 PM	SiCl4 pre valve closed
12/10/2012	9:59:19 PM	SiCl4 post valve closed
12/10/2012	9:59:19 PM	Main Vac valve closed
12/10/2012	9:59:19 PM	Bypass valve closed
12/10/2012	9:59:19 PM	Bubbler valve closed
12/10/2012	9:59:19 PM	Helium MFC set to  0.000000
12/10/2012	9:59:19 PM	H2 MFC set to  0.000000
12/10/2012	9:59:19 PM	BCl3 MFC set to  0.000000
12/10/2012	9:59:19 PM	PH3 MFC set to  0.000000
12/10/2012	9:59:19 PM	SiCl4 MFC set to  0.000000
12/10/2012	9:59:19 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	9:59:19 PM	Tube furnace set to 0
12/10/2012	9:59:20 PM	Run finished at 9:59 PM
12/10/2012	9:59:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/10/2012	10:02:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2012	10:02:45 PM	Recipe started at 10:02 PM
12/10/2012	10:02:45 PM	Helium valve closed
12/10/2012	10:02:45 PM	H2 valve closed
12/10/2012	10:02:45 PM	BCl3 valve closed
12/10/2012	10:02:45 PM	PH3 valve closed
12/10/2012	10:02:45 PM	SiCl4 pre valve closed
12/10/2012	10:02:45 PM	SiCl4 post valve closed
12/10/2012	10:02:45 PM	Main Vac valve closed
12/10/2012	10:02:45 PM	Bubbler valve closed
12/10/2012	10:02:45 PM	Bypass valve opened
12/10/2012	10:02:45 PM	Helium MFC set to  0.000000
12/10/2012	10:02:45 PM	H2 MFC set to  0.000000
12/10/2012	10:02:45 PM	BCl3 MFC set to  0.000000
12/10/2012	10:02:45 PM	PH3 MFC set to  0.000000
12/10/2012	10:02:45 PM	SiCl4 MFC set to  0.000000
12/10/2012	10:02:45 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	10:02:45 PM	Tube furnace set to 0
12/10/2012	10:03:53 PM	Helium valve closed
12/10/2012	10:03:53 PM	H2 valve closed
12/10/2012	10:03:53 PM	BCl3 valve closed
12/10/2012	10:03:53 PM	PH3 valve closed
12/10/2012	10:03:53 PM	SiCl4 pre valve closed
12/10/2012	10:03:53 PM	SiCl4 post valve closed
12/10/2012	10:03:53 PM	Main Vac valve closed
12/10/2012	10:03:53 PM	Bubbler valve closed
12/10/2012	10:03:53 PM	Bypass valve opened
12/10/2012	10:03:53 PM	Helium MFC set to  0.000000
12/10/2012	10:03:53 PM	H2 MFC set to  0.000000
12/10/2012	10:03:53 PM	BCl3 MFC set to  0.000000
12/10/2012	10:03:53 PM	PH3 MFC set to  0.000000
12/10/2012	10:03:53 PM	SiCl4 MFC set to  0.000000
12/10/2012	10:03:53 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	10:03:53 PM	Tube furnace set to 0
12/10/2012	10:04:53 PM	Helium valve closed
12/10/2012	10:04:53 PM	H2 valve closed
12/10/2012	10:04:53 PM	BCl3 valve closed
12/10/2012	10:04:53 PM	PH3 valve closed
12/10/2012	10:04:53 PM	SiCl4 pre valve closed
12/10/2012	10:04:53 PM	SiCl4 post valve closed
12/10/2012	10:04:53 PM	Bypass valve closed
12/10/2012	10:04:53 PM	Bubbler valve closed
12/10/2012	10:04:53 PM	Main Vac valve opened
12/10/2012	10:04:53 PM	Helium MFC set to  0.000000
12/10/2012	10:04:53 PM	H2 MFC set to  0.000000
12/10/2012	10:04:53 PM	BCl3 MFC set to  0.000000
12/10/2012	10:04:53 PM	PH3 MFC set to  0.000000
12/10/2012	10:04:53 PM	SiCl4 MFC set to  0.000000
12/10/2012	10:04:53 PM	Bypass solenoid MFC set to  0.000000
12/10/2012	10:04:53 PM	Tube furnace set to 0
12/10/2012	10:04:54 PM	Run finished at 10:04 PM
12/10/2012	10:04:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
